JPH0361328U - - Google Patents
Info
- Publication number
- JPH0361328U JPH0361328U JP12337989U JP12337989U JPH0361328U JP H0361328 U JPH0361328 U JP H0361328U JP 12337989 U JP12337989 U JP 12337989U JP 12337989 U JP12337989 U JP 12337989U JP H0361328 U JPH0361328 U JP H0361328U
- Authority
- JP
- Japan
- Prior art keywords
- core tube
- sample
- cooling
- insertion port
- cooling unit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001816 cooling Methods 0.000 claims description 4
- 238000010438 heat treatment Methods 0.000 claims description 2
- 230000037431 insertion Effects 0.000 claims description 2
- 238000003780 insertion Methods 0.000 claims description 2
- 239000000112 cooling gas Substances 0.000 description 2
- 239000000498 cooling water Substances 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Furnace Details (AREA)
Description
第１図、第２図は本考案の実施例を示す断面図
、第３図は従来例の問題点を示す断面図、である
。
図において、１……炉心管、２……発熱体、３
……バスケツト、４……ウエハ、５……ガス導入
口、６……キヤツプ、７……排出ガスの流れ、８
……外気の流れ、９……試料挿入口、１０，１２
……冷却ユニツト、１１，１４……水冷用パイプ
、１３……空冷用パイプ、１３ａ……冷却ガス導
入口、１３ｂ……冷却ガス吹出し孔、１４ａ……
冷却水導入口、１４ｂ……冷却水排出口、である
。
FIGS. 1 and 2 are cross-sectional views showing an embodiment of the present invention, and FIG. 3 is a cross-sectional view showing problems in the conventional example. In the figure, 1... Furnace tube, 2... Heating element, 3
...Basket, 4...Wafer, 5...Gas inlet, 6...Cap, 7...Flow of exhaust gas, 8
...Outside air flow, 9...Sample insertion port, 10, 12
... Cooling unit, 11, 14 ... Water cooling pipe, 13 ... Air cooling pipe, 13a ... Cooling gas inlet, 13b ... Cooling gas outlet, 14a ...
A cooling water inlet, 14b...a cooling water outlet.
Claims (1)
を行う熱処理炉において、 該炉心管の試料挿入口側に冷却ユニツトを設け
たことを特徴とする熱処理炉。[Scope of Claim for Utility Model Registration] A heat treatment furnace for heat treating a sample by introducing gas from one end of a core tube, characterized in that a cooling unit is provided on the sample insertion port side of the core tube.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12337989U JPH0361328U (en) | 1989-10-20 | 1989-10-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12337989U JPH0361328U (en) | 1989-10-20 | 1989-10-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0361328U true JPH0361328U (en) | 1991-06-17 |
Family
ID=31671360
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12337989U Pending JPH0361328U (en) | 1989-10-20 | 1989-10-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0361328U (en) |
-
1989
- 1989-10-20 JP JP12337989U patent/JPH0361328U/ja active Pending
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