JPH0437909Y2 - - Google Patents

Info

Publication number
JPH0437909Y2
JPH0437909Y2 JP1987162148U JP16214887U JPH0437909Y2 JP H0437909 Y2 JPH0437909 Y2 JP H0437909Y2 JP 1987162148 U JP1987162148 U JP 1987162148U JP 16214887 U JP16214887 U JP 16214887U JP H0437909 Y2 JPH0437909 Y2 JP H0437909Y2
Authority
JP
Japan
Prior art keywords
electron beam
liquid nitrogen
molecular beam
crystal growth
nitrogen shroud
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1987162148U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0165870U (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987162148U priority Critical patent/JPH0437909Y2/ja
Publication of JPH0165870U publication Critical patent/JPH0165870U/ja
Application granted granted Critical
Publication of JPH0437909Y2 publication Critical patent/JPH0437909Y2/ja
Expired legal-status Critical Current

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Landscapes

  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
JP1987162148U 1987-10-22 1987-10-22 Expired JPH0437909Y2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987162148U JPH0437909Y2 (enExample) 1987-10-22 1987-10-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987162148U JPH0437909Y2 (enExample) 1987-10-22 1987-10-22

Publications (2)

Publication Number Publication Date
JPH0165870U JPH0165870U (enExample) 1989-04-27
JPH0437909Y2 true JPH0437909Y2 (enExample) 1992-09-04

Family

ID=31445710

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987162148U Expired JPH0437909Y2 (enExample) 1987-10-22 1987-10-22

Country Status (1)

Country Link
JP (1) JPH0437909Y2 (enExample)

Also Published As

Publication number Publication date
JPH0165870U (enExample) 1989-04-27

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