JPH0445239Y2 - - Google Patents

Info

Publication number
JPH0445239Y2
JPH0445239Y2 JP1984105488U JP10548884U JPH0445239Y2 JP H0445239 Y2 JPH0445239 Y2 JP H0445239Y2 JP 1984105488 U JP1984105488 U JP 1984105488U JP 10548884 U JP10548884 U JP 10548884U JP H0445239 Y2 JPH0445239 Y2 JP H0445239Y2
Authority
JP
Japan
Prior art keywords
quartz tube
electrode
batch type
assher
type plasma
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1984105488U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6122338U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10548884U priority Critical patent/JPS6122338U/ja
Publication of JPS6122338U publication Critical patent/JPS6122338U/ja
Application granted granted Critical
Publication of JPH0445239Y2 publication Critical patent/JPH0445239Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
JP10548884U 1984-07-12 1984-07-12 バッチ式アッシャー Granted JPS6122338U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10548884U JPS6122338U (ja) 1984-07-12 1984-07-12 バッチ式アッシャー

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10548884U JPS6122338U (ja) 1984-07-12 1984-07-12 バッチ式アッシャー

Publications (2)

Publication Number Publication Date
JPS6122338U JPS6122338U (ja) 1986-02-08
JPH0445239Y2 true JPH0445239Y2 (en:Method) 1992-10-23

Family

ID=30664808

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10548884U Granted JPS6122338U (ja) 1984-07-12 1984-07-12 バッチ式アッシャー

Country Status (1)

Country Link
JP (1) JPS6122338U (en:Method)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3879597A (en) * 1974-08-16 1975-04-22 Int Plasma Corp Plasma etching device and process
JPS52153665A (en) * 1976-06-16 1977-12-20 Hitachi Ltd Etching method of film
JPS5915072U (ja) * 1982-07-20 1984-01-30 日産自動車株式会社 液晶表示器
JPS5918674U (ja) * 1982-07-28 1984-02-04 石川島播磨重工業株式会社 建設機械等のシユ−ピン抜け止め機構

Also Published As

Publication number Publication date
JPS6122338U (ja) 1986-02-08

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