JPH0451498Y2 - - Google Patents

Info

Publication number
JPH0451498Y2
JPH0451498Y2 JP1986197047U JP19704786U JPH0451498Y2 JP H0451498 Y2 JPH0451498 Y2 JP H0451498Y2 JP 1986197047 U JP1986197047 U JP 1986197047U JP 19704786 U JP19704786 U JP 19704786U JP H0451498 Y2 JPH0451498 Y2 JP H0451498Y2
Authority
JP
Japan
Prior art keywords
cathode
cold cathode
discharge
laser
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1986197047U
Other languages
English (en)
Japanese (ja)
Other versions
JPS63102267U (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986197047U priority Critical patent/JPH0451498Y2/ja
Publication of JPS63102267U publication Critical patent/JPS63102267U/ja
Application granted granted Critical
Publication of JPH0451498Y2 publication Critical patent/JPH0451498Y2/ja
Expired legal-status Critical Current

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  • Lasers (AREA)
JP1986197047U 1986-12-22 1986-12-22 Expired JPH0451498Y2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986197047U JPH0451498Y2 (enExample) 1986-12-22 1986-12-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986197047U JPH0451498Y2 (enExample) 1986-12-22 1986-12-22

Publications (2)

Publication Number Publication Date
JPS63102267U JPS63102267U (enExample) 1988-07-02
JPH0451498Y2 true JPH0451498Y2 (enExample) 1992-12-03

Family

ID=31156419

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986197047U Expired JPH0451498Y2 (enExample) 1986-12-22 1986-12-22

Country Status (1)

Country Link
JP (1) JPH0451498Y2 (enExample)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6062184A (ja) * 1983-09-14 1985-04-10 Nippon Koshuha Kk 窒素レ−ザ装置

Also Published As

Publication number Publication date
JPS63102267U (enExample) 1988-07-02

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