JPS62129057U - - Google Patents

Info

Publication number
JPS62129057U
JPS62129057U JP1776686U JP1776686U JPS62129057U JP S62129057 U JPS62129057 U JP S62129057U JP 1776686 U JP1776686 U JP 1776686U JP 1776686 U JP1776686 U JP 1776686U JP S62129057 U JPS62129057 U JP S62129057U
Authority
JP
Japan
Prior art keywords
thermocouple
coil
tip
hearth
insertion hole
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1776686U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0437894Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1776686U priority Critical patent/JPH0437894Y2/ja
Publication of JPS62129057U publication Critical patent/JPS62129057U/ja
Application granted granted Critical
Publication of JPH0437894Y2 publication Critical patent/JPH0437894Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Measuring Temperature Or Quantity Of Heat (AREA)
  • Waste-Gas Treatment And Other Accessory Devices For Furnaces (AREA)
JP1776686U 1986-02-10 1986-02-10 Expired JPH0437894Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1776686U JPH0437894Y2 (enrdf_load_stackoverflow) 1986-02-10 1986-02-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1776686U JPH0437894Y2 (enrdf_load_stackoverflow) 1986-02-10 1986-02-10

Publications (2)

Publication Number Publication Date
JPS62129057U true JPS62129057U (enrdf_load_stackoverflow) 1987-08-15
JPH0437894Y2 JPH0437894Y2 (enrdf_load_stackoverflow) 1992-09-04

Family

ID=30810818

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1776686U Expired JPH0437894Y2 (enrdf_load_stackoverflow) 1986-02-10 1986-02-10

Country Status (1)

Country Link
JP (1) JPH0437894Y2 (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4905290B2 (ja) * 2007-08-09 2012-03-28 住友電気工業株式会社 半導体製造装置用測温装置及びそれを搭載した半導体製造装置

Also Published As

Publication number Publication date
JPH0437894Y2 (enrdf_load_stackoverflow) 1992-09-04

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