JPS6444631U - - Google Patents
Info
- Publication number
- JPS6444631U JPS6444631U JP13799487U JP13799487U JPS6444631U JP S6444631 U JPS6444631 U JP S6444631U JP 13799487 U JP13799487 U JP 13799487U JP 13799487 U JP13799487 U JP 13799487U JP S6444631 U JPS6444631 U JP S6444631U
- Authority
- JP
- Japan
- Prior art keywords
- reaction
- gas
- pressure sensor
- reaction chamber
- flow path
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007789 gas Substances 0.000 claims 2
- 239000012495 reaction gas Substances 0.000 claims 2
- 230000002411 adverse Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Drying Of Semiconductors (AREA)
Description
第１図は一実施例を示す概略線図、第２図は従
来の反応装置を示す概略線図である。
２……反応室、４，６，１２，１６……ニード
ルバルブ、８……排気口、１０……圧力センサ、
１４……ガス流路。
FIG. 1 is a schematic diagram showing one embodiment, and FIG. 2 is a schematic diagram showing a conventional reaction apparatus. 2... Reaction chamber, 4, 6, 12, 16... Needle valve, 8... Exhaust port, 10... Pressure sensor,
14...Gas flow path.
Claims (1)
応ガス雰囲気下で対象物に反応を起させる反応装
置において、反応室に取りつけられる圧力センサ
側から反応室側へ圧力センサに悪影響を与えない
ガスを流すガス流路を設けたことを特徴とする反
応装置。 In a reaction device that is equipped with an exhaust port and a reaction gas supply port and causes a reaction in a target object under a reduced pressure reaction gas atmosphere, a gas that does not adversely affect the pressure sensor is passed from the pressure sensor side installed in the reaction chamber to the reaction chamber side. 1. A reaction device characterized by being provided with a gas flow path through which .
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13799487U JPS6444631U (en) | 1987-09-09 | 1987-09-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13799487U JPS6444631U (en) | 1987-09-09 | 1987-09-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6444631U true JPS6444631U (en) | 1989-03-16 |
Family
ID=31399927
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13799487U Pending JPS6444631U (en) | 1987-09-09 | 1987-09-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6444631U (en) |
-
1987
- 1987-09-09 JP JP13799487U patent/JPS6444631U/ja active Pending