JPH0437894Y2 - - Google Patents

Info

Publication number
JPH0437894Y2
JPH0437894Y2 JP1776686U JP1776686U JPH0437894Y2 JP H0437894 Y2 JPH0437894 Y2 JP H0437894Y2 JP 1776686 U JP1776686 U JP 1776686U JP 1776686 U JP1776686 U JP 1776686U JP H0437894 Y2 JPH0437894 Y2 JP H0437894Y2
Authority
JP
Japan
Prior art keywords
coil
thermocouple
tip
temperature
furnace body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1776686U
Other languages
English (en)
Japanese (ja)
Other versions
JPS62129057U (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1776686U priority Critical patent/JPH0437894Y2/ja
Publication of JPS62129057U publication Critical patent/JPS62129057U/ja
Application granted granted Critical
Publication of JPH0437894Y2 publication Critical patent/JPH0437894Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Measuring Temperature Or Quantity Of Heat (AREA)
  • Waste-Gas Treatment And Other Accessory Devices For Furnaces (AREA)
JP1776686U 1986-02-10 1986-02-10 Expired JPH0437894Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1776686U JPH0437894Y2 (enrdf_load_stackoverflow) 1986-02-10 1986-02-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1776686U JPH0437894Y2 (enrdf_load_stackoverflow) 1986-02-10 1986-02-10

Publications (2)

Publication Number Publication Date
JPS62129057U JPS62129057U (enrdf_load_stackoverflow) 1987-08-15
JPH0437894Y2 true JPH0437894Y2 (enrdf_load_stackoverflow) 1992-09-04

Family

ID=30810818

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1776686U Expired JPH0437894Y2 (enrdf_load_stackoverflow) 1986-02-10 1986-02-10

Country Status (1)

Country Link
JP (1) JPH0437894Y2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009042070A (ja) * 2007-08-09 2009-02-26 Sei Hybrid Kk 半導体製造装置用測温装置及びそれを搭載した半導体製造装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009042070A (ja) * 2007-08-09 2009-02-26 Sei Hybrid Kk 半導体製造装置用測温装置及びそれを搭載した半導体製造装置

Also Published As

Publication number Publication date
JPS62129057U (enrdf_load_stackoverflow) 1987-08-15

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