JPS61212739A - 半導体圧力センサ - Google Patents

半導体圧力センサ

Info

Publication number
JPS61212739A
JPS61212739A JP5364285A JP5364285A JPS61212739A JP S61212739 A JPS61212739 A JP S61212739A JP 5364285 A JP5364285 A JP 5364285A JP 5364285 A JP5364285 A JP 5364285A JP S61212739 A JPS61212739 A JP S61212739A
Authority
JP
Japan
Prior art keywords
diaphragm
gauge
semiconductor
shear
pressure sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5364285A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0448179B2 (enExample
Inventor
Terutaka Hirata
平田　輝孝
Masaaki Yamaguchi
正明 山口
Tadashi Oshima
正 大島
Toshio Aga
阿賀　敏夫
Nobuo Miyaji
宣夫 宮地
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Electric Corp filed Critical Yokogawa Electric Corp
Priority to JP5364285A priority Critical patent/JPS61212739A/ja
Publication of JPS61212739A publication Critical patent/JPS61212739A/ja
Publication of JPH0448179B2 publication Critical patent/JPH0448179B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
    • G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
    • G01L9/0054—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements integral with a semiconducting diaphragm

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
JP5364285A 1985-03-18 1985-03-18 半導体圧力センサ Granted JPS61212739A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5364285A JPS61212739A (ja) 1985-03-18 1985-03-18 半導体圧力センサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5364285A JPS61212739A (ja) 1985-03-18 1985-03-18 半導体圧力センサ

Publications (2)

Publication Number Publication Date
JPS61212739A true JPS61212739A (ja) 1986-09-20
JPH0448179B2 JPH0448179B2 (enExample) 1992-08-06

Family

ID=12948552

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5364285A Granted JPS61212739A (ja) 1985-03-18 1985-03-18 半導体圧力センサ

Country Status (1)

Country Link
JP (1) JPS61212739A (enExample)

Also Published As

Publication number Publication date
JPH0448179B2 (enExample) 1992-08-06

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