JPS62129057U - - Google Patents
Info
- Publication number
- JPS62129057U JPS62129057U JP1776686U JP1776686U JPS62129057U JP S62129057 U JPS62129057 U JP S62129057U JP 1776686 U JP1776686 U JP 1776686U JP 1776686 U JP1776686 U JP 1776686U JP S62129057 U JPS62129057 U JP S62129057U
- Authority
- JP
- Japan
- Prior art keywords
- thermocouple
- coil
- tip
- hearth
- insertion hole
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000137 annealing Methods 0.000 claims description 2
- 230000037431 insertion Effects 0.000 claims description 2
- 238000003780 insertion Methods 0.000 claims description 2
- 238000007789 sealing Methods 0.000 claims description 2
- 238000010438 heat treatment Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
Landscapes
- Measuring Temperature Or Quantity Of Heat (AREA)
- Waste-Gas Treatment And Other Accessory Devices For Furnaces (AREA)
Description
第１図は本考案の一実施例を示す要部の断面図
、第２図は本考案を適用する焼鈍炉の一例を示す
縦断面図、第３図は従来の側温装置部の断面図で
ある。
１…炉体、２…炉床、３…コイル、４…プレナ
ムチヤンバ、５…輻射管、７…フアン、８…ノズ
ル、９…通路、１０…退避路、１１…熱電対、１
１ａ…先端、１２…付勢手段、１３…熱電対挿通
孔、１４…封止手段、１５…条材、１６…ウエイ
ト、１７…滑車、１８…伸縮筒。
Fig. 1 is a cross-sectional view of essential parts showing an embodiment of the present invention, Fig. 2 is a longitudinal cross-sectional view showing an example of an annealing furnace to which the present invention is applied, and Fig. 3 is a cross-sectional view of a conventional side heating device. It is. DESCRIPTION OF SYMBOLS 1... Furnace body, 2... Hearth, 3... Coil, 4... Plenum chamber, 5... Radiation tube, 7... Fan, 8... Nozzle, 9... Passage, 10... Evacuation path, 11... Thermocouple, 1
1a... tip, 12... biasing means, 13... thermocouple insertion hole, 14... sealing means, 15... strip, 16... weight, 17... pulley, 18... telescopic tube.
Claims (1)
理を行なう焼鈍炉において、炉床部に熱電対をそ
の先端がコイル載置面よりわずか上方に突出する
よう突出習性を付与する付勢手段を介して支持し
、熱電対の外端にはその挿通孔を封止する封止手
段を設けてなり、コイル装入時にコイル下面で熱
電対の先端を押下げ、コイル下面への熱電対の先
端の当接状態を保持するようにしたことを特徴と
するコイル温度制御用測温装置。 In an annealing furnace in which a coil wound with a thin plate is inserted into the furnace body and heat treated, a biasing means is provided for imparting a protruding habit to a thermocouple in the hearth so that its tip protrudes slightly above the coil mounting surface. A sealing means is provided at the outer end of the thermocouple to seal the insertion hole of the thermocouple. A temperature measuring device for controlling a coil temperature, characterized in that a contact state of the tip is maintained.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1776686U JPH0437894Y2 (en) | 1986-02-10 | 1986-02-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1776686U JPH0437894Y2 (en) | 1986-02-10 | 1986-02-10 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62129057U true JPS62129057U (en) | 1987-08-15 |
| JPH0437894Y2 JPH0437894Y2 (en) | 1992-09-04 |
Family
ID=30810818
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1776686U Expired JPH0437894Y2 (en) | 1986-02-10 | 1986-02-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0437894Y2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4905290B2 (en) * | 2007-08-09 | 2012-03-28 | 住友電気工業株式会社 | Temperature measuring device for semiconductor manufacturing apparatus and semiconductor manufacturing apparatus equipped with the same |
-
1986
- 1986-02-10 JP JP1776686U patent/JPH0437894Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0437894Y2 (en) | 1992-09-04 |
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