JPS62287624A - 半導体素子のエッチング装置 - Google Patents

半導体素子のエッチング装置

Info

Publication number
JPS62287624A
JPS62287624A JP13003386A JP13003386A JPS62287624A JP S62287624 A JPS62287624 A JP S62287624A JP 13003386 A JP13003386 A JP 13003386A JP 13003386 A JP13003386 A JP 13003386A JP S62287624 A JPS62287624 A JP S62287624A
Authority
JP
Japan
Prior art keywords
etching
pure water
semiconductor element
tank
work holder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13003386A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0439224B2 (enrdf_load_stackoverflow
Inventor
Koichi Saisu
齋須　好一
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP13003386A priority Critical patent/JPS62287624A/ja
Publication of JPS62287624A publication Critical patent/JPS62287624A/ja
Publication of JPH0439224B2 publication Critical patent/JPH0439224B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Weting (AREA)
JP13003386A 1986-06-06 1986-06-06 半導体素子のエッチング装置 Granted JPS62287624A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13003386A JPS62287624A (ja) 1986-06-06 1986-06-06 半導体素子のエッチング装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13003386A JPS62287624A (ja) 1986-06-06 1986-06-06 半導体素子のエッチング装置

Publications (2)

Publication Number Publication Date
JPS62287624A true JPS62287624A (ja) 1987-12-14
JPH0439224B2 JPH0439224B2 (enrdf_load_stackoverflow) 1992-06-26

Family

ID=15024485

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13003386A Granted JPS62287624A (ja) 1986-06-06 1986-06-06 半導体素子のエッチング装置

Country Status (1)

Country Link
JP (1) JPS62287624A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP4109495A1 (de) * 2021-06-23 2022-12-28 Infineon Technologies Bipolar GmbH & Co. KG Verfahren und vorrichtung zur herstellung einer randstruktur eines halbleiterbauelements

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP4109495A1 (de) * 2021-06-23 2022-12-28 Infineon Technologies Bipolar GmbH & Co. KG Verfahren und vorrichtung zur herstellung einer randstruktur eines halbleiterbauelements
US12342581B2 (en) 2021-06-23 2025-06-24 Infineon Technologies Bipolar Gmbh & Co. Kg Method and device for producing an edge structure of a semiconductor component

Also Published As

Publication number Publication date
JPH0439224B2 (enrdf_load_stackoverflow) 1992-06-26

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