JPH0438454Y2 - - Google Patents
Info
- Publication number
- JPH0438454Y2 JPH0438454Y2 JP18742985U JP18742985U JPH0438454Y2 JP H0438454 Y2 JPH0438454 Y2 JP H0438454Y2 JP 18742985 U JP18742985 U JP 18742985U JP 18742985 U JP18742985 U JP 18742985U JP H0438454 Y2 JPH0438454 Y2 JP H0438454Y2
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- disk
- metal fitting
- protrusion
- lever
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18742985U JPH0438454Y2 (cs) | 1985-12-04 | 1985-12-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18742985U JPH0438454Y2 (cs) | 1985-12-04 | 1985-12-04 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6294550U JPS6294550U (cs) | 1987-06-16 |
| JPH0438454Y2 true JPH0438454Y2 (cs) | 1992-09-09 |
Family
ID=31137898
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18742985U Expired JPH0438454Y2 (cs) | 1985-12-04 | 1985-12-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0438454Y2 (cs) |
-
1985
- 1985-12-04 JP JP18742985U patent/JPH0438454Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6294550U (cs) | 1987-06-16 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US5244404A (en) | IC socket | |
| JPH0438454Y2 (cs) | ||
| JPH0370869B2 (cs) | ||
| JPH1196635A (ja) | ディスク装置のディスククランプ機構 | |
| US4646418A (en) | Carrier for photomask substrate | |
| JPS6023802Y2 (ja) | カセット蓋の開放装置 | |
| JP2602409Y2 (ja) | 基板収納円板 | |
| JPS5848268A (ja) | カセツト装着装置 | |
| JPH0517798Y2 (cs) | ||
| JPH0610066Y2 (ja) | ピボットヒンジ | |
| JPH02720U (cs) | ||
| KR0161629B1 (ko) | 반도체 이온주입 설비의 웨이퍼 고정장치 | |
| JPH05334779A (ja) | ディスクセンタリング機構 | |
| JP2719766B2 (ja) | Icソケット | |
| JPH0350010Y2 (cs) | ||
| SU835703A1 (ru) | Механизм питани автоматических устройств | |
| KR100585079B1 (ko) | 디스크 플레이어 | |
| JPS6315016Y2 (cs) | ||
| JPS6035268Y2 (ja) | 収納ケ−スの固定具 | |
| JPH08181192A (ja) | ウェハ移載機 | |
| JPH0525686U (ja) | Icソケツト | |
| JPH0713222Y2 (ja) | ウエハカセットの位置決め検知装置 | |
| KR20020027788A (ko) | 디스크 클램핑 장치 | |
| JPS6247940A (ja) | イオン注入装置 | |
| JPS6299027A (ja) | 搬送治具 |