JPH0442728U - - Google Patents
Info
- Publication number
- JPH0442728U JPH0442728U JP8500690U JP8500690U JPH0442728U JP H0442728 U JPH0442728 U JP H0442728U JP 8500690 U JP8500690 U JP 8500690U JP 8500690 U JP8500690 U JP 8500690U JP H0442728 U JPH0442728 U JP H0442728U
- Authority
- JP
- Japan
- Prior art keywords
- liquid
- semiconductor wafer
- processing
- liquid processing
- carrier
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007788 liquid Substances 0.000 claims description 9
- 239000004065 semiconductor Substances 0.000 claims description 7
- 230000003068 static effect Effects 0.000 claims description 4
- 230000005611 electricity Effects 0.000 claims description 2
- 235000012431 wafers Nutrition 0.000 claims 3
- 238000001035 drying Methods 0.000 claims 1
- 239000000126 substance Substances 0.000 claims 1
- 238000005406 washing Methods 0.000 claims 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Cleaning Or Drying Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8500690U JPH0442728U (2) | 1990-08-10 | 1990-08-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8500690U JPH0442728U (2) | 1990-08-10 | 1990-08-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0442728U true JPH0442728U (2) | 1992-04-10 |
Family
ID=31633872
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8500690U Pending JPH0442728U (2) | 1990-08-10 | 1990-08-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0442728U (2) |
-
1990
- 1990-08-10 JP JP8500690U patent/JPH0442728U/ja active Pending
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