JPH0438469B2 - - Google Patents

Info

Publication number
JPH0438469B2
JPH0438469B2 JP62304140A JP30414087A JPH0438469B2 JP H0438469 B2 JPH0438469 B2 JP H0438469B2 JP 62304140 A JP62304140 A JP 62304140A JP 30414087 A JP30414087 A JP 30414087A JP H0438469 B2 JPH0438469 B2 JP H0438469B2
Authority
JP
Japan
Prior art keywords
cleaning
chamber
exhaust
pipe
solvent
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP62304140A
Other languages
English (en)
Japanese (ja)
Other versions
JPH01143675A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP30414087A priority Critical patent/JPH01143675A/ja
Publication of JPH01143675A publication Critical patent/JPH01143675A/ja
Publication of JPH0438469B2 publication Critical patent/JPH0438469B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Cleaning By Liquid Or Steam (AREA)
JP30414087A 1987-11-30 1987-11-30 洗浄装置 Granted JPH01143675A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP30414087A JPH01143675A (ja) 1987-11-30 1987-11-30 洗浄装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP30414087A JPH01143675A (ja) 1987-11-30 1987-11-30 洗浄装置

Publications (2)

Publication Number Publication Date
JPH01143675A JPH01143675A (ja) 1989-06-06
JPH0438469B2 true JPH0438469B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1992-06-24

Family

ID=17929524

Family Applications (1)

Application Number Title Priority Date Filing Date
JP30414087A Granted JPH01143675A (ja) 1987-11-30 1987-11-30 洗浄装置

Country Status (1)

Country Link
JP (1) JPH01143675A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS599228B2 (ja) * 1980-03-07 1984-03-01 トヨタ自動車株式会社 有機溶剤を用いた洗浄装置
JPS59102189U (ja) * 1982-12-23 1984-07-10 吉井産業株式会社 有機溶剤蒸気浴洗浄装置
JPS59110003U (ja) * 1983-01-17 1984-07-25 吉井産業株式会社 有機溶剤洗浄における排気ガス回収装置

Also Published As

Publication number Publication date
JPH01143675A (ja) 1989-06-06

Similar Documents

Publication Publication Date Title
US4282015A (en) Method of and apparatus for regenerating an adsorption agent
KR20200054507A (ko) 필터 자동세척기능이 구비된 공기정화기
US6228180B1 (en) Method for disposing of the washing liquid in a machine for washing items and the washing machine used to implement the method
JPH0615239A (ja) 真空洗浄・乾燥方法および装置
JPH0438469B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
US3526237A (en) Filter cleaner
US4756322A (en) Means for restoring the initial cleanness conditions in a quartz tube used as a reaction chamber for the production of integrated circuits
US2777534A (en) Carbon adsorber cooling means
JPH01143674A (ja) 洗浄装置
JPH04176377A (ja) 洗浄装置
JP3288172B2 (ja) 工業用洗浄装置
EP0392758A1 (en) Solvent recovering system for a cleaning machine
JP3219193B2 (ja) 洗浄車
JP2820324B2 (ja) ワークの乾燥装置
EP0897763A2 (en) A method for disposing of the washing liquid in a machine for washing items and the washing machine used to implement the method
KR20050091371A (ko) 휘발성 유기화합물의 세정응축 회수장치
JPS6253722A (ja) 集塵方法及びその装置
JPH0717374U (ja) 洗浄乾燥装置の乾燥部仕切り構造
JPH03112532A (ja) 洗浄機
JPH0611065Y2 (ja) 集麈装置
JPH03112533A (ja) 洗浄機
JPH09159357A (ja) 電子部品等の乾燥装置
JP3445066B2 (ja) 真空濾過方法及び濾過装置
JPS6179498A (ja) ドライクリ−ニング装置
JPH075841Y2 (ja) 有機溶剤を使用する洗浄器用溶剤の再生回収装置