JPH0448179B2 - - Google Patents

Info

Publication number
JPH0448179B2
JPH0448179B2 JP5364285A JP5364285A JPH0448179B2 JP H0448179 B2 JPH0448179 B2 JP H0448179B2 JP 5364285 A JP5364285 A JP 5364285A JP 5364285 A JP5364285 A JP 5364285A JP H0448179 B2 JPH0448179 B2 JP H0448179B2
Authority
JP
Japan
Prior art keywords
shear type
type gauge
semiconductor
shear
semiconductor diaphragm
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP5364285A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61212739A (ja
Inventor
Terutaka Hirata
Masaaki Yamaguchi
Tadashi Ooshima
Toshio Aga
Nobuo Myaji
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Electric Corp filed Critical Yokogawa Electric Corp
Priority to JP5364285A priority Critical patent/JPS61212739A/ja
Publication of JPS61212739A publication Critical patent/JPS61212739A/ja
Publication of JPH0448179B2 publication Critical patent/JPH0448179B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
    • G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
    • G01L9/0054—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements integral with a semiconducting diaphragm

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
JP5364285A 1985-03-18 1985-03-18 半導体圧力センサ Granted JPS61212739A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5364285A JPS61212739A (ja) 1985-03-18 1985-03-18 半導体圧力センサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5364285A JPS61212739A (ja) 1985-03-18 1985-03-18 半導体圧力センサ

Publications (2)

Publication Number Publication Date
JPS61212739A JPS61212739A (ja) 1986-09-20
JPH0448179B2 true JPH0448179B2 (enExample) 1992-08-06

Family

ID=12948552

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5364285A Granted JPS61212739A (ja) 1985-03-18 1985-03-18 半導体圧力センサ

Country Status (1)

Country Link
JP (1) JPS61212739A (enExample)

Also Published As

Publication number Publication date
JPS61212739A (ja) 1986-09-20

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