JPH0438050U - - Google Patents
Info
- Publication number
- JPH0438050U JPH0438050U JP8106790U JP8106790U JPH0438050U JP H0438050 U JPH0438050 U JP H0438050U JP 8106790 U JP8106790 U JP 8106790U JP 8106790 U JP8106790 U JP 8106790U JP H0438050 U JPH0438050 U JP H0438050U
- Authority
- JP
- Japan
- Prior art keywords
- arm
- cassette
- height
- board
- view
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000003028 elevating effect Effects 0.000 claims description 2
- 230000004308 accommodation Effects 0.000 claims 1
- 239000000758 substrate Substances 0.000 description 7
Description
図面は本考案に係る基板の搬出・搬入装置の一
実施例を示し、第１図は装置全体の概略側面図、
第２図はその平面図、第３図は基板搬出・搬入ユ
ニツトを示す平面図、第４図は基板搬出・搬入ユ
ニツトを示す正面図、第５図はアームユニツトの
平面図、第６図はアームユニツトの側面図、第７
図はアームユニツトのベース板移動機構を示す正
面図、第８図はその一部を示す側面図、第９図は
基板整合および載置昇降構造の正面図、第１０図
はプツシヤー板駆動用カム機構の側面図、第１１
図は基板整合および載置昇降構造の側面図、第１
２図はその平面図、第１３図は基板整合作動を示
す平面図である。
Ｃ……カセツト、２……基板搬出・搬入用ユニ
ツト、３ａ……下段カセツトテーブル、３ｂ……
上段カセツトテーブル、１６……螺軸（アムーム
・螺進昇降用）、２０……アームユニツト、２５
……ロードレスシリンダ（アーム・スローク昇降
用）、２８……吸着アーム。
The drawings show an embodiment of the board loading and unloading device according to the present invention, and FIG. 1 is a schematic side view of the entire device;
Fig. 2 is a plan view thereof, Fig. 3 is a plan view showing the substrate unloading/loading unit, Fig. 4 is a front view showing the substrate unloading/loading unit, Fig. 5 is a plan view of the arm unit, and Fig. 6 is a plan view showing the substrate unloading/loading unit. Side view of arm unit, 7th
The figure is a front view showing the base plate moving mechanism of the arm unit, Fig. 8 is a side view showing a part of it, Fig. 9 is a front view of the substrate alignment and mounting elevating structure, and Fig. 10 is a cam for driving the pusher plate. Side view of mechanism, 11th
The figure is a side view of the substrate alignment and mounting lifting structure.
FIG. 2 is a plan view thereof, and FIG. 13 is a plan view showing the substrate alignment operation. C...Cassette, 2...Unit for carrying in and out of substrates, 3a...Lower cassette table, 3b...
Upper cassette table, 16... Spiral shaft (for ammoum/screw elevation), 20... Arm unit, 25
...Loadless cylinder (for raising and lowering the arm and stroke), 28...Suction arm.
Claims (1)
対して基板の出し入れを行う基板の搬出・搬入装
置であつて、 基板を保持する機構を備えたアームと、 前記アームをカセツトに向けて前進あるいは後
進させるアーム前後進駆動手段と、 前記アームを１つのカセツトの基板収容高さに
相当する範囲内で昇降させるとともに、その取り
付け位置が下段カセツトよりも下方にある螺進昇
降手段と、 前記螺進昇降手段に付設され、前記アームをカ
セツトの高さ相当量のストロークで昇降させるア
ーム基準高さ切り換え用のシリンダと、 を備えたことを特徴とする基板の搬出・搬入装置
。[Scope of Claim for Utility Model Registration] A board loading and unloading device for loading and unloading boards into two upper and lower cassettes each storing boards, comprising: an arm having a mechanism for holding the board; An arm forward/backward movement drive means for moving the arm forward or backward toward the cassette, and a screw lifting device that raises and lowers the arm within a range corresponding to the board accommodation height of one cassette, and whose mounting position is below the lower cassette. and a cylinder for switching the reference arm height, which is attached to the screw elevating means and raises and lowers the arm with a stroke equivalent to the height of the cassette. .
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8106790U JP2515325Y2 (en) | 1990-07-30 | 1990-07-30 | Board carry-out / carry-in device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8106790U JP2515325Y2 (en) | 1990-07-30 | 1990-07-30 | Board carry-out / carry-in device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0438050U true JPH0438050U (en) | 1992-03-31 |
| JP2515325Y2 JP2515325Y2 (en) | 1996-10-30 |
Family
ID=31626682
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8106790U Expired - Fee Related JP2515325Y2 (en) | 1990-07-30 | 1990-07-30 | Board carry-out / carry-in device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2515325Y2 (en) |
-
1990
- 1990-07-30 JP JP8106790U patent/JP2515325Y2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JP2515325Y2 (en) | 1996-10-30 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |