JPS62102883U - - Google Patents
Info
- Publication number
- JPS62102883U JPS62102883U JP1985196330U JP19633085U JPS62102883U JP S62102883 U JPS62102883 U JP S62102883U JP 1985196330 U JP1985196330 U JP 1985196330U JP 19633085 U JP19633085 U JP 19633085U JP S62102883 U JPS62102883 U JP S62102883U
- Authority
- JP
- Japan
- Prior art keywords
- pressure sensor
- negative pressure
- vacuum pump
- control circuit
- pump body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Description
図は本考案の一実施例の横断面図である。
１，１９……真空ポンプ部、５，３７……真空
室、１８……吸込側配管、２４……モータ、３８
……制御回路、３９……負圧センサ。
The figure is a cross-sectional view of one embodiment of the present invention. 1, 19... Vacuum pump section, 5, 37... Vacuum chamber, 18... Suction side piping, 24... Motor, 38
...Control circuit, 39...Negative pressure sensor.
Claims (1)
モータで形成すると共に真空ポンプ本体の吸込側
配管に負圧センサを装着し、該負圧センサの出力
に応じて前記可変速モータに回転数変換を指令す
る制御回路を設け、前記負圧センサと該制御回路
を接続したことを特徴とする真空ポンプ。 The motor that serves as the drive source for the vacuum pump body is formed by a variable speed motor, and a negative pressure sensor is attached to the suction side piping of the vacuum pump body, and the rotation speed is changed to the variable speed motor according to the output of the negative pressure sensor. A vacuum pump characterized in that a control circuit for issuing commands is provided, and the negative pressure sensor and the control circuit are connected.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985196330U JPS62102883U (en) | 1985-12-20 | 1985-12-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985196330U JPS62102883U (en) | 1985-12-20 | 1985-12-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62102883U true JPS62102883U (en) | 1987-06-30 |
Family
ID=31155054
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985196330U Pending JPS62102883U (en) | 1985-12-20 | 1985-12-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62102883U (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2003078838A1 (en) * | 2002-03-20 | 2003-09-25 | Ricoh Company, Ltd. | Vacuum pump control device, and vacuum device |
| JP2005256845A (en) * | 1999-11-17 | 2005-09-22 | Nabtesco Corp | Evacuating apparatus |
| JP2007263122A (en) * | 1999-11-17 | 2007-10-11 | Nabtesco Corp | Evacuating apparatus |
| JP2007263121A (en) * | 1999-11-17 | 2007-10-11 | Nabtesco Corp | Evacuating apparatus |
| JP2007298043A (en) * | 1999-11-17 | 2007-11-15 | Nabtesco Corp | Vacuum exhaust device |
| JP2009127528A (en) * | 2007-11-22 | 2009-06-11 | Kobe Steel Ltd | Low noise type liquid cooled compressor |
-
1985
- 1985-12-20 JP JP1985196330U patent/JPS62102883U/ja active Pending
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005256845A (en) * | 1999-11-17 | 2005-09-22 | Nabtesco Corp | Evacuating apparatus |
| JP2007263122A (en) * | 1999-11-17 | 2007-10-11 | Nabtesco Corp | Evacuating apparatus |
| JP2007263121A (en) * | 1999-11-17 | 2007-10-11 | Nabtesco Corp | Evacuating apparatus |
| JP2007298043A (en) * | 1999-11-17 | 2007-11-15 | Nabtesco Corp | Vacuum exhaust device |
| WO2003078838A1 (en) * | 2002-03-20 | 2003-09-25 | Ricoh Company, Ltd. | Vacuum pump control device, and vacuum device |
| JP2009127528A (en) * | 2007-11-22 | 2009-06-11 | Kobe Steel Ltd | Low noise type liquid cooled compressor |