JPH0439224B2 - - Google Patents

Info

Publication number
JPH0439224B2
JPH0439224B2 JP13003386A JP13003386A JPH0439224B2 JP H0439224 B2 JPH0439224 B2 JP H0439224B2 JP 13003386 A JP13003386 A JP 13003386A JP 13003386 A JP13003386 A JP 13003386A JP H0439224 B2 JPH0439224 B2 JP H0439224B2
Authority
JP
Japan
Prior art keywords
etching
pure water
tank
semiconductor element
work holder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP13003386A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62287624A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13003386A priority Critical patent/JPS62287624A/ja
Publication of JPS62287624A publication Critical patent/JPS62287624A/ja
Publication of JPH0439224B2 publication Critical patent/JPH0439224B2/ja
Granted legal-status Critical Current

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  • Weting (AREA)
JP13003386A 1986-06-06 1986-06-06 半導体素子のエッチング装置 Granted JPS62287624A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13003386A JPS62287624A (ja) 1986-06-06 1986-06-06 半導体素子のエッチング装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13003386A JPS62287624A (ja) 1986-06-06 1986-06-06 半導体素子のエッチング装置

Publications (2)

Publication Number Publication Date
JPS62287624A JPS62287624A (ja) 1987-12-14
JPH0439224B2 true JPH0439224B2 (enrdf_load_stackoverflow) 1992-06-26

Family

ID=15024485

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13003386A Granted JPS62287624A (ja) 1986-06-06 1986-06-06 半導体素子のエッチング装置

Country Status (1)

Country Link
JP (1) JPS62287624A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102021116206B3 (de) 2021-06-23 2022-09-29 Infineon Technologies Bipolar Gmbh & Co. Kg Verfahren und Vorrichtung zur Herstellung einer Randstruktur eines Halbleiterbauelements

Also Published As

Publication number Publication date
JPS62287624A (ja) 1987-12-14

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