JPH0451415Y2 - - Google Patents
Info
- Publication number
- JPH0451415Y2 JPH0451415Y2 JP14251084U JP14251084U JPH0451415Y2 JP H0451415 Y2 JPH0451415 Y2 JP H0451415Y2 JP 14251084 U JP14251084 U JP 14251084U JP 14251084 U JP14251084 U JP 14251084U JP H0451415 Y2 JPH0451415 Y2 JP H0451415Y2
- Authority
- JP
- Japan
- Prior art keywords
- cylindrical body
- metal bellows
- vacuum
- bellows
- secondary electron
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000002184 metal Substances 0.000 claims description 28
- 238000001514 detection method Methods 0.000 claims description 7
- 238000007789 sealing Methods 0.000 claims description 7
- 238000010894 electron beam technology Methods 0.000 claims description 5
- 230000001678 irradiating effect Effects 0.000 claims description 2
- 230000003287 optical effect Effects 0.000 description 4
- 238000001000 micrograph Methods 0.000 description 2
- 238000012856 packing Methods 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14251084U JPH0451415Y2 (tr) | 1984-09-20 | 1984-09-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14251084U JPH0451415Y2 (tr) | 1984-09-20 | 1984-09-20 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6157464U JPS6157464U (tr) | 1986-04-17 |
| JPH0451415Y2 true JPH0451415Y2 (tr) | 1992-12-03 |
Family
ID=30700831
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14251084U Expired JPH0451415Y2 (tr) | 1984-09-20 | 1984-09-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0451415Y2 (tr) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP3483914A3 (en) * | 2017-11-13 | 2019-09-25 | Jeol Ltd. | Charged particle beam device with a detector holding stand |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008217832A (ja) * | 2008-06-12 | 2008-09-18 | Neuron:Kk | バーコードリーダ |
| JP6346016B2 (ja) * | 2014-07-17 | 2018-06-20 | 日本電子株式会社 | 放射線分析装置 |
| US11094501B2 (en) * | 2019-11-19 | 2021-08-17 | ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH | Secondary charged particle imaging system |
-
1984
- 1984-09-20 JP JP14251084U patent/JPH0451415Y2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP3483914A3 (en) * | 2017-11-13 | 2019-09-25 | Jeol Ltd. | Charged particle beam device with a detector holding stand |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6157464U (tr) | 1986-04-17 |
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