JPH0444693B2 - - Google Patents
Info
- Publication number
- JPH0444693B2 JPH0444693B2 JP58072763A JP7276383A JPH0444693B2 JP H0444693 B2 JPH0444693 B2 JP H0444693B2 JP 58072763 A JP58072763 A JP 58072763A JP 7276383 A JP7276383 A JP 7276383A JP H0444693 B2 JPH0444693 B2 JP H0444693B2
- Authority
- JP
- Japan
- Prior art keywords
- flow path
- valve
- gas
- gas flow
- sample
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000007789 gas Substances 0.000 claims description 105
- 239000012159 carrier gas Substances 0.000 claims description 36
- 239000000758 substrate Substances 0.000 claims description 11
- 238000002347 injection Methods 0.000 claims description 5
- 239000007924 injection Substances 0.000 claims description 5
- 230000006835 compression Effects 0.000 claims description 4
- 238000007906 compression Methods 0.000 claims description 4
- 235000012431 wafers Nutrition 0.000 description 43
- 230000008878 coupling Effects 0.000 description 8
- 238000010168 coupling process Methods 0.000 description 8
- 238000005859 coupling reaction Methods 0.000 description 8
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 6
- 239000011521 glass Substances 0.000 description 6
- 229910052710 silicon Inorganic materials 0.000 description 6
- 239000010703 silicon Substances 0.000 description 6
- 230000036541 health Effects 0.000 description 4
- 239000001307 helium Substances 0.000 description 4
- 229910052734 helium Inorganic materials 0.000 description 4
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 4
- 230000009471 action Effects 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 3
- 230000006872 improvement Effects 0.000 description 3
- 239000004677 Nylon Substances 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 2
- 238000004891 communication Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000004817 gas chromatography Methods 0.000 description 2
- 238000001802 infusion Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 229920001778 nylon Polymers 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- RZVAJINKPMORJF-UHFFFAOYSA-N Acetaminophen Chemical compound CC(=O)NC1=CC=C(O)C=C1 RZVAJINKPMORJF-UHFFFAOYSA-N 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 229920006335 epoxy glue Polymers 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000005350 fused silica glass Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 239000005297 pyrex Substances 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 239000003566 sealing material Substances 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
Landscapes
- Sampling And Sample Adjustment (AREA)
- Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7276383A JPS58195149A (ja) | 1982-04-26 | 1983-04-25 | 小型ガスクロマトグラフ装置 |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US371617 | 1982-04-26 | ||
| US371540 | 1982-04-26 | ||
| JP7276383A JPS58195149A (ja) | 1982-04-26 | 1983-04-25 | 小型ガスクロマトグラフ装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58195149A JPS58195149A (ja) | 1983-11-14 |
| JPH0444693B2 true JPH0444693B2 (US20110009641A1-20110113-C00256.png) | 1992-07-22 |
Family
ID=13498725
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7276383A Granted JPS58195149A (ja) | 1982-04-26 | 1983-04-25 | 小型ガスクロマトグラフ装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58195149A (US20110009641A1-20110113-C00256.png) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6176355U (US20110009641A1-20110113-C00256.png) * | 1984-10-25 | 1986-05-22 | ||
| JPS61151459A (ja) * | 1984-12-26 | 1986-07-10 | Sord Comput Corp | ガスクロマトグラフ分析装置 |
| JPS61125767U (US20110009641A1-20110113-C00256.png) * | 1985-01-25 | 1986-08-07 | ||
| JPS6287858A (ja) * | 1985-10-14 | 1987-04-22 | Fujikura Ltd | キヤピラリ−カラム基板 |
| US5567868A (en) * | 1995-01-23 | 1996-10-22 | Hewlett-Packard Company | Planar manifold assembly |
| JP4701041B2 (ja) * | 2005-08-18 | 2011-06-15 | 日本分析工業株式会社 | ガスクロマトグラフ用熱分解試料導入装置 |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3538744A (en) * | 1967-11-09 | 1970-11-10 | Phillips Petroleum Co | Chromatography apparatus |
| JPS4936393A (US20110009641A1-20110113-C00256.png) * | 1972-05-25 | 1974-04-04 | ||
| JPS4984494A (US20110009641A1-20110113-C00256.png) * | 1972-11-24 | 1974-08-14 | ||
| JPS5413117U (US20110009641A1-20110113-C00256.png) * | 1977-06-28 | 1979-01-27 |
-
1983
- 1983-04-25 JP JP7276383A patent/JPS58195149A/ja active Granted
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3538744A (en) * | 1967-11-09 | 1970-11-10 | Phillips Petroleum Co | Chromatography apparatus |
| JPS4936393A (US20110009641A1-20110113-C00256.png) * | 1972-05-25 | 1974-04-04 | ||
| JPS4984494A (US20110009641A1-20110113-C00256.png) * | 1972-11-24 | 1974-08-14 | ||
| JPS5413117U (US20110009641A1-20110113-C00256.png) * | 1977-06-28 | 1979-01-27 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS58195149A (ja) | 1983-11-14 |
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