JPH0449105A - Sheet metal conveyor - Google Patents

Abstract

PURPOSE:To reduce time for compensating the position of a sheet metal by permitting the sheet metal to be conveyed accurately without oscillation and slippage, the sheet metal sustained horizontally by means of sustaining it between the center portions of oppositing V-groove rollers and also utilizing the pressure caused by a spring member. CONSTITUTION:When a sheet metal 31 is conveyed from the proceeding process side, presence of the sheet metal 31 is detected by a photo sensor 22 and, only when it is found presence, a stepping motor 7, 7 actuates to rotate causing a V-groove roller 22 to rotate through a belt wheel 3, 3 ... a timing belt 5, 5 to convey the sheet metal 31. The movement and stoppage of the sheet metal 31 is effected by a photo sensor 23 sensing a reference hole 32a and thereby actuating or stopping the motor 7, 7. With the sheet metal conveyor, the sheet metal 31 is conveyed without oscillating or causing it to slip toward the Y axis because the sheet metal 31 is stably sustained by the fixed elastic pressure caused by an elastic member 14 and, moreover, in a horizontal manner.

Description

DETAILED DESCRIPTION OF THE INVENTION "Field of Industrial Application" The present invention relates to a thin plate conveying apparatus used in the manufacturing process of semiconductor devices such as LSIs, and more particularly to a conveying apparatus for rectangular thin plates such as lead frames.

[Prior Art J] For example, during the LSI vehicle manufacturing process, there is a Guibond process in which lead frames are sequentially transported to predetermined positions and chips are mounted on the lead frames via an adhesive, and then the adhesive is cured. A curing process for fixing the chip on a lead frame is then performed, followed by a wire bomb knob process for making predetermined connections to the depth.

This thin plate conveying device for lead frames, etc.
A device that sequentially transports the lead frame while inserting and removing guide pins into reference holes drilled at regular intervals on both ends of the lead frame, and a device that transports the lead frame by holding one or both ends of the lead frame from above and below with chucks or rotating rollers. etc. are used.

``Problems to be Solved by the Invention'' However, in the conveying device using the guide pin, when the guide pin is inserted into and removed from the reference hole, the guide pin comes into contact with the inner surface of the reference hole, causing mechanical damage to the lead frame. In addition, the conveyance device using the chuck or rotating roller applies mechanical vibration to the lead frame when the lead frame is intermittently pinched from above and below, so the conveyance of the lead frame after the Guibond process is If the adhesive is transported while the adhesive remains uncured, there is a problem in that the chip on the lead frame may be misaligned due to vibration.

In addition, in intermittent conveyance that requires precision, such as conveyance during the wire bonding process, the lead frame is placed in a guide groove and conveyed along the guide groove, but the width of the guide groove is Since there is a margin wider than the width of There was an inconvenience that caused misalignment.

In other words, in a conveyance device using a guide pin, the reference hole has a margin with respect to the guide bin, and even in the conveyance means using the chuck or rotating roller, there is a margin in the Y-axis direction, so there is no misalignment in the Y-axis direction. It is inevitable that this will occur.

Therefore, during the wire bonding process, the position of the transported lead frame is corrected again by the position correction device, and the time required for position correction hinders the improvement of productivity.

[Means for Solving the Problems] The invention as claimed in claim 1 has been made in view of the above-mentioned disadvantages, and includes a pair of horizontally held groove-shaped rollers that are connected to a drive device and rotated. A thin plate conveying device characterized in that one or both of the support stands are slidably provided on the base, and an elastic member is provided between the outside of the slidable support stand and the base. be.

The invention as claimed in claim 2 has been made in view of the above-mentioned disadvantage, and is based on one or both of a pair of support stands formed by horizontally holding a plurality of groove-shaped rollers that are connected to a drive device and rotate. The thin plate conveying device is characterized in that it is slidably provided on a movable base on a table, and an elastic member is provided between the outside of the slidable support base and the movable base.

``Operation'' When a thin plate is conveyed from the previous process of this device, the thin plate is held between the centers of opposing groove-shaped rollers on a pair of support stands. Here, at least one of the supports is biased toward the other support by the elastic member, so that the thin plate sandwiched between the grooved rollers is reliably gripped horizontally and in the Y-axis direction. is gripped with little room. and,
The thin plate is conveyed accurately by rotating the grooved rollers by the driving device.

"Example" (Example 1) FIGS. 1 to 7 are diagrams showing Example 1 of the present invention.

A pair of support stands 1.21 are provided on the base 12,
One support stand 1 is slidably provided on the base 12, and the other support stand 21 is fixed on the base 12 as it is.

The support stand l has a support wall la perpendicular to the base 12, an upper protrusion 1b that protrudes horizontally from the top of the support wall 1a, and a central part of the support wall that protrudes in the same direction as the upper protrusion 1b. A central protrusion 1c and a lower protrusion 1d protruding from the lower part of the support wall.
It is roughly composed of.

Similarly, the support stand 21 also has a support wall 2]a and an upper protrusion 2.
1b, a central protrusion 21c, and a lower protrusion 21d.

Furthermore, an elastic member 14 is attached to the lower part of the support base 1, so that the support base 1 can be biased toward the support base 21 side.

On the upper protrusions 1b and 2Ib, four V-groove rollers 2 are held horizontally in opposition to each other.

'The V-groove roller 2 is fixed to the upper end of each of three support shafts 2b and one drive support shaft 2C that pass through the upper protrusion 1b as shown in FIG. Further, the drive shaft 2c is connected via a coupling 6 to a main shaft 7a of a drive device (stepping motor) 7 fixed below the central protrusion 1c. Furthermore, the groove-shaped roller 2 on the upper protrusion 21b is
are similarly fixed to the upper ends of each of the three support shafts 2b and one drive support shaft 2c that pass through the upper protrusion 21b, and the drive support shaft 2C is a drive device fixed under the central protrusion 21c. (
It is connected to a main shaft 7a of a stepping motor 7 via a coupling 6.

A belt pulley 3 is provided at the lower end of each support shaft 2b and the drive support shaft 2C, and a belt tensioning wheel 4 for tension adjustment is provided at the lower end of the eccentric shaft 4a arranged at the -1 upper protrusion 1b, 21b. , these are connected by a timing belt 5.

Note that an arbitrary number of support shafts and the like connected to the groove roller 2 and each of the V groove rollers 2 can be provided.

The elastic member 14 is made of a spring, rubber, or the like, and is compressed between the support table 1 and the base 12 when the thin plate is transported.

Furthermore, photo sensors 22 and 23 are provided at both lengthwise ends of the upper protrusion 21b shown in FIG.

The thin plate 31 of this embodiment, as shown in FIGS. 6 and 7,
An adhesive 34 and a chip 33 are laminated on a lead frame 32, and the lead frame 32 has reference holes 32a, 32a, . . . formed at regular intervals.

Next, the operation of the conveying device configured as described above will be explained.

When the thin plate 31 is conveyed from the front process side of this device, the presence or absence of the thin plate 31 is detected by the photo sensor 22, and only if it is present,
The stepping motor 7.7 operates and rotates, causing the belt pulley 3.
3... and the timing belt 5°5, the grooved rollers 2, 2, . . . rotate, and the thin plate 31 is conveyed. Furthermore, the movement, movement, and stopping of the thin plate is performed by the photosensor 23 detecting the reference hole 32a and operating and stopping the motor 7.7.

In the thin plate conveying device of the first embodiment, the thin plate 31 is stably held horizontally with a constant elastic pressure by the elastic member 14, so that the thin plate 31 is conveyed without vibration and without displacement in the Y-axis direction.

(Example 2) FIG. 8 is a diagram showing Example 2, and in the figure, the above-mentioned FIGS.
Components that are the same as those in the figures are given the same reference numerals.

The point that support stands 1.21 are provided in pairs on the base 12 is similar to the above embodiment, but one support stand l is
It is slidably provided on a movable table 1O that moves on a base 12, and an elastic member 14 is attached to the lower outer side of the support table 1, so that the support table 1 is biased toward the support table 21 side.

The movable table IO can be moved toward the support table 21 by means of an adjustment lever 13.

In the thin plate conveying device of the second embodiment, the thin plate 31 is stably held horizontally under a constant elastic pressure by the elastic member 14, and is conveyed without vibration and without displacement in the Y-axis direction.

In particular, since the movable table 10 is provided, the distance between the supporting tables can be easily set appropriately depending on the width of the thin plate to be conveyed. For example, the distance between the support base 1 and the support base 21 can be determined by inserting the thin plate 31 to be conveyed or a gauge of the same size between the grooved rollers 2.2 and adjusting screws 13.2 to ensure smooth conveyance. 13 to adjust the interval between them.

Note that the rotation of the rollers by the timing belt in the above embodiment is merely an example, and the rollers may be synchronously rotated by other known means such as a chain.

"Effects of the Invention" As explained above, according to the conveying device according to the present invention, the thin plate is held between the centers of the opposing V-groove rollers and is held using the pressure of the spring member. It can be held horizontally and transported accurately without vibration and without deviation in the X- and Y-axis directions.

Therefore, even when the chip is transported after the wire bonding process, there is no misalignment of the chip on the lead frame, and the chip can be transported accurately during the wire bonding process, reducing the position correction time and making it easier for ICs, LSIs, etc. and composite devices. The quality and production efficiency can be improved.

Furthermore, in the thin plate conveying device according to claim 2, by providing a movable table between at least one of the support stands and the base, the interval between the mutual support stands can be easily set appropriately according to the width of the thin plate to be conveyed. It is something that can be done.

In addition to the above-mentioned processes, the apparatus of the present invention can be used in any process of conveying thin plates, and is highly versatile.

[Brief explanation of drawings]

FIG. 1 is a plan view showing Embodiment 1 of the conveying device according to the present invention, FIG. 2 is a sectional view taken along line A-A in FIG. 1,
Figure 3 is a cross-sectional view taken along line B-B in Figure 1;
The figure is a mechanism diagram showing the timing belt transmission part, and Figure 5 is an enlarged view showing the state in which the thin plate is held between the vlWl mouth type rollers.
6 is a plan view showing one embodiment of the thin plate, FIG. 7 is a sectional view taken along the line CC in FIG. 6, and FIG. 8 is a sectional view showing Embodiment 2. 1.21--Support stand, violet a, 21 a... support wall,
lb. 21b...Upper protrusion, lc, 21c...Central protrusion, ld, 21d...Lower protrusion, 2...■Groove roller, 2a...■Groove roller slope portion, 2b ... Support shaft, 2c ... Drive support shaft, 3 ... Belt wheel, 4 ... Belt tension bundle, 4a ... Eccentric shaft, 5 ... Timing belt, 6 ... Coupling, 7...Stepping motor, 7a...Main shaft, lO...Moving table, 12...
Base, 13... Adjustment screw, 14... Elastic member, 22
．． 23... Photo sensor, 31... Thin plate, 32...
Lead frame, 32a... Reference hole, 33... Chip, 34... Adhesive.

Claims (2)

[Claims] (1) One or both of a pair of supports horizontally holding a plurality of V-groove rollers that are connected to and rotated by a drive device are slidably provided on the base, and the slideable support A thin plate conveying device characterized in that an elastic member is provided between the outside of the table and the base. (2) One or both of a pair of support stands formed by horizontally holding a plurality of rotating V-groove rollers that are connected to a drive device and rotated is provided so as to be slidable on a movable stand on the base;
A thin plate conveying device characterized in that an elastic member is provided between the outside of the slidable support base and the movable base.