JPS61114165U - - Google Patents
Info
- Publication number
- JPS61114165U JPS61114165U JP19832584U JP19832584U JPS61114165U JP S61114165 U JPS61114165 U JP S61114165U JP 19832584 U JP19832584 U JP 19832584U JP 19832584 U JP19832584 U JP 19832584U JP S61114165 U JPS61114165 U JP S61114165U
- Authority
- JP
- Japan
- Prior art keywords
- control device
- pressure control
- throttle valve
- exhaust pipe
- cross
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000002093 peripheral effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 5
- 239000012495 reaction gas Substances 0.000 description 1
Landscapes
- Lift Valve (AREA)
Description
第１，２図はそれぞれ本考案の横断面図および
縦断面図、第３図はバルブ開度と平衡圧力の関係
を示す線図、第４，５図はそれぞれ従平装置の横
断面図および縦断面図、第６図はバルブ開度と平
衡圧力の関係を示す線図、第７図は本考案を適用
する装置の全体図、第８図はその圧力制御のブロ
ツク図、第９図は従来装置における経過時間と圧
力の関係を示す線図である。
１……処理室、２……排気管、３……スロツト
ルバルブ、４……ストツプバルブ、５……真空排
気装置、６……反応ガス供給源、７……流量コン
トローラ、８……バルブ、９……圧力計、１０…
…ＰＩＤ制御装置、１１……駆動モータ、１２…
…入力手段。
Figures 1 and 2 are a cross-sectional view and a longitudinal cross-sectional view of the present invention, respectively, Figure 3 is a diagram showing the relationship between valve opening and equilibrium pressure, and Figures 4 and 5 are a cross-sectional view and a vertical cross-sectional view of the flattening device, respectively. 6 is a diagram showing the relationship between valve opening and equilibrium pressure, FIG. 7 is an overall view of the device to which the present invention is applied, FIG. 8 is a block diagram of its pressure control, and FIG. 9 is a diagram showing the relationship between valve opening degree and equilibrium pressure. FIG. 2 is a diagram showing the relationship between elapsed time and pressure in a conventional device. DESCRIPTION OF SYMBOLS 1... Processing chamber, 2... Exhaust pipe, 3... Throttle valve, 4... Stop valve, 5... Vacuum exhaust device, 6... Reaction gas supply source, 7... Flow rate controller, 8... Valve, 9...Pressure gauge, 10...
...PID control device, 11... Drive motor, 12...
...Input means.
Claims (1)
置において、長円もしくはこれに類した板状の形
状を有し、かつ短軸を回転軸として回転可能なス
ロツトルバルブと、該スロツトルバルブの外周部
分の包絡面よりも小さな曲率の断面を管路方向に
有する排気管とを組み合わせたことを特徴とする
圧力制御装置。 In a pressure control device consisting of a throttle valve and an exhaust pipe, the throttle valve has an oval or similar plate shape and is rotatable with its short axis as the rotation axis, and an outer peripheral portion of the throttle valve. 1. A pressure control device characterized in that the pressure control device is combined with an exhaust pipe having a cross section with a smaller curvature in the pipe direction than the envelope surface of the pressure control device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19832584U JPS61114165U (en) | 1984-12-28 | 1984-12-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19832584U JPS61114165U (en) | 1984-12-28 | 1984-12-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61114165U true JPS61114165U (en) | 1986-07-18 |
Family
ID=30757218
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19832584U Pending JPS61114165U (en) | 1984-12-28 | 1984-12-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61114165U (en) |
-
1984
- 1984-12-28 JP JP19832584U patent/JPS61114165U/ja active Pending