JPH0449518B2 - - Google Patents

Info

Publication number
JPH0449518B2
JPH0449518B2 JP14400687A JP14400687A JPH0449518B2 JP H0449518 B2 JPH0449518 B2 JP H0449518B2 JP 14400687 A JP14400687 A JP 14400687A JP 14400687 A JP14400687 A JP 14400687A JP H0449518 B2 JPH0449518 B2 JP H0449518B2
Authority
JP
Japan
Prior art keywords
diamond
substrate
raw material
single electrode
material gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP14400687A
Other languages
English (en)
Japanese (ja)
Other versions
JPS63310795A (ja
Inventor
Kazuaki Kurihara
Kenichi Sasaki
Motonobu Kawarada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP14400687A priority Critical patent/JPS63310795A/ja
Publication of JPS63310795A publication Critical patent/JPS63310795A/ja
Publication of JPH0449518B2 publication Critical patent/JPH0449518B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP14400687A 1987-06-11 1987-06-11 マイクロ波プラズマジェットによるダイヤモンド気相合成方法 Granted JPS63310795A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14400687A JPS63310795A (ja) 1987-06-11 1987-06-11 マイクロ波プラズマジェットによるダイヤモンド気相合成方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14400687A JPS63310795A (ja) 1987-06-11 1987-06-11 マイクロ波プラズマジェットによるダイヤモンド気相合成方法

Publications (2)

Publication Number Publication Date
JPS63310795A JPS63310795A (ja) 1988-12-19
JPH0449518B2 true JPH0449518B2 (instruction) 1992-08-11

Family

ID=15352119

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14400687A Granted JPS63310795A (ja) 1987-06-11 1987-06-11 マイクロ波プラズマジェットによるダイヤモンド気相合成方法

Country Status (1)

Country Link
JP (1) JPS63310795A (instruction)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE68922244T2 (de) * 1988-06-06 1995-09-14 Japan Res Dev Corp Verfahren zur Durchführung einer Plasmareaktion bei Atmosphärendruck.
JP2000133494A (ja) 1998-10-23 2000-05-12 Mitsubishi Heavy Ind Ltd マイクロ波プラズマ発生装置及び方法
RU2435874C2 (ru) * 2006-04-14 2011-12-10 СИЛИКА ТЕК, ЭлЭлСи Установка плазменного осаждения и способ изготовления солнечных элементов
US9427821B2 (en) 2013-03-15 2016-08-30 Agilent Technologies, Inc. Integrated magnetron plasma torch, and related methods

Also Published As

Publication number Publication date
JPS63310795A (ja) 1988-12-19

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