JPH044531B2 - - Google Patents
Info
- Publication number
- JPH044531B2 JPH044531B2 JP32387088A JP32387088A JPH044531B2 JP H044531 B2 JPH044531 B2 JP H044531B2 JP 32387088 A JP32387088 A JP 32387088A JP 32387088 A JP32387088 A JP 32387088A JP H044531 B2 JPH044531 B2 JP H044531B2
- Authority
- JP
- Japan
- Prior art keywords
- axis
- magnetic
- disk
- targets
- target
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000005291 magnetic effect Effects 0.000 claims description 75
- 238000004544 sputter deposition Methods 0.000 claims description 23
- 239000000758 substrate Substances 0.000 claims description 22
- 238000004519 manufacturing process Methods 0.000 claims description 14
- 238000000034 method Methods 0.000 claims description 14
- 239000003302 ferromagnetic material Substances 0.000 claims description 12
- 238000000151 deposition Methods 0.000 claims description 11
- 230000008021 deposition Effects 0.000 claims description 10
- 230000005684 electric field Effects 0.000 claims description 7
- 239000010409 thin film Substances 0.000 description 21
- 239000000696 magnetic material Substances 0.000 description 11
- 230000000694 effects Effects 0.000 description 6
- 239000007789 gas Substances 0.000 description 6
- 150000002500 ions Chemical class 0.000 description 5
- 239000003973 paint Substances 0.000 description 5
- 239000011230 binding agent Substances 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 230000002093 peripheral effect Effects 0.000 description 4
- 229910045601 alloy Inorganic materials 0.000 description 3
- 239000000956 alloy Substances 0.000 description 3
- 239000006247 magnetic powder Substances 0.000 description 3
- 239000011347 resin Substances 0.000 description 3
- 229920005989 resin Polymers 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000001755 magnetron sputter deposition Methods 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- 229910052779 Neodymium Inorganic materials 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- KPLQYGBQNPPQGA-UHFFFAOYSA-N cobalt samarium Chemical compound [Co].[Sm] KPLQYGBQNPPQGA-UHFFFAOYSA-N 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 229910001004 magnetic alloy Inorganic materials 0.000 description 1
- 230000005415 magnetization Effects 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- QEFYFXOXNSNQGX-UHFFFAOYSA-N neodymium atom Chemical compound [Nd] QEFYFXOXNSNQGX-UHFFFAOYSA-N 0.000 description 1
- 229910052761 rare earth metal Inorganic materials 0.000 description 1
- 229910000938 samarium–cobalt magnet Inorganic materials 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
Landscapes
- Transmission And Conversion Of Sensor Element Output (AREA)
- Manufacturing Of Magnetic Record Carriers (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP32387088A JPH02168429A (ja) | 1988-12-22 | 1988-12-22 | ロータリーエンコーダ用磁気ディスクの製造方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP32387088A JPH02168429A (ja) | 1988-12-22 | 1988-12-22 | ロータリーエンコーダ用磁気ディスクの製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH02168429A JPH02168429A (ja) | 1990-06-28 |
JPH044531B2 true JPH044531B2 (enrdf_load_stackoverflow) | 1992-01-28 |
Family
ID=18159513
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP32387088A Granted JPH02168429A (ja) | 1988-12-22 | 1988-12-22 | ロータリーエンコーダ用磁気ディスクの製造方法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH02168429A (enrdf_load_stackoverflow) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104236499A (zh) * | 2014-10-15 | 2014-12-24 | 厦门大学 | 一种基于点云数据的铁路自动测量方法 |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2004293622A (ja) * | 2003-03-26 | 2004-10-21 | Nsk Ltd | エンコーダ付転がり軸受ユニット及びその製造方法 |
DE102004010948B4 (de) * | 2004-03-03 | 2008-01-10 | Carl Freudenberg Kg | Winkelmesseinrichtung |
-
1988
- 1988-12-22 JP JP32387088A patent/JPH02168429A/ja active Granted
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104236499A (zh) * | 2014-10-15 | 2014-12-24 | 厦门大学 | 一种基于点云数据的铁路自动测量方法 |
Also Published As
Publication number | Publication date |
---|---|
JPH02168429A (ja) | 1990-06-28 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN101855381A (zh) | 溅射设备和膜沉积方法 | |
JPH044531B2 (enrdf_load_stackoverflow) | ||
JPH044530B2 (enrdf_load_stackoverflow) | ||
JPH04221061A (ja) | 薄膜形成装置 | |
JP3544907B2 (ja) | マグネトロンスパッタ装置 | |
JPS6217175A (ja) | スパツタリング装置 | |
JPS61235560A (ja) | マグネトロンスパツタ装置 | |
JPH0360916B2 (enrdf_load_stackoverflow) | ||
JPH0718006B2 (ja) | スパッタ装置 | |
JPS63109163A (ja) | スパツタリング装置 | |
JPH06158311A (ja) | スパッタリング装置 | |
JP2003138373A (ja) | スパッタリング装置及びスパッタリング方法 | |
JP2003183827A (ja) | 薄膜作製装置 | |
JP2001207258A (ja) | 回転磁石およびインライン型スパッタリング装置 | |
JPH0641736A (ja) | スパッタリング電極 | |
JPS627264B2 (enrdf_load_stackoverflow) | ||
JPS6277477A (ja) | 薄膜形成装置 | |
JP2000038663A (ja) | マグネトロンスパッタ装置 | |
JPH03100171A (ja) | スパッタ装置 | |
JPH04354868A (ja) | マグネトロン型スパッタ装置用ターゲット | |
JPH0442731B2 (enrdf_load_stackoverflow) | ||
JPS63227772A (ja) | マグネトロンスパツタ用タ−ゲツト | |
JPS63103067A (ja) | マグネトロンスパツタ装置 | |
JPH03232966A (ja) | スパッタリング装置 | |
JPH042773A (ja) | 高速成膜スパッタリング装置 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
FPAY | Renewal fee payment |
Free format text: PAYMENT UNTIL: 20080128 Year of fee payment: 16 |
|
FPAY | Renewal fee payment |
Free format text: PAYMENT UNTIL: 20090128 Year of fee payment: 17 |
|
EXPY | Cancellation because of completion of term |