JPS6196538U - - Google Patents
Info
- Publication number
- JPS6196538U JPS6196538U JP18080084U JP18080084U JPS6196538U JP S6196538 U JPS6196538 U JP S6196538U JP 18080084 U JP18080084 U JP 18080084U JP 18080084 U JP18080084 U JP 18080084U JP S6196538 U JPS6196538 U JP S6196538U
- Authority
- JP
- Japan
- Prior art keywords
- valve
- air
- gas
- fixing surface
- gas introduction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 claims description 2
- 239000002131 composite material Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Valve Housings (AREA)
- Multiple-Way Valves (AREA)
- Quick-Acting Or Multi-Walled Pipe Joints (AREA)
- Drying Of Semiconductors (AREA)
Description
第１図は、本考案の半導体装置用ブロツクバル
ブの正面図、第２図は、第１図の一部切欠側面図
、第３図は、本考案の他の実施例を示す正面図、
第４図は、第３図の一部切欠斜視図、第５図は、
従来の複合エアバルブのバルブ系統図である。
１１…バルブボデイ、１１ａ…バルブ固定面、
１２…ガス供給通路、１３…ガス導入用エアバル
ブ、１４…ガス排出用エアバルブ、１５，１６，
３０，３２…通路、２５…室、２９…エア導入部
、３１…ガス導入部、３３…ガス排気部。
1 is a front view of a block valve for a semiconductor device according to the present invention, FIG. 2 is a partially cutaway side view of FIG. 1, and FIG. 3 is a front view showing another embodiment of the present invention.
Fig. 4 is a partially cutaway perspective view of Fig. 3, and Fig. 5 is a partially cutaway perspective view of Fig. 3.
FIG. 2 is a valve system diagram of a conventional composite air valve. 11... Valve body, 11a... Valve fixing surface,
12...Gas supply passage, 13...Air valve for gas introduction, 14...Air valve for gas discharge, 15, 16,
30, 32... Passage, 25... Chamber, 29... Air introduction section, 31... Gas introduction section, 33... Gas exhaust section.
Claims (1)
、該多面ブロツクの一面に形成されたバルブ固定
面と、該バルブ固定面に対しＶ字状に配置された
ガスの導入若しくは排出用エアバルブと、該エア
バルブにそれぞれ接続されたガス導入部若しくは
ガス排気部とを備え、前記エア駆動部からのエア
圧力により選択的にガスの流れ方向を制御するこ
とを特徴とする半導体装置用空気作動式ブロツク
バルブ。 (2) 前記ガス導入部とガス排気部とを、前記バ
ルブ固定面に対し、垂直若しくは平行の方向に設
けた実用新案登録請求の範囲第１項記載の空気作
動式ブロツクバルブ。[Claims for Utility Model Registration] (1) A valve body formed of a multi-sided block, a valve fixing surface formed on one surface of the multi-sided block, and gas introduction arranged in a V-shape with respect to the valve fixing surface. Alternatively, a semiconductor device comprising a discharge air valve and a gas introduction section or a gas exhaust section respectively connected to the air valve, and selectively controlling the flow direction of the gas by air pressure from the air drive section. Air operated block valve. (2) The air-operated block valve according to claim 1, wherein the gas introduction part and the gas exhaust part are provided in a direction perpendicular or parallel to the valve fixing surface.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18080084U JPH0442913Y2 (en) | 1984-11-30 | 1984-11-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18080084U JPH0442913Y2 (en) | 1984-11-30 | 1984-11-30 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6196538U true JPS6196538U (en) | 1986-06-21 |
| JPH0442913Y2 JPH0442913Y2 (en) | 1992-10-12 |
Family
ID=30738357
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18080084U Expired JPH0442913Y2 (en) | 1984-11-30 | 1984-11-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0442913Y2 (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01281138A (en) * | 1988-05-08 | 1989-11-13 | Tadahiro Omi | Pipeline system for process gas supply |
| JPH0221618A (en) * | 1988-07-08 | 1990-01-24 | Tadahiro Omi | Process equipment gas supply piping equipment |
| JPH11141713A (en) * | 1997-09-05 | 1999-05-28 | Tetra Laval Holdings & Finance Sa | Sterile valve assembly |
| JP2019157888A (en) * | 2018-03-07 | 2019-09-19 | 株式会社Ｓｃｒｅｅｎホールディングス | Medicine liquid control valve and substrate treatment device |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20060060253A1 (en) * | 2002-10-21 | 2006-03-23 | Ckd Corporation | Integrated gas valve |
| JP7375264B2 (en) * | 2019-06-28 | 2023-11-08 | トーステ株式会社 | Branch flow switching valve |
-
1984
- 1984-11-30 JP JP18080084U patent/JPH0442913Y2/ja not_active Expired
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01281138A (en) * | 1988-05-08 | 1989-11-13 | Tadahiro Omi | Pipeline system for process gas supply |
| JPH0221618A (en) * | 1988-07-08 | 1990-01-24 | Tadahiro Omi | Process equipment gas supply piping equipment |
| JPH11141713A (en) * | 1997-09-05 | 1999-05-28 | Tetra Laval Holdings & Finance Sa | Sterile valve assembly |
| JP2019157888A (en) * | 2018-03-07 | 2019-09-19 | 株式会社Ｓｃｒｅｅｎホールディングス | Medicine liquid control valve and substrate treatment device |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0442913Y2 (en) | 1992-10-12 |