JPH0440873Y2 - - Google Patents
Info
- Publication number
- JPH0440873Y2 JPH0440873Y2 JP1986144121U JP14412186U JPH0440873Y2 JP H0440873 Y2 JPH0440873 Y2 JP H0440873Y2 JP 1986144121 U JP1986144121 U JP 1986144121U JP 14412186 U JP14412186 U JP 14412186U JP H0440873 Y2 JPH0440873 Y2 JP H0440873Y2
- Authority
- JP
- Japan
- Prior art keywords
- arm
- cover
- shaft
- robot
- clean
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000009423 ventilation Methods 0.000 claims description 8
- 239000000428 dust Substances 0.000 description 14
- 239000004065 semiconductor Substances 0.000 description 8
- 239000003638 chemical reducing agent Substances 0.000 description 7
- 230000003749 cleanliness Effects 0.000 description 6
- 230000000694 effects Effects 0.000 description 6
- 235000012431 wafers Nutrition 0.000 description 3
- 238000001514 detection method Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 241000894006 Bacteria Species 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000012840 feeding operation Methods 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
Landscapes
- Cleaning In General (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986144121U JPH0440873Y2 (US06229276-20010508-P00022.png) | 1986-09-22 | 1986-09-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986144121U JPH0440873Y2 (US06229276-20010508-P00022.png) | 1986-09-22 | 1986-09-22 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6350693U JPS6350693U (US06229276-20010508-P00022.png) | 1988-04-06 |
| JPH0440873Y2 true JPH0440873Y2 (US06229276-20010508-P00022.png) | 1992-09-25 |
Family
ID=31054437
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986144121U Expired JPH0440873Y2 (US06229276-20010508-P00022.png) | 1986-09-22 | 1986-09-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0440873Y2 (US06229276-20010508-P00022.png) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3716008B2 (ja) * | 1995-04-20 | 2005-11-16 | ローム株式会社 | 半導体基板入りマガジンのクランプ搬送装置 |
| JP5038029B2 (ja) * | 2007-06-14 | 2012-10-03 | ヤマハ発動機株式会社 | ロボット |
| JP2016078221A (ja) * | 2014-10-22 | 2016-05-16 | 株式会社アイエイアイ | 水平多関節ロボット |
| JP6801340B2 (ja) * | 2016-09-28 | 2020-12-16 | 株式会社デンソーウェーブ | 水平多関節型ロボット |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60259397A (ja) * | 1984-06-01 | 1985-12-21 | 松下電器産業株式会社 | 工業用ロボツト |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6094494U (ja) * | 1983-12-01 | 1985-06-27 | 三菱電機株式会社 | 産業用ロボツトの配線取付装置 |
-
1986
- 1986-09-22 JP JP1986144121U patent/JPH0440873Y2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60259397A (ja) * | 1984-06-01 | 1985-12-21 | 松下電器産業株式会社 | 工業用ロボツト |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6350693U (US06229276-20010508-P00022.png) | 1988-04-06 |
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