JPH0440594Y2 - - Google Patents

Info

Publication number

JPH0440594Y2

JPH0440594Y2 JP1987166952U JP16695287U JPH0440594Y2 JP H0440594 Y2 JPH0440594 Y2 JP H0440594Y2 JP 1987166952 U JP1987166952 U JP 1987166952U JP 16695287 U JP16695287 U JP 16695287U JP H0440594 Y2 JPH0440594 Y2 JP H0440594Y2

Authority

JP

Japan

Prior art keywords

rotary table

liquid container

plug

electrical component

electric heater

Prior art date

1987-10-31

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Expired

Links

• Espacenet
• Global Dossier
• Discuss

• 239000007788 liquid Substances 0.000 claims description 67
• 210000000078 claw Anatomy 0.000 claims description 28
• 238000010438 heat treatment Methods 0.000 claims description 6
• WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 claims description 4
• XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 7
• 230000000694 effects Effects 0.000 description 3
• 230000002093 peripheral effect Effects 0.000 description 3
• 239000004065 semiconductor Substances 0.000 description 3
• 239000011800 void material Substances 0.000 description 3
• 230000002411 adverse Effects 0.000 description 2
• 238000009835 boiling Methods 0.000 description 2
• 230000020169 heat generation Effects 0.000 description 2
• 238000009434 installation Methods 0.000 description 2
• 239000002184 metal Substances 0.000 description 2
• 238000004140 cleaning Methods 0.000 description 1
• 238000004806 packaging method and process Methods 0.000 description 1
• 229910001220 stainless steel Inorganic materials 0.000 description 1
• 239000010935 stainless steel Substances 0.000 description 1