JPS6446489U - - Google Patents
Info
- Publication number
- JPS6446489U JPS6446489U JP14151787U JP14151787U JPS6446489U JP S6446489 U JPS6446489 U JP S6446489U JP 14151787 U JP14151787 U JP 14151787U JP 14151787 U JP14151787 U JP 14151787U JP S6446489 U JPS6446489 U JP S6446489U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum pump
- screw vacuum
- electric motor
- speed increasing
- driving electric
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011261 inert gas Substances 0.000 claims description 2
- 238000007789 sealing Methods 0.000 claims 1
Description
図は、本考案の一実施例を示す、スクリユー真
空ポンプの縦断面図である。
１……真空ポンプ本体、２……増速ギヤケース
、３……電動機、５，７……不活性ガス配管、８
，９……軸封、１０，１１……連通穴。
The figure is a longitudinal sectional view of a screw vacuum pump showing an embodiment of the present invention. 1... Vacuum pump body, 2... Speed-up gear case, 3... Electric motor, 5, 7... Inert gas piping, 8
, 9... Shaft seal, 10, 11... Communication hole.
Claims (1)
めの増速部および駆動用電動機より成る粗引きス
クリユー真空ポンプにおいて、ポンプ本体の吐出
側軸封部と駆動用電動機に不活性ガス注入口を設
けるとともに電動機本体と増速部を連通する流路
を設けたことを特徴とするスクリユー真空ポンプ
装置。 In a roughing screw vacuum pump consisting of a screw vacuum pump body, a speed increasing part for driving the body, and a driving electric motor, an inert gas inlet is provided in the discharge side shaft sealing part of the pump body and the driving electric motor, and the motor body A screw vacuum pump device characterized in that a flow path is provided that communicates with the speed increasing section.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14151787U JPS6446489U (en) | 1987-09-18 | 1987-09-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14151787U JPS6446489U (en) | 1987-09-18 | 1987-09-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6446489U true JPS6446489U (en) | 1989-03-22 |
Family
ID=31406647
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14151787U Pending JPS6446489U (en) | 1987-09-18 | 1987-09-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6446489U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2001061194A1 (en) * | 2000-02-17 | 2001-08-23 | Daikin Industries, Ltd. | Screw compressor |
-
1987
- 1987-09-18 JP JP14151787U patent/JPS6446489U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2001061194A1 (en) * | 2000-02-17 | 2001-08-23 | Daikin Industries, Ltd. | Screw compressor |