JPH0450521Y2 - - Google Patents
Info
- Publication number
- JPH0450521Y2 JPH0450521Y2 JP7395087U JP7395087U JPH0450521Y2 JP H0450521 Y2 JPH0450521 Y2 JP H0450521Y2 JP 7395087 U JP7395087 U JP 7395087U JP 7395087 U JP7395087 U JP 7395087U JP H0450521 Y2 JPH0450521 Y2 JP H0450521Y2
- Authority
- JP
- Japan
- Prior art keywords
- strain
- cantilever beam
- resistor
- sensitive
- force sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000007639 printing Methods 0.000 claims description 14
- 238000005516 engineering process Methods 0.000 claims description 11
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 claims description 8
- 239000000919 ceramic Substances 0.000 claims description 5
- 229910052751 metal Inorganic materials 0.000 claims description 5
- 239000002184 metal Substances 0.000 claims description 5
- 239000011521 glass Substances 0.000 claims description 2
- 239000010408 film Substances 0.000 description 13
- 239000004020 conductor Substances 0.000 description 5
- 230000000694 effects Effects 0.000 description 5
- 238000010304 firing Methods 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 229910001925 ruthenium oxide Inorganic materials 0.000 description 3
- WOCIAKWEIIZHES-UHFFFAOYSA-N ruthenium(iv) oxide Chemical compound O=[Ru]=O WOCIAKWEIIZHES-UHFFFAOYSA-N 0.000 description 3
- 238000009966 trimming Methods 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- SWELZOZIOHGSPA-UHFFFAOYSA-N palladium silver Chemical compound [Pd].[Ag] SWELZOZIOHGSPA-UHFFFAOYSA-N 0.000 description 2
- 230000000149 penetrating effect Effects 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 239000004332 silver Substances 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 230000001133 acceleration Effects 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000004534 enameling Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Landscapes
- Measurement Of Force In General (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7395087U JPH0450521Y2 (de) | 1987-05-18 | 1987-05-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7395087U JPH0450521Y2 (de) | 1987-05-18 | 1987-05-18 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63183525U JPS63183525U (de) | 1988-11-25 |
| JPH0450521Y2 true JPH0450521Y2 (de) | 1992-11-27 |
Family
ID=30918738
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7395087U Expired JPH0450521Y2 (de) | 1987-05-18 | 1987-05-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0450521Y2 (de) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5156680B2 (ja) * | 2009-04-20 | 2013-03-06 | ミネベア株式会社 | 曲げセンサ |
-
1987
- 1987-05-18 JP JP7395087U patent/JPH0450521Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63183525U (de) | 1988-11-25 |
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