JPS6212882B2 - - Google Patents

Info

Publication number
JPS6212882B2
JPS6212882B2 JP54134661A JP13466179A JPS6212882B2 JP S6212882 B2 JPS6212882 B2 JP S6212882B2 JP 54134661 A JP54134661 A JP 54134661A JP 13466179 A JP13466179 A JP 13466179A JP S6212882 B2 JPS6212882 B2 JP S6212882B2
Authority
JP
Japan
Prior art keywords
layer
refractive index
film
sio
low refractive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP54134661A
Other languages
Japanese (ja)
Other versions
JPS5659202A (en
Inventor
Hiroichi Deguchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Priority to JP13466179A priority Critical patent/JPS5659202A/en
Publication of JPS5659202A publication Critical patent/JPS5659202A/en
Publication of JPS6212882B2 publication Critical patent/JPS6212882B2/ja
Granted legal-status Critical Current

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  • Eyeglasses (AREA)
  • Surface Treatment Of Optical Elements (AREA)

Description

【発明の詳細な説明】 本発明は、透明合成樹脂製光学部品(以下、光
学部品と略称する)の表面に設けた反射防止膜の
膜構成に関する。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to the structure of an antireflection film provided on the surface of a transparent synthetic resin optical component (hereinafter abbreviated as optical component).

従来の光学部品の反射防止膜は、基本的には第
1図に示すような膜をもつ。すなわち、光学部品
は10上に、表面硬度を向上させて傷つきやすい
という合成樹脂の欠点を解決するために、SiO2
からなる比較的厚い表面硬化層11を設け、その
上に反射防止層12を設けている。
A conventional antireflection film for an optical component basically has a film as shown in FIG. In other words, optical parts are manufactured using SiO 2 in order to improve the surface hardness and solve the drawback of synthetic resins that they are easily scratched.
A relatively thick surface hardening layer 11 is provided, and an antireflection layer 12 is provided thereon.

そして、反射防止層12の膜構成としては、第
2図に示すような、表面硬化層21の上に高屈折
率物質層22を設け、その上に低屈折率層23を
設けた2層構造のものや、第3図に示すような、
表面硬化層31の上に、高屈折率物質層32,3
4と低屈折率物質層33,35を交互に2層ずつ
設けた4層構造のものが知られているが、一般に
は、反射防止特性が良好な4層構造のものが主に
使用されている。これらの反射防止膜を構成する
高屈折率物質および低屈折率物質は、種々のもの
が用いられているが、特に合成樹脂製の光学部品
の場合、反射防止膜をコートする際に、密着性を
良くするために加熱することが不可能なため、使
用し得る物質は、常温でコートしても充分な密着
性が得られる物質に限定される。
The anti-reflection layer 12 has a two-layer structure, as shown in FIG. or as shown in Figure 3.
On the surface hardening layer 31, high refractive index material layers 32, 3
A four-layer structure in which two layers of low refractive index material layers 33 and 35 are alternately provided is known, but in general, a four-layer structure with good antireflection properties is mainly used. There is. Various high refractive index materials and low refractive index materials are used to make up these anti-reflection films, but especially in the case of optical components made of synthetic resin, adhesion is important when coating the anti-reflection film. Since it is impossible to heat the coating to improve its properties, the materials that can be used are limited to those that can provide sufficient adhesion even when coated at room temperature.

このような条件を満たし、良好な特性を有する
反射防止膜としては、高屈折率物質層にZrO2
を、低屈折率物質層にSiO2を用いたものが代表
的なものである。
An antireflection film that satisfies these conditions and has good properties is a layer of high refractive index material containing ZrO 2 .
A typical example is one using SiO 2 for the low refractive index material layer.

例えば、本発明が先に特願昭53−126607号(特
開昭55−52001号公報参照、以下先願と略称す
る。)において提案した反射防止膜は、ジエチレ
ングリコールカーボネート製の眼鏡レンズの表面
に第3図のような膜構成の反射防止膜を形成した
もので、中心波長λoを570nmとした時に、表
面硬化層31が約2μmのSiO2膜(先願では2
μmのSiO2膜の上にさらに光学的膜厚0.07λoの
SiO2膜を積層)、高屈折率層32および34が、
それぞれ光学的膜厚が0.07λoおよび0.52λoの
ZrO2膜、低屈折率層33および35が、それぞ
れ光学的膜厚が0.09λoおよび0.25λoのSiO2
となつており、このような膜構成で反射率1%前
後という反射防止特性を得ている。
For example, the anti-reflection film proposed by the present invention in Japanese Patent Application No. 53-126607 (see Japanese Patent Application Laid-Open No. 55-52001, hereinafter referred to as the "prior application") was applied to the surface of eyeglass lenses made of diethylene glycol carbonate. An anti-reflection film with a film structure as shown in Figure 3 is formed, and when the center wavelength
On top of the μm SiO 2 film, an optical film thickness of 0.07λo is added.
SiO 2 film stacked), high refractive index layers 32 and 34,
The optical film thickness is 0.07λo and 0.52λo, respectively.
The ZrO 2 film and the low refractive index layers 33 and 35 are SiO 2 films with optical thicknesses of 0.09λo and 0.25λo, respectively, and with this film configuration, antireflection properties with a reflectance of around 1% are obtained. ing.

このように、SiO2とZrO2を用いた反射防止膜
は、良好な反射防止特性が得られ、常温でのコー
トが可能であるという利点を有しているが、最上
層の低屈折率物質層の耐久性が必ずしも良くな
く、特に高湿雰囲気中では、膜硬度の低下、膜の
はがれといつた現象が生じ、いわゆる耐湿性が悪
いという欠点を有している。
As described above, antireflection coatings using SiO 2 and ZrO 2 have the advantage of providing good antireflection properties and being able to be coated at room temperature, but the low refractive index material of the top layer The durability of the layer is not necessarily good, and phenomena such as a decrease in film hardness and peeling of the film occur, especially in a high-humidity atmosphere, and the film has the drawback of poor moisture resistance.

本発明は、かかる欠点を改良したもので、その
目的は、上述したような従来の反射防止膜の反射
防止特性を変えることなく、耐久特性に耐湿性を
向上させることにある。
The present invention has been made to improve such drawbacks, and its purpose is to improve the durability and moisture resistance of the conventional antireflection film without changing its antireflection properties as described above.

本発明の反射防止膜は、最上層SiO2層の下
に、Al2O3の極めて薄い層を設けたことを特徴と
する。
The antireflection film of the present invention is characterized in that an extremely thin layer of Al 2 O 3 is provided below the topmost SiO 2 layer.

Al2O3層の膜厚は、1nm未満だと耐湿性向上の
効果が得られず、10nmを越えると反射防止特性
が変つてしまうため、上述の範囲が望ましい。
If the thickness of the Al 2 O 3 layer is less than 1 nm, no effect of improving moisture resistance will be obtained, and if it exceeds 10 nm, the antireflection properties will change, so it is desirable that the thickness be within the above range.

Al2O3以外の他の物質でも、膜厚を厚くすれば
耐湿性を向上させることはできるが、同時に反射
防止膜としての特性も変つてしまうため、反射防
止特性を変化させずに、耐湿性を向上させ得る物
質としては、膜厚が1nmないし10nmのAl2O3
薄膜が最適である。
Moisture resistance can be improved with other substances other than Al 2 O 3 by increasing the film thickness, but at the same time the properties as an anti-reflection film will also change. A thin film of Al 2 O 3 with a thickness of 1 nm to 10 nm is optimal as a substance capable of improving properties.

以下実施例に基づいて詳述する。 A detailed explanation will be given below based on examples.

実施例 ジエチレングリコールカーボネート製で、度数
が+6D、直径が65mmの眼鏡レンズの両面に、第
4図に示すような反射防止膜を、真空蒸着でコー
トした。40は光学部品である眼鏡レンズ、41
はSiO2からなる膜厚1μmの表面硬化層、42
はZrO2からなる第1の高屈折率層で、中心波長
λoを750nmとした時の光学的膜厚は0.07λoで
ある。43は光学的膜厚が0.09λoのSiO2からな
る第1の低屈折率層、44は光学的膜厚が0.52λ
oのZrO2からなる第2の高屈折率層、45は膜
厚5nmのAl2O3の層、46は光学的膜厚が0.25λ
oのSiO2からなる第2の低屈折率層であり、表
面硬化層の膜厚と最上層である第2の低屈折率4
6の下にAl2O3の層45の設けた点を除いて、先
に述べた先願の反射防止膜と同じ膜構成となつて
いる。
Example An antireflection film as shown in FIG. 4 was coated on both sides of a diethylene glycol carbonate eyeglass lens with a power of +6D and a diameter of 65mm by vacuum deposition. 40 is a spectacle lens which is an optical component; 41
is a surface hardening layer of SiO 2 with a thickness of 1 μm, 42
is the first high refractive index layer made of ZrO 2 and has an optical thickness of 0.07λo when the center wavelength λo is 750 nm. 43 is a first low refractive index layer made of SiO 2 with an optical thickness of 0.09λo, and 44 is a layer with an optical thickness of 0.52λ.
45 is a layer of Al 2 O 3 with a film thickness of 5 nm, and 46 is a layer with an optical thickness of 0.25λ.
The second low refractive index layer is made of SiO 2 with a thickness of 4.
The film structure is the same as that of the antireflection film of the earlier application described above, except that a layer 45 of Al 2 O 3 is provided under the antireflection film 6 .

また比較例として、本実施例と同じく、ジエチ
レングリコールカーボネート製で、度数が+
6D、直径が65mmの眼鏡レンズの両面に、本実施
例と同一条件で、第3図に示すような先に述べた
先願と同一の膜構成の反射防止膜をコートした。
ただし表面硬化層31の膜厚は、比較のために本
実施例と同じく1μmとした。高屈折率層32,
34および低屈折率層33,35の物質および光
学的膜厚は、本実施例および先願と同じである。
In addition, as a comparative example, like this example, it is made of diethylene glycol carbonate and has a +
Both sides of a 6D eyeglass lens with a diameter of 65 mm were coated with an antireflection film having the same film structure as the previous application as shown in FIG. 3 under the same conditions as in this example.
However, the thickness of the surface hardening layer 31 was set to 1 μm as in this example for comparison. high refractive index layer 32,
The material and optical film thickness of 34 and the low refractive index layers 33 and 35 are the same as in this example and the previous application.

このようにして得られた上記2種類のレンズ
を、70℃の温水に90分浸漬したところ、比較例の
眼鏡レンズの凸面側の反射防止膜は、周辺15mm幅
で剥離してしまつたが、本実施例の眼鏡レンズに
は全く異常は認められなかつた。なお、凹面側に
ついてはどちらのレンズにも異常は認められなか
つた。また、本実施例による反射防止膜の分光反
射特性は、第5図に示す通りであり、比較例の反
射防止膜とほぼ同じ反射防止特性であつた。
When the two types of lenses thus obtained were immersed in hot water at 70°C for 90 minutes, the anti-reflection coating on the convex side of the comparative eyeglass lens peeled off in a 15mm width around the periphery. No abnormality was observed in the spectacle lens of this example. Note that no abnormality was observed in either lens on the concave side. Further, the spectral reflection characteristics of the antireflection film according to this example were as shown in FIG. 5, and the antireflection characteristics were almost the same as those of the antireflection film of the comparative example.

なお、実施例ではZrO2の高屈折率層とSiO2
低屈折率層とを2層づつ交互に積層した反射防止
膜を例にとつて説明したが、本発明はこれに限ら
れるものではなく、高屈折率物質としてZrO2
を、低屈折率物質としてSiO2を用い、かつ最上
層がSiO2の低屈折率層からなる反射防止膜でれ
ば、同様の効果が得られるものである。
In addition, in the examples, an antireflection film in which two high refractive index layers of ZrO 2 and low refractive index layers of SiO 2 are laminated alternately is used as an example, but the present invention is not limited to this. ZrO 2 as a high refractive index material
A similar effect can be obtained by using an antireflection film that uses SiO 2 as a low refractive index substance and has a low refractive index layer of SiO 2 as the uppermost layer.

以上述べた如く、本発明の反射防止膜は、
SiO2からなる最上層の下に1nm〜10nmの膜厚の
Al2O3層を設けることにより、反射防止特性を変
えることなく、耐久性、特に耐湿性が大幅に向上
されており、眼鏡レンズのように日常生活におい
て高湿の環境にさらされることの多い光学部品に
最適な反射防止膜を提供し得るものである。
As described above, the antireflection film of the present invention is
A film with a thickness of 1 nm to 10 nm is placed under the top layer of SiO 2 .
By providing three layers of Al 2 O, the durability, especially the moisture resistance, is significantly improved without changing the anti-reflection properties, and the product is often exposed to high humidity environments in daily life, such as eyeglass lenses. It is possible to provide an optimal antireflection film for optical components.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は、光学部品の反射防止膜の基本的な膜
構成を示す図である。第2図および第3図は、従
来の反射防止膜の代表的な膜構成を示す図であ
る。第4図は、本発明の実施例における反射防止
膜の膜構成を示す図である。第5図は、第4図に
示す反射防止膜の分光反射特性を示す図である。 40……眼鏡レンズ、41……表面硬化層、4
2……第1の高屈折率層、43……第1の低屈折
率層、44……第2の高屈折率層、45……
Al2O3の層、46……第2の低屈折率層。
FIG. 1 is a diagram showing the basic film structure of an antireflection film for an optical component. FIGS. 2 and 3 are diagrams showing typical film configurations of conventional antireflection films. FIG. 4 is a diagram showing the film structure of an antireflection film in an example of the present invention. FIG. 5 is a diagram showing the spectral reflection characteristics of the antireflection film shown in FIG. 4. 40... Spectacle lens, 41... Surface hardening layer, 4
2...First high refractive index layer, 43...First low refractive index layer, 44...Second high refractive index layer, 45...
Al 2 O 3 layer, 46... second low refractive index layer.

Claims (1)

【特許請求の範囲】[Claims] 1 透明合成樹脂製光学部品の表面にSiO2から
なる表面硬化層を設け、その上にZrO2からなる
高屈折率層とSiO2からなる低屈折率層とを交互
に複数層積層し、かつ最上層がSiO2の低屈折率
層からなる反射防止膜において、前記最上層の低
屈折率層は膜厚1nmないし10nmのAl2O3からな
る薄膜層の上に形成されていることを特徴とする
反射防止膜。
1. A surface hardening layer made of SiO 2 is provided on the surface of a transparent synthetic resin optical component, and a plurality of high refractive index layers made of ZrO 2 and low refractive index layers made of SiO 2 are laminated alternately on the surface hardened layer, and An antireflection film in which the uppermost layer is a low refractive index layer of SiO 2 , characterized in that the uppermost low refractive index layer is formed on a thin film layer of Al 2 O 3 with a thickness of 1 nm to 10 nm. Anti-reflective coating.
JP13466179A 1979-10-18 1979-10-18 Reflection preventing film Granted JPS5659202A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13466179A JPS5659202A (en) 1979-10-18 1979-10-18 Reflection preventing film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13466179A JPS5659202A (en) 1979-10-18 1979-10-18 Reflection preventing film

Publications (2)

Publication Number Publication Date
JPS5659202A JPS5659202A (en) 1981-05-22
JPS6212882B2 true JPS6212882B2 (en) 1987-03-23

Family

ID=15133594

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13466179A Granted JPS5659202A (en) 1979-10-18 1979-10-18 Reflection preventing film

Country Status (1)

Country Link
JP (1) JPS5659202A (en)

Also Published As

Publication number Publication date
JPS5659202A (en) 1981-05-22

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