JPH0438050U - - Google Patents
Info
- Publication number
- JPH0438050U JPH0438050U JP8106790U JP8106790U JPH0438050U JP H0438050 U JPH0438050 U JP H0438050U JP 8106790 U JP8106790 U JP 8106790U JP 8106790 U JP8106790 U JP 8106790U JP H0438050 U JPH0438050 U JP H0438050U
- Authority
- JP
- Japan
- Prior art keywords
- arm
- cassette
- height
- board
- view
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000003028 elevating effect Effects 0.000 claims description 2
- 230000004308 accommodation Effects 0.000 claims 1
- 239000000758 substrate Substances 0.000 description 7
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8106790U JP2515325Y2 (ja) | 1990-07-30 | 1990-07-30 | 基板の搬出・搬入装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8106790U JP2515325Y2 (ja) | 1990-07-30 | 1990-07-30 | 基板の搬出・搬入装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0438050U true JPH0438050U (US20110009641A1-20110113-C00185.png) | 1992-03-31 |
| JP2515325Y2 JP2515325Y2 (ja) | 1996-10-30 |
Family
ID=31626682
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8106790U Expired - Fee Related JP2515325Y2 (ja) | 1990-07-30 | 1990-07-30 | 基板の搬出・搬入装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2515325Y2 (US20110009641A1-20110113-C00185.png) |
-
1990
- 1990-07-30 JP JP8106790U patent/JP2515325Y2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JP2515325Y2 (ja) | 1996-10-30 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |