JPH0451556B2 - - Google Patents

Info

Publication number
JPH0451556B2
JPH0451556B2 JP18772884A JP18772884A JPH0451556B2 JP H0451556 B2 JPH0451556 B2 JP H0451556B2 JP 18772884 A JP18772884 A JP 18772884A JP 18772884 A JP18772884 A JP 18772884A JP H0451556 B2 JPH0451556 B2 JP H0451556B2
Authority
JP
Japan
Prior art keywords
trimethoxysilane
methanol
tetramethoxysilane
column
distillation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP18772884A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6165889A (ja
Inventor
Yasushi Kobayashi
Takaaki Shimizu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Chemical Co Ltd
Original Assignee
Shin Etsu Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Etsu Chemical Co Ltd filed Critical Shin Etsu Chemical Co Ltd
Priority to JP18772884A priority Critical patent/JPS6165889A/ja
Publication of JPS6165889A publication Critical patent/JPS6165889A/ja
Publication of JPH0451556B2 publication Critical patent/JPH0451556B2/ja
Granted legal-status Critical Current

Links

JP18772884A 1984-09-07 1984-09-07 トリメトキシシランの分離精製方法 Granted JPS6165889A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18772884A JPS6165889A (ja) 1984-09-07 1984-09-07 トリメトキシシランの分離精製方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18772884A JPS6165889A (ja) 1984-09-07 1984-09-07 トリメトキシシランの分離精製方法

Publications (2)

Publication Number Publication Date
JPS6165889A JPS6165889A (ja) 1986-04-04
JPH0451556B2 true JPH0451556B2 (OSRAM) 1992-08-19

Family

ID=16211137

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18772884A Granted JPS6165889A (ja) 1984-09-07 1984-09-07 トリメトキシシランの分離精製方法

Country Status (1)

Country Link
JP (1) JPS6165889A (OSRAM)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2584775B2 (ja) * 1987-06-16 1997-02-26 多摩化学工業株式会社 トリアルコキシシランの分離精製法
JPH0291079A (ja) * 1988-09-28 1990-03-30 Union Carbide Corp トリメトキシシランとメタノールの混合物からのトリメトキシシランの回収方法
US7365220B2 (en) * 2005-09-29 2008-04-29 Momentive Performance Materials Inc. Process for the recovery of alkoxysilanes obtained from the direct reaction of silicon with alkanols

Also Published As

Publication number Publication date
JPS6165889A (ja) 1986-04-04

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