JPH0441497B2 - - Google Patents

Info

Publication number
JPH0441497B2
JPH0441497B2 JP58123217A JP12321783A JPH0441497B2 JP H0441497 B2 JPH0441497 B2 JP H0441497B2 JP 58123217 A JP58123217 A JP 58123217A JP 12321783 A JP12321783 A JP 12321783A JP H0441497 B2 JPH0441497 B2 JP H0441497B2
Authority
JP
Japan
Prior art keywords
optical system
foreign
foreign object
observation optical
sample
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58123217A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6015939A (ja
Inventor
Masakuni Akiba
Hiroto Nagatomo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP12321783A priority Critical patent/JPS6015939A/ja
Publication of JPS6015939A publication Critical patent/JPS6015939A/ja
Publication of JPH0441497B2 publication Critical patent/JPH0441497B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP12321783A 1983-07-08 1983-07-08 異物検査装置 Granted JPS6015939A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12321783A JPS6015939A (ja) 1983-07-08 1983-07-08 異物検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12321783A JPS6015939A (ja) 1983-07-08 1983-07-08 異物検査装置

Publications (2)

Publication Number Publication Date
JPS6015939A JPS6015939A (ja) 1985-01-26
JPH0441497B2 true JPH0441497B2 (ko) 1992-07-08

Family

ID=14855094

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12321783A Granted JPS6015939A (ja) 1983-07-08 1983-07-08 異物検査装置

Country Status (1)

Country Link
JP (1) JPS6015939A (ko)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6211148A (ja) * 1985-06-28 1987-01-20 Hitachi Electronics Eng Co Ltd 異物検査装置
JPS6211140A (ja) * 1985-06-28 1987-01-20 Hitachi Electronics Eng Co Ltd 異物検査装置
JPS6276732A (ja) * 1985-09-30 1987-04-08 Hitachi Electronics Eng Co Ltd 異物検査装置
JPS6275336A (ja) * 1985-09-30 1987-04-07 Hitachi Electronics Eng Co Ltd 異物検査装置
JPH0326944A (ja) * 1989-06-26 1991-02-05 Ulvac Japan Ltd 基板上の異物検査装置
JP3584066B2 (ja) * 1994-10-07 2004-11-04 株式会社トプコン 回転体上の異物の位置座標測定装置
JP2006170622A (ja) * 2004-12-10 2006-06-29 Olympus Corp 外観検査装置
CN101460832B (zh) * 2006-06-08 2012-03-21 奥林巴斯株式会社 外观检查装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54101390A (en) * 1978-01-27 1979-08-09 Hitachi Ltd Foreign matter inspector
JPS54102837A (en) * 1978-01-28 1979-08-13 Nippon Telegr & Teleph Corp <Ntt> Pattern check system

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54101390A (en) * 1978-01-27 1979-08-09 Hitachi Ltd Foreign matter inspector
JPS54102837A (en) * 1978-01-28 1979-08-13 Nippon Telegr & Teleph Corp <Ntt> Pattern check system

Also Published As

Publication number Publication date
JPS6015939A (ja) 1985-01-26

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