JPH0451130U - - Google Patents
Info
- Publication number
- JPH0451130U JPH0451130U JP9267190U JP9267190U JPH0451130U JP H0451130 U JPH0451130 U JP H0451130U JP 9267190 U JP9267190 U JP 9267190U JP 9267190 U JP9267190 U JP 9267190U JP H0451130 U JPH0451130 U JP H0451130U
- Authority
- JP
- Japan
- Prior art keywords
- furnace
- heat treatment
- gas
- materials
- gas inlet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims description 4
- 238000009792 diffusion process Methods 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
Description
第１図は、この考案に従う熱処理炉の一例を示
す縦型拡散炉の要部断面図、第２図は、この考案
に従う熱処理炉の一例を示す横型拡散炉の要部断
面図、第３図は、従来の縦型拡散炉の要部断面図
である。
１……反応管、２ａ，２ｂ……炉本体、３……
ヒータ、４……ガス導入口、５……ガス導入口、
６……ガス排気口、７ａ，７ｂ……ウエハボート
、８……シリコンウエハ。
FIG. 1 is a cross-sectional view of a main part of a vertical diffusion furnace showing an example of a heat treatment furnace according to this invention, FIG. 2 is a cross-sectional view of a main part of a horizontal diffusion furnace showing an example of a heat treatment furnace according to this invention, and FIG. 1 is a sectional view of a main part of a conventional vertical diffusion furnace. 1... Reaction tube, 2a, 2b... Furnace body, 3...
Heater, 4...Gas inlet, 5...Gas inlet,
6...Gas exhaust port, 7a, 7b...Wafer boat, 8...Silicon wafer.
Claims (1)
に、所定の組成を有するガスを案内すべきガス導
入口及びガス排出口をそなえる熱処理炉であつて
、 上記ガス導入口は、被処理材の配列を挟んで炉
両端部に少なくとも設けてなることを特徴とする
熱処理炉。[Claims for Utility Model Registration] A heat treatment furnace is provided with a gas inlet and a gas outlet for guiding a gas having a predetermined composition on the surface of a plurality of materials to be treated arranged and housed in the furnace, A heat treatment furnace characterized in that the gas inlet is provided at least at both ends of the furnace across the arrangement of the materials to be treated.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9267190U JPH0451130U (en) | 1990-09-05 | 1990-09-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9267190U JPH0451130U (en) | 1990-09-05 | 1990-09-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0451130U true JPH0451130U (en) | 1992-04-30 |
Family
ID=31829317
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9267190U Pending JPH0451130U (en) | 1990-09-05 | 1990-09-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0451130U (en) |
-
1990
- 1990-09-05 JP JP9267190U patent/JPH0451130U/ja active Pending