JPH0438645B2 - - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a buffer device, and more particularly to a buffer device that is disposed between processing devices and stores and delivers a plate-shaped member to be processed.

[Prior Art] In a line where a plate-shaped member as a workpiece is consistently processed using multiple processing devices installed for each work process, it is difficult to absorb differences in processing capacity of each processing device. In order to make the flow of the plate-shaped member smooth, a buffer device is provided between the processing devices. For example, in an integrated assembly line for semiconductor devices, as shown in Japanese Patent Application Laid-Open No. 55-88339, there is A buffer device is used.

[Problems to be Solved by the Invention] The conventional buffer device described above is not detachable and can be moved up and down, so when the buffer device is empty of plate-shaped members, the processing device in the subsequent process is stopped. However, if the processing equipment in the subsequent process breaks down while the plate-like members are already stored, the plate-like members sent out from the previous process will be stored. cannot be stored. Conversely, when a plate-like member is stored, the plate-like member can be supplied to the processing equipment for the next process even if the processing equipment for the previous process stops, but when the plate-like member is empty, it can be supplied to the processing equipment for the next process. Unable to supply to processing equipment. That is, in such a case, the entire line will stop, and the operating rate will drop significantly. Furthermore, since it is not removable, it is not possible to arbitrarily take out the plate-like members housed in the buffer device and inspect all or a sample of them.

In addition, in conventional buffer devices, storage and delivery are performed by a combination of horizontal reciprocating motion and vertical movement of the horizontal feed pin, so one cycle of storage and delivery operations takes a large amount of time, making it difficult to operate quickly. I can't do it.

In addition, conventional buffer devices perform storage and delivery in one
Since it is performed on a stand, it cannot be used independently of the front and rear lines. In addition, since it is necessary to store only good products in the buffer device, if an inspection device is placed in the front process of the buffer device, a mechanism is required to discharge defective products outside the line, and this operation reduces processing capacity. .

An object of the present invention is to provide a buffer device that solves the problems of the prior art described above.

[Means for Solving the Problems] The problem with the above-mentioned prior art is that a plurality of magazines are formed with grooves for supporting the plate-shaped member on the opposing surfaces and open at the bottom, and the plurality of magazines are connected to each other. a plurality of magazine support members that are removably positioned and mounted so that the grooves of the plurality of magazines are arranged in series; a plurality of magazine vertical drive mechanisms that intermittently drive each of the magazine support members up and down; In the buffer device, the belt mechanism is provided with a belt mechanism disposed within the magazine so as to store a plate member in the magazine positioned and mounted on the magazine support member and to feed the plate member from within the magazine. The plurality of magazines are arranged adjacently to each other, and the plurality of magazines are arranged adjacently to each other, and the plate-like members are arranged in the magazine located forward in the conveyance direction. When storing, the plate-like member that passes through the magazine in front of the magazine is directly stored, and when feeding from the magazine located in front of the magazine in the transport direction, the plate-like member is sent through the magazine directly in front of the magazine. The problem is solved by letting it happen.

[Example] An example of the present invention will be described below with reference to FIGS. 1 to 3. Two buffer mechanisms 10 and 11 having the same structure are installed in a base plate 12 in series. Therefore, below, one buffer mechanism 10
Or only the structure of No. 11 will be explained.

A U-shaped vertical drive support plate 13 is fixed to the lower surface of the base plate 12. Two vertically movable rods 15 and 16 are vertically slidably provided on the vertically movable support plate 13 via bearings 14, and the upper ends of these vertically movable rods 15 and 16 penetrate through the base plate 12. It extends upward. Further, a male thread 18 is rotatably supported on the vertical drive support plate 13 via a bearing 17, and this male thread 18 has the vertical movement rods 15, 1.
A vertical moving plate 19 fixed to 6 is screwed together.
A motor support plate 20 is fixed to the lower surface of the vertical drive support plate 13, and a pulse motor 21 is fixed to this motor support plate 20. The male screw 18 is fixed to the output shaft of the pulse motor 21 via a coupling 22.

A magazine support plate 25 is fixed to the upper ends of the vertically movable rods 15 and 16, and two magazine positioning plates 27 and 28 for positioning a magazine 26 are fixed on this magazine support plate 25.
The magazine 26 is open at the bottom, and grooves 26a for supporting both end portions of the plate-like member 29 are formed at equal intervals on opposing surfaces inside. The magazine positioning plates 27 and 28 of the magazine support plate 25
In the space between, a square hole 25a is provided in the center, and square notch grooves 25b are provided on both left and right sides.
is formed.

Further, two upper pulley shaft support plates 30 and 31 fixed to the base plate 12 are disposed between the magazine positioning plates 27 and 28, and the magazine support plates 30 and 31 are provided on the upper pulley shaft support plates 30 and 31. Board 2
Relief grooves 30a and 31a are formed so as not to interfere with 5. The upper pulley shaft support plate 30, 3
A plurality of pulley shafts 32 to 37 and 38 to 43 are rotatably supported via bearings 44, respectively, on the upper end side of the pulley shafts 31 to 3.
There are pulleys 45 to 7 on the outside of 7 and 38 to 43, respectively.
50, 51-56 are fixed. Lower pulley shaft support plates 57 and 58 are fixed to the outside of the pulley shaft support plate 30 of the base plate 12, respectively.
One drive pulley shaft 59 and two pulley shafts 60, 6
1 are rotatably supported via bearings 62, respectively. Pulleys 63-65, 66-68 are fixed to the pulley shafts 59, 60, 61, and the pulleys 63, 45, 46, 64, 47, and 4
8, 65 and 49 and 50, 66 and 51 and 52, 67
, 53 and 54, 68, 55 and 56 are hung with belts 69-71 and 72-74, respectively.

An output shaft of a motor 81 is fixed to one end of the drive pulley shaft 59 via a coupling ring 80, and the motor 81 is fixed to the base plate 12 via a motor support plate 82. Also, the motor 81
In order to transmit the rotation of the drive pulley shaft 59 driven by the two pulley shafts 60 and 61,
The drive pulley shaft 59 and the pulley shafts 60, 6
Pulleys 83, 84, and 85 are fixed to each of the pulleys 83, 84, 84, and 8.
Belts 86 and 87 are hung on the belts 5, respectively. Further, a sensor 90 for detecting a plate-like member is fixed to the upper end of the upper pulley shaft support plate 30 on the side opposite to the pulley 45.

Next, the effect will be explained. Pulse motor 21
When it rotates, the male screw 18 rotates, which causes the vertical moving plate 19 to move up and down, so that the vertical moving plate 19
At the same time, the vertically movable rods 15 and 16 slide vertically along the bearing 14. Since the magazine support plate 25 also moves up and down together with the vertical movement rods 15 and 16, the magazine 26 placed on this magazine support plate 25 moves up and down in the direction of arrow A. That is, by the rotation of the pulse motor 21, the groove 26a of the magazine 26 is moved between the belts 69 and 69.
It can be located intermittently on the upper surfaces of 71, 72-74.

The motor 81 is rotated and the drive pulley shaft 59
is rotated in the direction of arrow B, the pulley 83,
Belt 86, pulley 84, belt 87, pulley 8
Pulley shafts 60 and 61 are rotated via 5. When the pulley shafts 59, 60, 61 rotate, the pulley 6
Belts 69-71, 72 via 3, 64, 65
~74 moves in the direction of arrow C.

Intermittent vertical movement of the magazine 26 in the direction of arrow A due to the rotation of the pulse motor 21 described above, and belts 69 to 71, 72 to 74 due to the rotation of the motor 81.
By the combination of movements in the direction of arrow C, magazine 2
The plate-shaped member 29 is stored in the magazine 26 or the plate-shaped member 29 is sent out from the magazine 26. This storage and delivery operation will be explained below.

First use: Both buffer mechanisms 10 and 11 are used for storage. In this case, the buffer mechanism 10,1
1 by operating each pulse motor 21 of
Each magazine support plate 25 is brought to the lowest position, and an empty magazine 26 is positioned and placed on each magazine support plate 25. Thereby, the uppermost groove 26a of each magazine 26 of the buffer mechanisms 10, 11 corresponds to the upper surface of the belts 69-74.

Therefore, when storing in the magazine of the buffer mechanism 11, the motors 81 of the buffer mechanisms 10 and 11 are operated, and the belts 69 of each of the buffer mechanisms 10 and 11 are operated.
-74 in the direction of arrow C. This results in
The plate member 29 that has undergone the previous process is the buffer mechanism 1.
When the plate member 29 is placed on the belts 69 to 74 of the buffer mechanism 10, the plate member 29 is sent into the magazine 26 of the buffer mechanism 10 by the operation of the belts 69 to 74 of the buffer mechanism 10 in the direction of the arrow C. is sent onto the belts 69 to 74 of the buffer mechanism 11.
Then, the plate member 29 is sent into the magazine 26 of the buffer mechanism 11 by the belts 69 to 74 of the buffer mechanism 11, and when the plate member 29 is detected by the sensor 90 of the buffer mechanism 11, the buffer mechanism 10, 11 motor 81 stops, and the plate member 29 is stored in the magazine 26 of the buffer mechanism 11. Next, the pulse motor 2 of the buffer mechanism 11
1 is activated, the magazine support plate 25 moves upward, the magazine 26 rises by one pitch, and the next groove 26a becomes ready to receive the next plate member 29 in correspondence with the belts 69 to 74. After that, from the previous process, plate-shaped member 2
Each time the plate members 29 are sent, the plate members 29 are sequentially stored in the magazine 26 of the buffer mechanism 11 by the above operation.

When the magazine 26 of the buffer mechanism 11 is full, due to this condition and the detection operation of the plate member 29 by the sensor 90 of the buffer mechanism 10, each time the plate member 29 is sent from the previous process, the plate member 29
When the sensor 90 of the buffer mechanism 10 detects
The motor 81 of the buffer mechanism 10 stops, the pulse motor 21 of the buffer mechanism 10 operates to raise the magazine 26 one pitch, and then the buffer mechanism 10
The motor 81 is operated, and the buffer mechanism 10 is sequentially activated.
A plate member 29 is stored in the magazine 26 of the magazine 26 .

Of course, it is also possible to store the plate member 29 in the magazine 26 of the buffer mechanism 10 and then store the plate member 29 in the magazine 26 of the buffer mechanism 11, contrary to the above. In this case, since the full magazine 26 of the buffer mechanism 10 cannot be stored in the buffer mechanism 11, the plate member 29 is not stored in at least one groove 26a of the magazine 26 of the buffer mechanism 10. It is necessary to store it in the buffer mechanism 11.

Second use Both buffer mechanisms 10 and 11 are used for sending out. In this case, the buffer mechanism 10,1
The first pulse motor 21 is operated to keep the magazine support plate 25 at the highest position. Then, the magazines 26 containing the plate-like members 29 are positioned and placed on the respective magazine support plates 25 of the buffer mechanisms 10 and 11. Therefore, when there is a request to send out the plate-shaped member 29 from the subsequent process, the pulse motor 21 of the buffer mechanism 11 is activated and the magazine 29 is
6 is lowered and the plate member 29 is detected by the sensor 90 of the buffer mechanism 11, that is, when the plate member 29 is placed on the belts 69 to 74, the motor 81 of the buffer mechanism 11 is activated. Belt 69-74
moves in the direction of arrow C, the plate member 29 is delivered to the next process, and then the motor 81 is stopped. From then on,
The plate-shaped members 29 in the magazine 26 of the buffer mechanism 11 are sequentially delivered each time there is a request from a subsequent process.

Then, when the plate member 29 in the magazine 26 of the buffer mechanism 11 has finished being fed out and the magazine 26 of the buffer mechanism 11 is at the lowest position, the motor 81 of the buffer mechanism 11 is connected to the motor 81 of the buffer mechanism 10 due to this condition. Operating simultaneously, the belts 69 to 74 of the buffer mechanism 11 move. Then, when there is a request for the plate-like member 29 from a subsequent process, the buffer mechanism 10
1, the plate member 29 is moved from the magazine 26 of the buffer mechanism 10 to the buffer mechanism 1.
1 belts 69 to 74 and then sent to a subsequent process.

Of course, it is also possible to send out the plate-like member 29 in the magazine 26 of the buffer mechanism 10, and then send out the plate-like member 29 in the magazine 26 in the buffer mechanism 11. In this case, the plate member 29 in the magazine 26 of the buffer mechanism 10 needs to pass through the magazine 26 of the buffer mechanism 11, so the plate member 29 is in at least one groove 26a of the magazine 26 of the buffer mechanism 11. It is necessary to send it out in an unstored state.

Third application: The first buffer mechanism 10 is used for storage, and the second buffer mechanism 11 is used for delivery. In this case, the empty magazine 26 is set in the buffer mechanism 10 as explained in the first application, and the magazine 26 containing the plate member 29 is set in the buffer mechanism 11 as explained in the second application. Set.
Then, by causing the buffer mechanism 10 to perform the operation described in the first application, the plate member 29 sent from the previous process is stored in the magazine 26 of the buffer mechanism 10. Also, the buffer mechanism 11
By performing the operation described in the second application, the magazine 26 of the buffer mechanism 11 is used in the subsequent process.
The inner plate member 29 can be delivered.

In this way, one buffer mechanism 10 can be used for storage, and the other buffer mechanism 11 can be used for delivery, so storage and delivery can be performed independently of the front and rear lines, and either processing equipment on the front or rear lines can be used. Even if it breaks down, no problem will occur. Further, since the magazine 26 is removable, when the magazine 26 of the buffer mechanism 10 is full of plate-like members 29, the magazine 26 is removed and the plate-like members 29 are removed.
100% or sample inspection is possible.

Fourth use As explained in the first use and second use,
Since the buffer mechanisms 10 and 11 have both functions for storage and delivery, the buffer mechanisms 10 and 11 can be used both for storage and delivery.
That is, the plate member 29 sent from the previous process is transferred to the magazine 2 of either the buffer mechanism 10 or 11.
6, and when there is a delivery request from a subsequent process, the plate-like member 29 in the magazine 26 of the buffer mechanism 10 or 11 is sent out.

Fifth Application One buffer mechanism 10 can be used for storing defective products, and the other buffer mechanism 11 can be used for storing and sending out good products. That is, when the pre-process inspection device outputs a signal indicating that the plate member 29 is a defective product, the plate member 29 is stored in the buffer mechanism 10, and in the case of other non-defective products, the buffer mechanism 10 stores the plate member 29. It can be stored in the mechanism 11. Further, when there is a delivery request from a subsequent process, the plate member 29 in the magazine 26 of the buffer mechanism 11 is delivered.

Of course, the buffer mechanism 10 may be used for storing and sending out good products, and the buffer mechanism 11 may be used for storing defective products.

In the above embodiment, a case has been described in which two buffer mechanisms 10 and 11 are arranged in series, but three or more buffer mechanisms may be provided.

[Effects of the Invention] As is clear from the above explanation, according to the present invention, since storage and delivery are performed by a belt mechanism,
Its operation is quick, productivity is improved, and even if the processing capacity of the processing equipment before and after it is unbalanced, it can be easily dealt with. In addition, each magazine is equipped with an independently driven belt, so
Each magazine and each belt can be operated individually, and the operation of storing plate-like members in one magazine and the operation of sending out plate-like members from another magazine can be performed simultaneously. Therefore, variations in working time between processes can be efficiently absorbed, and working time can be shortened. In addition, multiple magazines are arranged adjacently,
A plate-shaped member that has passed through one magazine can be stored directly in the other magazine, and a plate-shaped member can be delivered from one magazine directly through the other magazine, so the installation area is small and there is no need for extra conveyance means. It is not necessary to store and send out the plate-like member efficiently.

[Brief explanation of drawings]

FIG. 1 is a partially cutaway front view showing an embodiment of the present invention, FIG. 2 is a plan view of FIG. 1, and FIG. 3 is a right side view of FIG. 1. 10, 11... Buffer mechanism, 15, 16...
Vertical movement rod, 18...Male thread, 19...Vertical movement plate,
21...Pulse motor, 25...Magazine support plate, 26...Magazine, 26a...Groove, 27,2
8...Magazine positioning plate, 29...Plate member,
30, 31...Upper pulley shaft support plate, 45-56
... Pulley, 57, 58... Lower pulley shaft support plate, 63-68... Pulley, 69-74... Belt, 81... Motor, 86, 87... Belt.

Claims (1)

[Claims] 1 A groove supporting the plate-like member is formed on the opposing surface,
a plurality of magazines whose bottoms are open; a plurality of magazine support members for removably positioning and mounting the plurality of magazines so that the grooves of the plurality of magazines are in series; A plurality of magazine up and down drive mechanisms that intermittently drive each member up and down, and are arranged in the magazine so that the plate-shaped members are stored in the magazine positioned and placed on the magazine support member and sent out from the magazine. In the buffer device, the belt mechanism is independently disposed in each magazine and driven by a drive mechanism independently, and furthermore, the plurality of magazines are adjacent to each other. When a plate-like member is stored in a magazine that is arranged at A buffer device characterized in that, when feeding, a plate-shaped member is fed through a magazine directly in front of the magazine.