JPH02168429A - ロータリーエンコーダ用磁気ディスクの製造方法 - Google Patents
ロータリーエンコーダ用磁気ディスクの製造方法Info
- Publication number
- JPH02168429A JPH02168429A JP32387088A JP32387088A JPH02168429A JP H02168429 A JPH02168429 A JP H02168429A JP 32387088 A JP32387088 A JP 32387088A JP 32387088 A JP32387088 A JP 32387088A JP H02168429 A JPH02168429 A JP H02168429A
- Authority
- JP
- Japan
- Prior art keywords
- axis
- magnetic
- targets
- disk
- thin film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000005291 magnetic effect Effects 0.000 title claims abstract description 79
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 15
- 239000000758 substrate Substances 0.000 claims abstract description 27
- 238000004544 sputter deposition Methods 0.000 claims abstract description 23
- 230000005684 electric field Effects 0.000 claims abstract description 9
- 238000000034 method Methods 0.000 claims description 17
- 239000003302 ferromagnetic material Substances 0.000 claims description 12
- 238000000151 deposition Methods 0.000 claims description 9
- 230000008021 deposition Effects 0.000 claims description 7
- 239000010409 thin film Substances 0.000 abstract description 21
- 150000002500 ions Chemical class 0.000 abstract description 5
- 230000005294 ferromagnetic effect Effects 0.000 abstract 1
- 239000000126 substance Substances 0.000 abstract 1
- 239000000696 magnetic material Substances 0.000 description 10
- 230000000694 effects Effects 0.000 description 7
- 239000007789 gas Substances 0.000 description 6
- 239000003973 paint Substances 0.000 description 6
- 238000010586 diagram Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 230000002093 peripheral effect Effects 0.000 description 4
- 239000011347 resin Substances 0.000 description 4
- 229920005989 resin Polymers 0.000 description 4
- 238000007740 vapor deposition Methods 0.000 description 4
- 229910045601 alloy Inorganic materials 0.000 description 3
- 239000000956 alloy Substances 0.000 description 3
- 239000011230 binding agent Substances 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 239000006247 magnetic powder Substances 0.000 description 2
- 238000001755 magnetron sputter deposition Methods 0.000 description 2
- 229910052779 Neodymium Inorganic materials 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- KPLQYGBQNPPQGA-UHFFFAOYSA-N cobalt samarium Chemical compound [Co].[Sm] KPLQYGBQNPPQGA-UHFFFAOYSA-N 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 229910001004 magnetic alloy Inorganic materials 0.000 description 1
- 230000005415 magnetization Effects 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- QEFYFXOXNSNQGX-UHFFFAOYSA-N neodymium atom Chemical compound [Nd] QEFYFXOXNSNQGX-UHFFFAOYSA-N 0.000 description 1
- 229910052761 rare earth metal Inorganic materials 0.000 description 1
- 229910000938 samarium–cobalt magnet Inorganic materials 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 230000008685 targeting Effects 0.000 description 1
Landscapes
- Transmission And Conversion Of Sensor Element Output (AREA)
- Manufacturing Of Magnetic Record Carriers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP32387088A JPH02168429A (ja) | 1988-12-22 | 1988-12-22 | ロータリーエンコーダ用磁気ディスクの製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP32387088A JPH02168429A (ja) | 1988-12-22 | 1988-12-22 | ロータリーエンコーダ用磁気ディスクの製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02168429A true JPH02168429A (ja) | 1990-06-28 |
| JPH044531B2 JPH044531B2 (enrdf_load_stackoverflow) | 1992-01-28 |
Family
ID=18159513
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP32387088A Granted JPH02168429A (ja) | 1988-12-22 | 1988-12-22 | ロータリーエンコーダ用磁気ディスクの製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02168429A (enrdf_load_stackoverflow) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2004085972A1 (ja) * | 2003-03-26 | 2004-10-07 | Nsk Ltd. | エンコーダ付転がり軸受ユニット及びその製造方法 |
| JP2005249791A (ja) * | 2004-03-03 | 2005-09-15 | Carl Freudenberg Kg | 角度測定装置 |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104236499B (zh) * | 2014-10-15 | 2017-03-08 | 厦门大学 | 一种基于点云数据的铁路自动测量方法 |
-
1988
- 1988-12-22 JP JP32387088A patent/JPH02168429A/ja active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2004085972A1 (ja) * | 2003-03-26 | 2004-10-07 | Nsk Ltd. | エンコーダ付転がり軸受ユニット及びその製造方法 |
| JP2005249791A (ja) * | 2004-03-03 | 2005-09-15 | Carl Freudenberg Kg | 角度測定装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH044531B2 (enrdf_load_stackoverflow) | 1992-01-28 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20080128 Year of fee payment: 16 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20090128 Year of fee payment: 17 |
|
| EXPY | Cancellation because of completion of term |