JPH0448053A - Fe-base soft-magnetic alloy and its production and magnetic core using the same - Google Patents

Abstract

PURPOSE:To obtain an iron-base soft-magnetic alloy having low iron loss, high saturation magnetic flux density, and low magnetostriction in high frequency region by subjecting a rapidly solidified body of a molten metal containing iron-base alloy, etc., to heat treatment and precipitating fine crystalline grains in the structure. CONSTITUTION:A molten metal containing molten iron-base alloy and ceramic material is formed into a rapidly solidified body by a rapid solidification process, such as chill block melt spinning, and this rapidly solidified body is heat-treated at a temp. in the vicinity of or not lower than its crystallization temp., by which fine crystalline grains are precipitated in the structure. Further, the above molten metal has a composition represented by formula, where X means one or more compounds selected from ceramic materials capable of being melted at the time of preparing a rapidly solidified body, M means one or more elements among Ti, Zr, Hf, V, Nb, Ta, Cr, Mo, and W, M' means one or more kinds among Mn, platinum group elements, Ag, Au, Zn, Al, Ga, In, Sn, and rare earth elements, A means Co and/or Ni, and Z means one or more kinds among B, C, P, and Ge. Moreover, the symbols (a), (b), (c), (d), (e), (f), and (g) stand for, by atom, 0.1-5%, 0.1-5%, 0.1-10%, 0-10%, 0-40%, 5-25%, and 2-20%, respectively, and the sum of (f) and (g) is 12-31%.

Description

[Detailed Description of the Invention] [Object of the Invention] (Industrial Application Field) The present invention provides a Fe-based soft magnetic alloy suitable for various transformers, saturable reactors, various choke coils, various magnetic heads, various sensors, etc. This invention relates to a manufacturing method and a magnetic core using the same.

(Prior Art) Permalloy, Fe-Al-8i alloy, silicon steel, ferrite, and the like have been used as soft magnetic materials for various magnetic parts for power supplies and magnetic heads.

Incidentally, in recent years, there has been an increasing demand for electronic devices to be smaller and lighter and to have higher performance, and in order to satisfy these demands, the operating frequency of power supplies, etc., is being increased to a higher frequency. Therefore, it is strongly desired that soft magnetic materials constituting magnetic components have improved characteristics such as lower loss in high frequency ranges and increased saturation magnetic flux density.

However, since the above-mentioned conventional materials cannot fully satisfy these requirements, amorphous alloys have recently attracted attention as soft Fn materials compatible with high frequencies.

Amorphous alloys exhibit excellent soft magnetic properties such as high magnetic permeability and low coercive force, and also have properties such as low iron loss and high squareness ratio in high frequency ranges, so they are used as magnetic components for switching power supplies. It has been partially put into practical use. For example, Co-based amorphous alloys have been put into practical use as saturable reactors, and Fe-based amorphous alloys have been put into practical use as choke coils.

However, even with these amorphous alloys, there are many problems that must be solved. For example, Co-based amorphous alloys have excellent properties such as low iron loss and high squareness ratio in high frequency ranges, but they have the drawbacks of being relatively expensive and lacking in versatility. In addition, although Fe-based amorphous alloys are inexpensive and have excellent versatility, they do not have zero magnetostriction, so they suffer from relatively large deterioration of magnetic properties due to resin molding, etc., and generate large noise due to magnetostrictive vibrations. There are some difficulties.

On the other hand, recently, an F, e-based soft magnetic alloy in which ultrafine crystal grains are precipitated and has soft magnetic properties almost equivalent to that of a Co-based amorphous alloy has been proposed (Japanese Patent Laid-Open No. 63-32050
(See Publication No. 4, Publication No. 64-79342, etc.). This Fe-based ultra-ultrafine crystal alloy has excellent soft magnetic properties, satisfies low magnetostriction, and is relatively inexpensive because it mainly contains Fe, and is attracting attention as a soft magnetic material that can replace Co-based amorphous alloys. ing.

(Problems to be Solved by the Invention) However, the soft magnetic properties of the Fe-based ultrafine-crystalline alloy have a drawback that they are highly dependent on the heat treatment temperature in the manufacturing process.

That is, the Fe-based ultra-ultrafine crystal alloy master alloy is once made amorphous and then heat-treated in a temperature range near the crystallization temperature to precipitate fine crystal grains and impart excellent soft magnetic properties.

However, because the temperature range of the above heat treatment is relatively narrow and the amount of energy released when crystallizing from an amorphous state is large, there is a high risk of exceeding the set temperature range during heat treatment, which may cause deterioration of soft magnetic properties. The problem was that it was easy to invite. The present invention has been made to address these issues, and is an inexpensive product that satisfies low core loss, high saturation magnetic flux density, and low magnetostriction in a high frequency range, and provides these characteristics without depending too much on heat treatment conditions. The object of the present invention is to provide a method for producing a highly versatile Fe-based soft magnetic alloy, and a magnetic core using the same.

[Structure of the invention] (Means and effects for solving the problem) That is, the Fee-based soft magnetic alloy of the present invention, general formula: % formula % (wherein, at least one compound, M is Ti,
Zr, Hf5V, Nb, Ta.

At least one element selected from Cr, Mo and W, M' is Mn, a platinum group element, Ag, Au, Zn, A
I, Ga, In5Sn, and at least one element selected from rare earth elements, A is at least one element selected from Co and Ni, and 2 is at least one element selected from B, C, P, and Ge. Represents the species elements a, b, c,
d, e, f, and g are numbers that satisfy the following formula.

However, all numbers in the formula below indicate at%.

0, 1≦a≦5 0, 1≦b≦5 0, 1≦C≦10 0≦d≦10 0≦e≦40 5≦f≦25 2≦g≦20 12≦f+g≦30° or less. ) and has a composition substantially represented by
It is characterized in that 0% or more is composed of fine crystal grains.

Further, the method for producing a Fe-based soft magnetic alloy of the present invention includes a step of rapidly cooling a molten metal containing a Fe-based alloy and a ceramic material in a molten state, and a step of rapidly cooling a molten metal containing a Fe-based alloy and a ceramic material in a molten state, and adding a crystallization temperature of the quenched material to a quenched material obtained in the quenching step. This method is characterized by a step of precipitating fine crystal grains within the structure by performing heat treatment at a temperature around or above that temperature.

Here, the reasons for limiting the composition of the Fee-based soft magnetic alloy of the present invention will be explained.

X in the above formula (I) is essential for precipitating fine crystal grains at a relatively low temperature by heat treatment, and suppresses coarsening of the crystal grains. These improve the soft magnetic properties such as core loss and magnetic permeability, reduce the dependence of the soft magnetic properties on heat treatment temperature, and improve the reproducibility of the soft magnetic properties.

As this X, the effect can be obtained at least if it is a ceramic material that can be melted at the time of producing the quenched body, that is, an inorganic compound, but due to the ease of melting, the melting point is 1800
Compounds with a temperature below ℃ are preferred. Further, in consideration of this meltability, oxides are preferable.

Such oxides include Cub, CuO1Sn
O, Bi O, WO, Ta 0Nb O, MoO,
Examples include MnO, Gem□ Ga203, CdO, and especially Cu2O, C
uO is preferred.

These effects of X can be obtained when the content is around 0.1 at%, but if it exceeds 5 at%, it becomes brittle and it becomes difficult to form a long ribbon during rapid cooling in the manufacturing process. Therefore, the content of X is 0
．． The range is 1 at% to 5 at%. A more preferable content of X is in the range of 0.3 at% to 4 at%.

Like X, Cu is an element that precipitates fine crystal grains at a relatively low temperature through heat treatment, suppresses coarsening of the Cu crystal grains, and is effective in improving soft magnetic properties. The content of Cu is
With 0.1at% non-vortex, it is difficult to obtain the above effect, and 5
If it exceeds at%, it becomes difficult to lengthen the ribbon, so the range is set to 0.1 at% to 5 at%. A more preferable content of Cu is in the range of 0.3 at% to 4 at%, and
The combined content of Cu and Cu is preferably in the range of 0.5 at% to 8 at%.

Like X and Cu, M is a compound that suppresses coarsening of crystal grains and deteriorates soft magnetic properties, such as 2
Fe B or Fe 23 B when B is used as
6 and the like is suppressed from precipitation.

Among the above-mentioned M elements, Nb, Ta, Mo, W, and V are particularly preferable when fabricating in the atmosphere.

These effects of M can be obtained when the content is around 0.1 at%, but if it exceeds 10 at%, it becomes difficult to make it amorphous, so the M content should be reduced to 0.1 at%.
The range is 1 at% to 10 at%. A more preferable content of M is in the range of 0.5 at% to 8 at%.

Furthermore, M' is an effective element for further improving the soft magnetic properties of the alloy in which fine crystal grains are precipitated.

However, if the content of 7. M' is too large, the saturation magnetic flux density will decrease, so the content should be 10 at % or less.

Among the above-mentioned M' elements, platinum group elements are particularly effective in improving corrosion resistance, and AI and Ga are effective in stabilizing the bee-Fe solid solution which is the main phase of fine crystal grains. Si
and 2 are essential elements for making the molten alloy containing ceramics in a molten state amorphous during rapid cooling, and are elements that assist the precipitation of fine crystal grains. In particular, Si dissolves in Fe, which is the main component of the fine grains, and contributes to reducing magnetic anisotropy and magnetostriction.

If the Si content is less than 5 at%, it will be difficult to make it amorphous, and if it exceeds 25 at%, the ultra-quenching effect will be reduced, and relatively coarse crystal grains will be likely to precipitate. shall be. Moreover, magnetostriction becomes zero when the Si content is in the range of 12 at% to 2 at%, which is particularly preferable. Further, if the content of Z is less than 2 at%, it becomes difficult to make it amorphous, and if it exceeds 20 at%, the magnetic properties tend to deteriorate when crystallized by heat treatment, so it is set in the range of 2 at% to 20 at%. Among the above two elements, B is particularly preferred from the viewpoint of ease of fabricating the ribbon. Note that the total amount of Si and 2 is 12 at%
The range is preferably from 30 at % to 30 at %, and the Si/H ratio is preferably 1 or more in order to obtain excellent soft magnetic properties.

It is also possible to partially replace Fe with Co or Ni, but if the amount of substitution is too large, the soft magnetic properties will deteriorate, so the amount should be 40 at % or less.

In addition, in the Fe-based soft magnetic alloy of the present invention, 0, S, N
Even if it contains trace amounts of unavoidable impurities such as those contained in ordinary Fe-based alloys, the effects of the present invention will not be impaired.

In the Fe-based soft magnetic alloy of the present invention having the above composition, 50% or more of the alloy structure is composed of fine crystal grains in terms of area ratio, and the fine crystal grains are uniformly distributed in the alloy structure. are doing.

These fine crystal grains are mainly composed of a bee-Fe solid solution, and excellent soft magnetic properties can be obtained especially when an ordered lattice exists in at least a portion of the fine crystal grains. Here, the existence of the above-mentioned regular lattice is confirmed by the appearance of a peak of the regular lattice by X-ray diffraction. The reason why the composition ratio of the alloy structure by fine crystal grains was defined as 50% or more in terms of area ratio is that when the presence of fine crystal grains becomes less than 50% in terms of area ratio,
This is because magnetostriction increases, magnetic permeability decreases, and iron loss increases, making it impossible to obtain the desired soft magnetic properties. A more preferable composition ratio of the alloy structure by fine crystal grains is in the range of 60% to 100% in terms of area ratio. The abundance ratio of fine crystal grains mentioned here is measured by enlarging the alloy structure at a high magnification (for example, 200,000 times using a transmission electron microscope).

The fine crystal grains present in the Fe-based soft magnetic alloy of the present invention are
It is ultra-fine due to the presence of a ceramic material such as an oxide represented by X in the above formula (I), and is
It has an extremely small average particle size of not more than nm. This ultra-fine grain formation occurs because ceramic materials such as oxides hardly form a solid solution with Fe, so they exist at grain boundaries or triple points formed by the precipitation of ceramic materials, thereby inhibiting the growth of crystal grains. This is thought to be caused by being suppressed.

In the Fe-based soft magnetic alloy of the present invention, as described above, by making the crystal grains present in the alloy structure ultra-fine, the dependence of the soft magnetic properties on the heat treatment temperature is suppressed, and excellent Improves reproducibility of soft magnetic properties. That is, by making the grain size of the crystal grains ultra-fine, the magnetic anisotropy becomes smaller, which relaxes the heat treatment temperature conditions.

Further, essentially, the refinement of crystal grains improves the soft magnetic properties, and if the average crystal grain size exceeds 50 nm, the initial magnetic properties cannot be obtained.

From the viewpoint of reducing the dependence of the soft magnetic properties on the heat treatment temperature, the average crystal grain size is preferably 20 nm or less. Note that the above average crystal grain size is a value obtained by measuring the maximum diameter of each crystal grain and averaging them.

Next, the method for manufacturing the Fe-based soft magnetic alloy of the present invention will be explained.

First, a molten metal containing a molten Fe-based alloy and a ceramic material is prepared. In order to produce the above-mentioned Fe-based soft magnetic alloy of the present invention, the composition of this molten metal is changed to the above (I).
satisfies the composition of Eq.

Such a molten metal is: (1) At the stage of producing a master alloy, a ceramic material is blended in the same way as other metal materials to produce a master alloy that satisfies the composition of formula (I) above, and the melting point is higher than the melting point of this master alloy. Heat to melt.

■ Prepare a master alloy with the composition of the above formula (I) except for X, mix this master alloy with a ceramic material so as to satisfy the composition of the above formula (I), and add this mixture to the above master alloy and ceramic material. Melt by heating above the melting point of the material.

It is produced by methods such as.

Next, the molten metal is rapidly cooled by a known ultra-quenching method such as a single roll method or a twin roll method.

Here, in the present invention, it is preferable to obtain a good amorphous state by the above-mentioned quenching step in order to obtain ultrafine crystal grains. In addition, the shape of the rapidly cooled body is plate-like (band-like).
Various shapes can be selected depending on the application, such as linear, powder, and flaky shapes. In addition, when the quenched body is in the form of a plate, the plate thickness is 3 μm to 1100p, when it is in the form of a line, the wire diameter is 200 pm or less, and when it is in the form of a powder, the major axis is 1 to 500 pm, and the aspect ratio (major axis/plate) thickness) from 5 to
Preferably, the range is 15,000.

Thereafter, the amorphous quenched body is subjected to heat treatment at a temperature near or higher than the crystallization temperature of the quenched body to precipitate ultrafine crystal grains mainly composed of bcc-Fe solid solution.

This heat treatment step is preferably carried out after forming into the desired shape in the case of a wound core that requires processing accompanied by deformation to obtain the desired shape.

The above heat treatment is performed at -50°C with respect to the crystallization temperature of the rapidly cooled body.
It is possible to carry out within the range of ~+200°C. If the heat treatment temperature condition is lower than -50℃ relative to the crystallization temperature, fine crystal grains are difficult to precipitate, and if the temperature exceeds +200℃ relative to the crystallization temperature, phases other than the bee-Fe solid solution will precipitate. This is because it is easier to do.

The reason why a Fe-based soft magnetic alloy that satisfies the desired soft magnetic properties can be obtained under the wide range of heat treatment temperature conditions as described above is because it is possible to make the precipitated crystal grains ultra-fine as described above. This is one of the important features of the present invention. This makes it possible to obtain a Fe-based soft magnetic alloy with excellent soft magnetic properties with good reproducibility. Note that the actual set temperature is set at 12 times higher than the crystallization temperature of the rapidly cooled body, taking into account uncertain factors such as temperature rise during heat treatment (heat generation due to crystallization).
It is preferable to set it as the range of 0 degreeC - +150 degreeC.

Note that the crystallization temperature in the present invention is defined as a temperature increase rate of 10 d.
Values measured in e g/min are shown.

Further, the heat treatment time is appropriately set depending on the alloy composition used and the heat treatment temperature, but it is usually preferably in the range of 2 minutes to 24 hours. This is because if the heat treatment time is less than 2 minutes, it is difficult to sufficiently precipitate crystal grains, and if it exceeds 24 hours, phases other than the bee-Fe solid solution tend to precipitate.

A more preferable heat treatment time is in the range of 5 minutes to 10 hours. Further, as the atmosphere during the heat treatment, various atmospheres can be used, such as an inert atmosphere such as nitrogen or argon, a reducing atmosphere such as vacuum or hydrogen, or air.

Note that the cooling after the above heat treatment may be rapid cooling or slow cooling, and is not particularly limited.

In addition, during the cooling process after the heat treatment mentioned above, or after cooling, a magnetic field is applied to the Fe-based soft magnetic alloy (including magnetic field heat treatment in which fine crystal grains are not precipitated) to change the characteristics and create a magnetic material suitable for the application. It is also possible to add properties. The magnetic field at this time may be either a direct current magnetic field or an alternating current magnetic field, and the direction of application of the magnetic field may be any of the ribbon axis direction, radial direction, plate thickness direction, and may also be a rotating magnetic field.

The Fe-based soft magnetic alloy of the present invention has excellent soft magnetic properties in the high frequency range, so it can be used, for example, in magnetic heads, thin film heads, high frequency transformers including those for high power, saturable reactors, common mode choke coils, smooth choke coils, normal As an alloy for magnetic components, such as mode choke coils, noise filters for high voltage pulses, magnetic cores used at high frequencies such as magnetic switches used in laser power supplies, and magnetic materials for various sensors such as current sensors, orientation sensors, and security sensors. It has excellent properties.

Examples of the magnetic core using the Fe-based soft magnetic alloy of the present invention include wound bodies and laminates of Fe-based soft magnetic alloy ribbons having ultrafine crystal grains. These magnetic cores perform interlayer insulation by providing an insulating layer on at least one side of the ribbon, if necessary.

This insulating layer is made of, for example, MgO powder or Sio2 powder (
-It can be formed by applying a metal alkoxide solution and firing (heat treatment for precipitation of crystal grains is possible)
formed by A similar effect can also be obtained by impregnating it with an epoxy resin. This resin impregnation is effective when producing cut cores, etc. Furthermore, resin impregnation contributes not only to insulation treatment but also to preventing rust and improving environmental resistance. In addition, the improvement of environmental resistance is
This can also be achieved by storing the magnetic core in a case or winding it around a bobbin.

Furthermore, interlayer insulation may be performed by winding a thin Fe-based soft magnetic alloy together with an insulating film. This method is effective when used in a magnetic compression circuit for a laser power source. Examples of the insulating film used here include polyimide-based, polyester-based, glass fiber-based, etc.
The thin ribbon used in the present invention usually has excellent soft magnetic properties even in a brittle state, so it is preferable to use a polyimide film.

In addition, when forming the magnetic core, especially by winding,
It is preferable to perform terminal treatment at the beginning and end of winding. This prevents inconveniences in heat treatment operations and the like. As the terminal treatment, local interlayer adhesion by laser irradiation, spot welding, etc., adhesion by heat-resistant film such as polyimide, etc. are used.

(Example) Examples of the present invention will be described below.

Example 1 Formula: Fe (CuO) (Cu 20 ) 0.5
A master alloy having a composition represented by Cu 1NbSiB was heated to 1400°C and melted to produce a molten metal containing a molten Fe-based alloy and a ceramic material. Next, this molten metal was rapidly cooled to become amorphous by a single roll method to obtain a long amorphous ribbon having an IH of 10 mm and a thickness of 18 pm. In addition, the crystallization temperature of this amorphous ribbon (heating rate 10 d e g / min
) was 495°C.

Next, the amorphous ribbon was wound to an outer diameter of 18 nm.
A plurality of toroidal cores each having an inner diameter of 12 mm and a height of 5 mm were molded. These plurality of toroidal cores were subjected to heat treatment for 1 hour under various temperature conditions in a nitrogen atmosphere to deposit ultrafine crystal grains to produce magnetic cores.

Characteristic evaluation in Example 1 will be described below.

First, the iron loss of each magnetic core at 100kHz and 2kG and 1.
The initial permeability at kHz was measured using a U-function meter and an LCR meter. The results are shown in FIG.

In addition, for comparison with the present invention, Fe73Cu1N b
Using an amorphous ribbon having a S 114 B 9 composition, heat treatment was performed in the same manner as in the above example to precipitate fine crystal grains, thereby producing a magnetic core. Regarding the magnetic core according to this comparative example, the iron loss at 100 kI (z, 2 kG) and the initial magnetic permeability at 1 kHz were similarly measured. The results are similarly shown in FIG.

As is clear from FIG. 1, the magnetic core according to the above example has low iron loss and high magnetic permeability over a wide temperature range, whereas the magnetic core according to the comparative example has low iron loss and high magnetic permeability. It can be seen that the optimum heat treatment range for obtaining

Note that the saturation magnetic flux density was 1.3.2 kG.

Next, in the above example, X-ray diffraction was performed on the ribbon before heat treatment (after quenching) of the magnetic core heat-treated at 580° C. and on the ribbon after heat treatment was performed to obtain a magnetic core. Figure 2 shows their X-ray diffraction patterns (before heat treatment:
Figure 2(a) shows the results after heat treatment; Figure 2(b) shows the results. Also, 6
A sample heat-treated at 50'C was similarly subjected to X-ray diffraction, and the pattern is shown in FIG.

As is clear from Figure 2, it was in an amorphous state before heat treatment, and after heat treatment at 580°C, it was in an amorphous state.
Diffraction lines of only the e-Fe solid solution are also observed. Diffraction lines based on regular gratings are also observed on the low angle side. On the other hand, 6
In the heat treatment at 50°C, as shown in Figure 3, bcc
In addition to the phase, diffraction lines of FeB, Fe23B6, and CuO are observed, which is consistent with the deterioration of the magnetic properties described above.

In addition, from the half width of the X-ray diffraction peak, the above 580°C
The crystal grain size of the magnetic core heat-treated was determined to be 9.0 nm. This value almost coincided with the value measured using a transmission electron microscope. Note that the crystal grain size in the comparative example was 16 nm. Further, the area ratio occupied by fine crystal grains in the alloy structure was determined from an enlarged image (200,000 times) with a transmission electron microscope, and was found to be 90%.

Example 2 Magnetic cores made of amorphous ribbons having the respective compositions shown in Table 1 were prepared in the same manner as in Example 1, and each of these ribbons was heated at a temperature of +50°C relative to the crystallization temperature of each amorphous ribbon. Heat treatment was performed for 1.5 hours.

The characteristics of each Fe-based soft magnetic alloy ribbon thus obtained were determined in the same manner as in Example 1. The measurement results are shown in Table 1 together with the measurement results of Sendust ribbon that was similarly rapidly cooled.

(Margin below) No. table Measured from the half width of the chito X-ray diffraction peak.

"2: Measured under the conditions of 100kHz and 2kG.

'h3 Determine the pressure using a strain gauge.

(Continued from Table 1) (L・A14?', White) As is clear from the measurement results in Table 1, the Fe-based soft magnetic alloy ribbon according to Example 2 has extremely fine crystal grains and is low in iron. It can be seen that low loss and low magnetostriction are obtained.

Example 3 A magnetic core consisting of amorphous thin % of each composition shown in Table 2 was prepared in the same manner as in Example 1, and each of these thin strips was heated at a temperature of +80°C relative to the crystallization temperature of each amorphous ribbon. Heat treatment was performed for 1 hour.

The characteristics of each of the Fe-based soft magnetic alloys thus obtained were determined in the same manner as in Example 1. The measurement results are shown in Table 2 together with the measurement results of Sendust ribbon that was similarly rapidly cooled.

(Left below) (Shishiv6≧5) As is clear from the measurement results in Table 2, the Fe-based soft magnetic alloy ribbon according to Example 3 has extremely fine crystals, low iron loss, and low magnetostriction. I can see that you are getting it.

Example 4 Amorphous ribbons having the respective compositions shown in Table 3 were prepared in the same manner as in Example 1, and each of these ribbons was heated at a temperature of +60°C with respect to the crystallization temperature of each amorphous ribbon. Heat treatment was performed for an hour.

The characteristics of each Fe-based soft magnetic alloy ribbon thus obtained were determined in the same manner as in Example 1. The measurement results are shown in Table 3 together with the measurement results of Sendust ribbon which was similarly rapidly cooled.

(Leaving space below) As is clear from the measurement results in Table 3, the Fe-based soft magnetic alloy ribbon according to Example 4 has extremely fine crystal grains, and low iron loss and low magnetostriction are obtained. I understand.

[Effects of the Invention] As explained above, according to the present invention, it is possible to provide an Fe-based soft magnetic alloy that satisfies low iron loss, high saturation magnetic flux density, and low magnetostriction in a high frequency range, and is inexpensive and has excellent versatility. becomes possible. Since the Fe-based soft magnetic alloy of the present invention can obtain its soft magnetic properties under a wide range of heat treatment conditions, it can be stably supplied to magnetic components for various switching power supplies, saturable cores for pulse compression circuits, magnetic heads, etc. various sensors,
Effective for magnetic shielding, etc.

[Brief explanation of the drawing]

FIG. 1 is a graph showing the relationship between heat treatment temperature and magnetic properties of magnetic cores according to an example of the present invention and a comparative example, and FIG.
) shows the X-ray diffraction pattern of the alloy ribbon used in the present invention before heat treatment, and Figure 2(b) shows the X-ray diffraction pattern when the alloy ribbon used in the present invention was subjected to optimal heat treatment. diagram showing,
FIG. 3 is a diagram showing an X-ray diffraction pattern when the alloy ribbon used in the present invention was heat-treated at 650°C.

Claims (1)

[Claims] (1) General formula: Fe_1_0_0_-_a_-_b_-_c_-_d_
-_e_-_f_-_gX_aCu_bM_cM'_d
A_eSi_fZg (wherein,
, at least one element selected from Mo and W,
M' is Mn, platinum group element, Ag, Au, Zn, Al, G
At least one selected from a, In, Sn, and rare earth elements
A represents at least one element selected from Co and Ni; Z represents at least one element selected from B, C, P, and Ge; a, b, c, d, e,
f and g are numbers that satisfy the following formula. however,
All numbers in the formula below indicate at%. 0.1≦a≦5 0.1≦b≦5 0.1≦c≦10 0≦d≦10 0≦e≦40 5≦f≦25 2≦g≦20 12≦f+g≦30. ) and has a composition substantially represented by
An Fe-based soft magnetic alloy characterized in that 0% or more of the alloy is composed of fine crystal grains. (2) The Fe-based soft magnetic alloy according to claim 1, wherein the average diameter of the fine crystal grains is 50 nm or less. (3) In the Fe-based soft magnetic alloy according to claim 1, the fine crystal grains mainly consist of a bcc-Fe solid solution,
An Fe-based soft magnetic alloy, characterized in that at least a portion thereof is an ordered phase. (4) In the Fe-based soft magnetic alloy according to claim 1, the X is CuO, Cu_2O, SnO_2, Bi_2O_
3, WO_3, Ta_2O_5, Nb_2O_5, Mo
O_3, MnO, GeO_2, Ga_2O_3 and C
An Fe-based soft magnetic alloy comprising at least one oxide selected from dO. (5) A step of rapidly cooling a molten metal containing a molten Fe-based alloy and a ceramic material, and heat-treating the quenched body obtained in the quenching step at a temperature near or higher than the crystallization temperature of the quenched body. A method for producing an Fe-based soft magnetic alloy, comprising the steps of: precipitating fine crystal grains within the structure. (6) In the method for producing a Fe-based soft magnetic alloy according to claim 5, the composition of the molten metal has the general formula: Fe_1_0_0_-_a_-_b_-_c_-_d_
−_e_-_f_-_gX_aCu_bM_cM_dA
_eSi_fZ_g (wherein,
, at least one element selected from Mo and W,
M' is Mn, platinum group element, Ag, Au, Zn, Al, G
At least one selected from a, In, Sn, and rare earth elements
A represents at least one element selected from Co and Ni; Z represents at least one element selected from B, C, P, and Ge; a, b, c, d, e,
f and g are numbers that satisfy the following formula. however,
All numbers in the formula below indicate at%. 0.1≦a≦5 0.1≦b≦5 0.1≦c≦10 0≦d≦10 0≦e≦40 5≦f≦25 2≦g≦20 12≦f+g≦30. ) A method for producing a Fe-based soft magnetic alloy, characterized in that it is substantially represented by: (7) In the method for producing a Fe-based soft magnetic alloy according to claim 5, the heat treatment is performed at a temperature of 10 deg/mi to increase the temperature of the rapidly solidified body.
-50°C to +200°C relative to the crystallization temperature measured at n
1. A method for producing a Fe-based soft magnetic alloy, the method being carried out at a temperature in the range of . (8) The method for producing a Fe-based soft magnetic alloy according to claim 5, characterized in that the heat treatment causes fine crystal grains with an average grain size of 50 nm or less to precipitate so as to account for 50% or more of the structure in terms of area ratio. A method for producing a Fe-based soft magnetic alloy. (9) A magnetic core characterized by being formed by winding or laminating the Fe-based soft magnetic alloy according to claim 1.