JPH0444221B2 - - Google Patents

Info

Publication number
JPH0444221B2
JPH0444221B2 JP22085487A JP22085487A JPH0444221B2 JP H0444221 B2 JPH0444221 B2 JP H0444221B2 JP 22085487 A JP22085487 A JP 22085487A JP 22085487 A JP22085487 A JP 22085487A JP H0444221 B2 JPH0444221 B2 JP H0444221B2
Authority
JP
Japan
Prior art keywords
chamber
center
diaphragm
measurement
seal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP22085487A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6463833A (en
Inventor
Saichiro Morita
Ryuzo Asada
Kenichi Yoshioka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Electric Corp filed Critical Yokogawa Electric Corp
Priority to JP22085487A priority Critical patent/JPS6463833A/ja
Publication of JPS6463833A publication Critical patent/JPS6463833A/ja
Publication of JPH0444221B2 publication Critical patent/JPH0444221B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)
JP22085487A 1987-09-03 1987-09-03 Electrostatic capacitance type differential pressure measuring apparatus Granted JPS6463833A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP22085487A JPS6463833A (en) 1987-09-03 1987-09-03 Electrostatic capacitance type differential pressure measuring apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP22085487A JPS6463833A (en) 1987-09-03 1987-09-03 Electrostatic capacitance type differential pressure measuring apparatus

Publications (2)

Publication Number Publication Date
JPS6463833A JPS6463833A (en) 1989-03-09
JPH0444221B2 true JPH0444221B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1992-07-21

Family

ID=16757580

Family Applications (1)

Application Number Title Priority Date Filing Date
JP22085487A Granted JPS6463833A (en) 1987-09-03 1987-09-03 Electrostatic capacitance type differential pressure measuring apparatus

Country Status (1)

Country Link
JP (1) JPS6463833A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Also Published As

Publication number Publication date
JPS6463833A (en) 1989-03-09

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