JPH0442737B2 - - Google Patents

Info

Publication number
JPH0442737B2
JPH0442737B2 JP58018929A JP1892983A JPH0442737B2 JP H0442737 B2 JPH0442737 B2 JP H0442737B2 JP 58018929 A JP58018929 A JP 58018929A JP 1892983 A JP1892983 A JP 1892983A JP H0442737 B2 JPH0442737 B2 JP H0442737B2
Authority
JP
Japan
Prior art keywords
film
refractive index
recording medium
optical recording
antireflection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58018929A
Other languages
Japanese (ja)
Other versions
JPS59146461A (en
Inventor
Mitsuharu Sawamura
Susumu Ito
Masaaki Matsushima
Hiroyoshi Kishi
Eizo Sasamori
Satoshi Yoshihara
Katsuhiko Takano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP58018929A priority Critical patent/JPS59146461A/en
Publication of JPS59146461A publication Critical patent/JPS59146461A/en
Publication of JPH0442737B2 publication Critical patent/JPH0442737B2/ja
Granted legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/241Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
    • G11B7/252Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers
    • G11B7/257Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of layers having properties involved in recording or reproduction, e.g. optical interference layers or sensitising layers or dielectric layers, which are protecting the recording layers
    • G11B7/2578Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of layers having properties involved in recording or reproduction, e.g. optical interference layers or sensitising layers or dielectric layers, which are protecting the recording layers consisting essentially of inorganic materials
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/241Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
    • G11B7/252Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers
    • G11B7/257Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of layers having properties involved in recording or reproduction, e.g. optical interference layers or sensitising layers or dielectric layers, which are protecting the recording layers
    • G11B2007/25705Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of layers having properties involved in recording or reproduction, e.g. optical interference layers or sensitising layers or dielectric layers, which are protecting the recording layers consisting essentially of inorganic materials
    • G11B2007/25706Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of layers having properties involved in recording or reproduction, e.g. optical interference layers or sensitising layers or dielectric layers, which are protecting the recording layers consisting essentially of inorganic materials containing transition metal elements (Zn, Fe, Co, Ni, Pt)
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/241Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
    • G11B7/252Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers
    • G11B7/257Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of layers having properties involved in recording or reproduction, e.g. optical interference layers or sensitising layers or dielectric layers, which are protecting the recording layers
    • G11B2007/25705Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of layers having properties involved in recording or reproduction, e.g. optical interference layers or sensitising layers or dielectric layers, which are protecting the recording layers consisting essentially of inorganic materials
    • G11B2007/25708Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of layers having properties involved in recording or reproduction, e.g. optical interference layers or sensitising layers or dielectric layers, which are protecting the recording layers consisting essentially of inorganic materials containing group 13 elements (B, Al, Ga)
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/241Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
    • G11B7/252Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers
    • G11B7/257Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of layers having properties involved in recording or reproduction, e.g. optical interference layers or sensitising layers or dielectric layers, which are protecting the recording layers
    • G11B2007/25705Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of layers having properties involved in recording or reproduction, e.g. optical interference layers or sensitising layers or dielectric layers, which are protecting the recording layers consisting essentially of inorganic materials
    • G11B2007/25715Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of layers having properties involved in recording or reproduction, e.g. optical interference layers or sensitising layers or dielectric layers, which are protecting the recording layers consisting essentially of inorganic materials containing oxygen
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/241Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
    • G11B7/252Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers
    • G11B7/257Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of layers having properties involved in recording or reproduction, e.g. optical interference layers or sensitising layers or dielectric layers, which are protecting the recording layers
    • G11B2007/25705Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of layers having properties involved in recording or reproduction, e.g. optical interference layers or sensitising layers or dielectric layers, which are protecting the recording layers consisting essentially of inorganic materials
    • G11B2007/25718Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of layers having properties involved in recording or reproduction, e.g. optical interference layers or sensitising layers or dielectric layers, which are protecting the recording layers consisting essentially of inorganic materials containing halides (F, Cl, Br, l)
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/241Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
    • G11B7/252Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers
    • G11B7/253Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of substrates
    • G11B7/2531Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of substrates comprising glass
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/241Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
    • G11B7/252Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers
    • G11B7/256Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of layers improving adhesion between layers

Landscapes

  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Thermal Transfer Or Thermal Recording In General (AREA)
  • Optical Record Carriers And Manufacture Thereof (AREA)

Description

【発明の詳細な説明】 本発明は、光ビームを用いて光学的に情報を記
録又は再生することが可能な光学的記録媒体に関
するものである。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an optical recording medium on which information can be optically recorded or reproduced using a light beam.

従来、光学的記録媒体の構成として、ガラス基
板上の複数層から成る反射防止膜を形成し、更に
その上に記録層を設けた例が知られている。しか
しながら、基板としてプラスチツク等を用いた場
合、或いはガラス基板と反射防止膜との間に樹脂
から成る断熱層等を設けた場合には、クラツクを
生じる為に複数層の反射防止を形成することがで
きず、もつぱら単層の反射防止膜が用いられ、十
分な反射防止効果が得られない欠点があつた。
Conventionally, as a structure of an optical recording medium, an example is known in which an antireflection film consisting of multiple layers is formed on a glass substrate, and a recording layer is further provided on the antireflection film. However, when plastic or the like is used as the substrate, or when a heat insulating layer made of resin is provided between the glass substrate and the antireflection film, it is not necessary to form multiple antireflection layers to avoid cracks. However, a single-layer antireflection coating was used, which had the disadvantage that a sufficient antireflection effect could not be obtained.

本発明は、樹脂基板又は基板と反射防止膜の間
に樹脂層を用いる場合に上記欠点を除去し、効率
の高い記録、再生が可能な光学的記録媒体を提供
することを目的とする。
An object of the present invention is to eliminate the above-mentioned drawbacks when using a resin substrate or a resin layer between the substrate and an antireflection film, and to provide an optical recording medium capable of highly efficient recording and reproduction.

本発明は樹脂基板上に内部応力が相反する膜の
複数層から構成される反射防止膜および記録層が
順次設けられて成る光学的記録媒体および基板上
に樹脂層、内部応力が相反する膜の複数層から構
成される反射防止膜および記録層が順次設けられ
て成る光学的記録媒体によつて上記目的を達する
ものである。
The present invention relates to an optical recording medium in which an anti-reflection film and a recording layer consisting of a plurality of layers of films having opposing internal stresses are sequentially provided on a resin substrate, and a resin layer and a recording layer having opposing internal stresses on the substrate. The above object is achieved by an optical recording medium in which an antireflection film and a recording layer each having a plurality of layers are sequentially provided.

本発明において基板として用いられる樹脂とし
てはポリ(メタ)アクリレート類、ポリカーボネ
ートなどを挙げることができる。またガラス基板
上に有機断熱層等を形成する樹脂としてはシリコ
ーン系、エポキシ系、ウレタン系、ポリ(メタ)
アクリレート系を挙げることができる。
Examples of the resin used as the substrate in the present invention include poly(meth)acrylates and polycarbonate. In addition, silicone-based, epoxy-based, urethane-based, poly(meth) resins are used to form organic heat insulating layers on glass substrates.
Examples include acrylates.

本発明において、上記反射防止膜は、例えば次
のようにして構成される。すなわち、高屈折率膜
として圧縮応力を有するZnS膜を用い、低屈折率
膜として引張り応力を有するMgF2膜またはNa3
AF6膜などを用いて反射防止膜を構成する。
これらの各膜は2層以上用いることも、もちろん
可能である。別の例では、低屈折率膜として圧縮
応力を有するSiO2膜を用い、高屈折率膜として
引張り応力を有するTiO2膜またはZrO2膜などを
用いて反射防止膜を構成することもできる。さら
に別の例では、高屈折率膜としてPbF2(圧縮応
力)膜を用い、低屈折率膜としてCaF2(引張り応
力)を用いる。
In the present invention, the antireflection film is configured as follows, for example. That is, a ZnS film with compressive stress is used as the high refractive index film, and an MgF 2 film or Na 3 film with tensile stress is used as the low refractive index film.
Construct an anti-reflection film using AF 6 film, etc.
Of course, it is also possible to use two or more layers of each of these films. In another example, the antireflection film can be constructed using a SiO 2 film having compressive stress as the low refractive index film and a TiO 2 film or ZrO 2 film having tensile stress as the high refractive index film. In yet another example, a PbF 2 (compressive stress) film is used as the high refractive index film and CaF 2 (tensile stress) is used as the low refractive index film.

本発明の光学的記録媒体において、反射防止膜
の基板側から第1層目にSiO膜を設けることもで
きる。
In the optical recording medium of the present invention, a SiO film may be provided as the first layer from the substrate side of the antireflection film.

SiO膜は、有機樹脂に対して、密着性、耐溶剤
性、表面強度においてすぐれ反射防止膜の成膜性
(クラツク、ハガレ等に関係)をより向上させる。
SiO films are superior to organic resins in terms of adhesion, solvent resistance, and surface strength, and further improve the formability of anti-reflection films (related to cracks, peeling, etc.).

本発明の光学的記録媒体の構成を示す模式図で
ある第1図を参照して本発明の一実施態様を説明
する。ガラス基板1a上に有機樹脂からなる断熱
層2を形成し、反射防止層として圧縮応力を有す
る膜3a、引張り応力を有する膜3bおよび圧縮
応力を有する膜3cを真空蒸着法により形成し、
さらに記録層4、保護膜5を設け、接着層6を介
してガラス基板1bと貼り合せて光学的記録媒体
とする。反射防止膜は、反射防止層3aおよび3
cを高屈折率膜、3bを低屈折率膜として形成さ
れる。また、3aおよび3cを引張り応力を有す
る膜を用い、3bを圧縮応力を有する膜にして反
射防止膜を形成することもできる。
One embodiment of the present invention will be described with reference to FIG. 1, which is a schematic diagram showing the configuration of an optical recording medium of the present invention. A heat insulating layer 2 made of an organic resin is formed on a glass substrate 1a, and a film 3a having compressive stress, a film 3b having tensile stress and a film 3c having compressive stress are formed as antireflection layers by vacuum evaporation,
Further, a recording layer 4 and a protective film 5 are provided and bonded to a glass substrate 1b via an adhesive layer 6 to form an optical recording medium. The antireflection film includes antireflection layers 3a and 3.
C is a high refractive index film and 3b is a low refractive index film. Further, an antireflection film can also be formed by using films 3a and 3c with tensile stress and 3b with a film having compressive stress.

本発明においては、反射防止膜を内部応力が相
反する膜の複数層により構成することによつて、
樹脂基板または基板上の樹脂層を下地として反射
防止膜を形成する場合の膜のクラツクが防止され
る。また、基板上に塗布された樹脂を下地とする
場合、反射防止膜自体の内部応力が小さくなるよ
うに形成されるので、樹脂の密着性、分光透過率
特性、表面硬度、断熱性などの他に、成膜作業性
をも重視して樹脂層を選択することができ、選択
の自由度が増すという利点がある。
In the present invention, by constructing the antireflection film from multiple layers of films with opposing internal stress,
Cracks in the film are prevented when an antireflection film is formed using a resin substrate or a resin layer on the substrate as a base. In addition, when using a resin coated on a substrate as a base, the internal stress of the anti-reflection film itself is reduced, so other factors such as resin adhesion, spectral transmittance characteristics, surface hardness, heat insulation properties, etc. Another advantage is that the resin layer can be selected with emphasis on film-forming workability, increasing the degree of freedom in selection.

以下に実施例を示して本発明を具体的に説明す
る。
EXAMPLES The present invention will be specifically described below with reference to Examples.

実施例 1 第1図に示した構造の光学的記録媒体を、反射
防止層3aおよび3cにZnS膜を高屈折率膜とし
て用い、MgF2膜を低屈折率膜として用いて製作
した(記録波長800nmの1/4λ膜厚)。なお、断熱
層2、記録層4および保護膜5としては、それぞ
れポリアクリレート系樹脂GdTbFeCo4元系非晶
質合金膜およびSiO膜を用いた。このようにして
得られた光学的記録媒体は、反射防止膜にクラツ
クを生じなかつた。
Example 1 An optical recording medium having the structure shown in FIG. 1 was manufactured using ZnS films as high refractive index films and MgF 2 films as low refractive index films for the antireflection layers 3a and 3c (recording wavelength 1/4λ film thickness of 800nm). Note that as the heat insulating layer 2, the recording layer 4, and the protective film 5 , a polyacrylate resin GdTbFeCo quaternary amorphous alloy film and a SiO film were used, respectively. The optical recording medium thus obtained had no cracks in the antireflection film.

比較のために、反射防止層3aおよび3cに
は、高屈折率膜としてZrO2膜を用い、3bには
低屈折率膜としてMgF2膜を用いて反射防止膜を
構成した場合、記録波長800nmの1/4λ膜厚にお
いては膜全面にクラツクが生じた。なお、有機断
熱層2がなく、反射防止膜を直接ガラス基体1a
上に上記のようにZrO2膜とMgF2膜とで形成した
場合にはクラツクが生じなかつた。
For comparison, when the antireflection layers 3a and 3c are composed of a ZrO 2 film as a high refractive index film, and the antireflection film 3b is composed of a MgF 2 film as a low refractive index film, the recording wavelength is 800 nm. At a film thickness of 1/4λ, cracks appeared on the entire surface of the film. Note that there is no organic heat insulating layer 2, and the antireflection film is directly applied to the glass substrate 1a.
No cracks occurred when a ZrO 2 film and a MgF 2 film were formed on top as described above.

この結果から、内部応力が相反するZnS膜と
MgF2膜との組み合せの場合には反射防止膜にク
ラツクを生じないのに対して、ZrO2膜とMgF2
との組み合せでは、両者とも引張り応力を有する
ため、クラツクが生じるものと考えられる。
From this result, it is clear that the ZnS film and the ZnS film have contradictory internal stresses.
In the case of the combination with the MgF 2 film, no cracks occur in the antireflection film, whereas in the combination of the ZrO 2 film and the MgF 2 film, cracks are thought to occur because both have tensile stress. .

実施例 2 実施例1と同様にして、反射防止層3aおよび
3cに引張り応力を有する高屈折率のTiO2膜を
用い、3bに圧縮応力を有する低屈折率のSiO2
膜を用いて光学的記録媒体を作製した。反射防止
膜にクラツクは生じなかつた。
Example 2 In the same manner as in Example 1, high refractive index TiO 2 films with tensile stress were used for antireflection layers 3a and 3c, and low refractive index SiO 2 film with compressive stress was used for 3b.
An optical recording medium was fabricated using the film. No cracks occurred in the antireflection film.

比較のために、反射防止層3aおよび3cとし
てTiO2膜を用い、3bとしてMgF2膜を用い反射
防止層を構成したところ、膜全面にクラツクを生
じた。これはTiO2膜およびMgF2膜が、ともに引
張り応力を有しているためと考えられる。
For comparison, when antireflection layers were constructed using TiO 2 films as antireflection layers 3a and 3c and MgF 2 films as 3b, cracks occurred over the entire surface of the film. This is considered to be because both the TiO 2 film and the MgF 2 film have tensile stress.

前述の実施例ではガラス基板上に樹脂から成る
断熱層を設け、その上に反射防止膜を形成する例
を示したが、本発明は同様に樹脂基板上に直接反
射防止膜を形成する場合にも有効である。又、前
記例では記録層としてGdTbFeCo等の非晶質合
金を用いた光学的記録媒体を示したが、本発明は
これに限らず、TeOx,TeC等のカルコゲン系、
VO2等の半導体材料他、光学的に記録又は再生が
可能なものであればどのような材料でも記録層と
して用いることができる。
In the above-mentioned embodiment, an example was shown in which a heat insulating layer made of resin was provided on a glass substrate and an antireflection film was formed thereon, but the present invention similarly applies to the case where an antireflection film is formed directly on a resin substrate. is also valid. Further, although the above example shows an optical recording medium using an amorphous alloy such as GdTbFeCo as the recording layer, the present invention is not limited to this.
In addition to semiconductor materials such as VO 2 , any material that can be optically recorded or reproduced can be used as the recording layer.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明の光学的記録媒体の構造を説明
するための模式図である。 1a,1b……ガラス基板、2……有機断熱
層、3a,3b,3c……反射防止層、4……記
録磁性層、5……保護膜、6……接着層。
FIG. 1 is a schematic diagram for explaining the structure of the optical recording medium of the present invention. 1a, 1b... Glass substrate, 2... Organic heat insulating layer, 3a, 3b, 3c... Antireflection layer, 4... Recording magnetic layer, 5... Protective film, 6... Adhesive layer.

Claims (1)

【特許請求の範囲】 1 樹脂基板上に内部応力が相反する膜の複数層
から構成される反射防止膜および記録層が順次設
けられて成る光学的記録媒体。 2 前記反射防止膜が、高屈折率膜として圧縮応
力を有するZnS膜を用い、低屈折率膜として引張
り応力を有するMgF2膜またはNa3AF6膜を用
いて構成された特許請求の範囲第1項記載の光学
的記録媒体。 3 前記反射防止膜が、低屈折率膜として圧縮応
力を有するSiO2膜を用い、高屈折率膜として引
張り応力を有するTiO2膜またはZrO2膜を用いて
構成された特許請求の範囲第1項記載の光学的記
録媒体。 4 前記反射防止膜が、該基板側から第1番目の
層としてSiO膜を用いて構成された特許請求の範
囲第1項記載の光学的記録媒体。 5 基板上に樹脂層、内部応力が相反する膜の複
数層から構成される反射防止膜および記録層が順
次設けられて成る光学的記録媒体。 6 前記反射防止膜が、高屈折率膜として圧縮応
力を有するZnS膜を用い、低屈折率膜として引張
り応力を有するMgF2膜またはNa3AF6膜を用
いて構成された特許請求の範囲第5項記載の光学
的記録媒体。 7 前記反射防止膜が、低屈折率膜として圧縮応
力を有するSiO2膜を用い、高屈折率膜として引
張り応力を有するTiO2膜またはZrO2膜を用いて
構成された特許請求の範囲第5項記載の光学的記
録媒体。 8 前記反射防止膜が、該基板側から第1番目の
層としてSiO膜を用いて構成された特許請求の範
囲第5項記載の光学的記録媒体。
[Scope of Claims] 1. An optical recording medium comprising an anti-reflection film and a recording layer, which are composed of a plurality of layers of films having opposite internal stresses, successively provided on a resin substrate. 2. Claim No. 2, wherein the antireflection film is configured using a ZnS film having compressive stress as a high refractive index film and an MgF 2 film or Na 3 AF 6 film having tensile stress as a low refractive index film. The optical recording medium according to item 1. 3. Claim 1, wherein the anti-reflection film is configured using a SiO 2 film having compressive stress as the low refractive index film and a TiO 2 film or ZrO 2 film having tensile stress as the high refractive index film. Optical recording medium as described in section. 4. The optical recording medium according to claim 1, wherein the antireflection film is constructed using an SiO film as the first layer from the substrate side. 5. An optical recording medium comprising a resin layer, an anti-reflection film composed of multiple layers of films with opposing internal stresses, and a recording layer, which are sequentially provided on a substrate. 6. Claim No. 6, wherein the antireflection film is configured using a ZnS film having compressive stress as a high refractive index film and an MgF 2 film or Na 3 AF 6 film having tensile stress as a low refractive index film. The optical recording medium according to item 5. 7. Claim 5, wherein the anti-reflection film is constructed using a SiO 2 film having compressive stress as a low refractive index film and a TiO 2 film or ZrO 2 film having tensile stress as a high refractive index film. Optical recording medium as described in section. 8. The optical recording medium according to claim 5, wherein the antireflection film is constructed using a SiO film as the first layer from the substrate side.
JP58018929A 1983-02-09 1983-02-09 Optical recording medium Granted JPS59146461A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58018929A JPS59146461A (en) 1983-02-09 1983-02-09 Optical recording medium

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58018929A JPS59146461A (en) 1983-02-09 1983-02-09 Optical recording medium

Publications (2)

Publication Number Publication Date
JPS59146461A JPS59146461A (en) 1984-08-22
JPH0442737B2 true JPH0442737B2 (en) 1992-07-14

Family

ID=11985320

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58018929A Granted JPS59146461A (en) 1983-02-09 1983-02-09 Optical recording medium

Country Status (1)

Country Link
JP (1) JPS59146461A (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6129435A (en) * 1984-07-02 1986-02-10 Olympus Optical Co Ltd Production of photomagnetic recording medium
JPH0678032B2 (en) * 1985-08-06 1994-10-05 三菱化成株式会社 Optical recording medium
JPH0762917B2 (en) * 1986-01-20 1995-07-05 ソニー株式会社 Optical recording medium
JPS62226449A (en) * 1986-03-27 1987-10-05 Canon Inc Optical magnetic recording medium
DE69030982T2 (en) * 1989-04-27 1997-11-13 Canon Kk Optical recording medium and method for its production
JP2935769B2 (en) * 1992-04-02 1999-08-16 富士写真光機株式会社 Manufacturing method of antireflection film

Also Published As

Publication number Publication date
JPS59146461A (en) 1984-08-22

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