JPH0353835U - - Google Patents
Info
- Publication number
- JPH0353835U JPH0353835U JP11485589U JP11485589U JPH0353835U JP H0353835 U JPH0353835 U JP H0353835U JP 11485589 U JP11485589 U JP 11485589U JP 11485589 U JP11485589 U JP 11485589U JP H0353835 U JPH0353835 U JP H0353835U
- Authority
- JP
- Japan
- Prior art keywords
- exhaust port
- control device
- pressure control
- heat treatment
- treatment apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 4
- 238000010438 heat treatment Methods 0.000 claims description 3
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Waste-Gas Treatment And Other Accessory Devices For Furnaces (AREA)
- Chemical Vapour Deposition (AREA)
Description
第１図は、この考案の一実施例の自動排気圧力
制御装置を採用した半導体熱処理装置の断面図で
ある。第２図は、この考案で使用する自動排気圧
力制御装置の一例の断面図である。第３図は、従
来の半導体熱処理装置の断面図である。
１……ヒータ、２……反応管、３……気体供給
部、４……排気口、５ａ〜５ｃ……半導体基板、
６……自動排気圧力制御装置、６１……排気管、
６２……バタフライ弁、６３……圧力計、６４…
…モータ、６５……コントローラ。
FIG. 1 is a sectional view of a semiconductor heat treatment apparatus employing an automatic exhaust pressure control device according to an embodiment of the present invention. FIG. 2 is a sectional view of an example of an automatic exhaust pressure control device used in this invention. FIG. 3 is a sectional view of a conventional semiconductor heat treatment apparatus. DESCRIPTION OF SYMBOLS 1... Heater, 2... Reaction tube, 3... Gas supply part, 4... Exhaust port, 5a-5c... Semiconductor substrate,
6... Automatic exhaust pressure control device, 61... Exhaust pipe,
62... Butterfly valve, 63... Pressure gauge, 64...
...Motor, 65...Controller.
Claims (1)
半導体熱処理装置において、 排気口に自動排気圧力制御装置を設けたことを
特徴とする半導体熱処理装置。[Scope of Claim for Utility Model Registration] A semiconductor heat treatment apparatus having a heater, a reaction tube, a gas supply section, and an exhaust port, characterized in that the exhaust port is provided with an automatic exhaust pressure control device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11485589U JPH0353835U (en) | 1989-09-29 | 1989-09-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11485589U JPH0353835U (en) | 1989-09-29 | 1989-09-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0353835U true JPH0353835U (en) | 1991-05-24 |
Family
ID=31663203
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11485589U Pending JPH0353835U (en) | 1989-09-29 | 1989-09-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0353835U (en) |
-
1989
- 1989-09-29 JP JP11485589U patent/JPH0353835U/ja active Pending