JPH0436585B2 - - Google Patents

Info

Publication number
JPH0436585B2
JPH0436585B2 JP59280620A JP28062084A JPH0436585B2 JP H0436585 B2 JPH0436585 B2 JP H0436585B2 JP 59280620 A JP59280620 A JP 59280620A JP 28062084 A JP28062084 A JP 28062084A JP H0436585 B2 JPH0436585 B2 JP H0436585B2
Authority
JP
Japan
Prior art keywords
substrate
thin film
guide rails
back side
heater
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59280620A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61154082A (ja
Inventor
Yutaka Hayashi
Atsuo Ito
Hideyo Iida
Yukiko Fujimaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Taiyo Yuden Co Ltd
Original Assignee
Agency of Industrial Science and Technology
Taiyo Yuden Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology, Taiyo Yuden Co Ltd filed Critical Agency of Industrial Science and Technology
Priority to JP59280620A priority Critical patent/JPS61154082A/ja
Publication of JPS61154082A publication Critical patent/JPS61154082A/ja
Publication of JPH0436585B2 publication Critical patent/JPH0436585B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F71/00—Manufacture or treatment of devices covered by this subclass

Landscapes

  • Surface Treatment Of Glass (AREA)
  • Photovoltaic Devices (AREA)
  • Non-Insulated Conductors (AREA)
  • Manufacturing Of Electric Cables (AREA)
  • Chemically Coating (AREA)
  • Chemical Vapour Deposition (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP59280620A 1984-12-26 1984-12-26 霧により薄膜を作製する方法 Granted JPS61154082A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59280620A JPS61154082A (ja) 1984-12-26 1984-12-26 霧により薄膜を作製する方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59280620A JPS61154082A (ja) 1984-12-26 1984-12-26 霧により薄膜を作製する方法

Publications (2)

Publication Number Publication Date
JPS61154082A JPS61154082A (ja) 1986-07-12
JPH0436585B2 true JPH0436585B2 (enrdf_load_stackoverflow) 1992-06-16

Family

ID=17627584

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59280620A Granted JPS61154082A (ja) 1984-12-26 1984-12-26 霧により薄膜を作製する方法

Country Status (1)

Country Link
JP (1) JPS61154082A (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4650600B2 (ja) * 2001-08-09 2011-03-16 株式会社ジェイエイアイコーポレーション Ｒｇｂフィルタを有するエリアセンサ付き光学像読取装置
JP4727355B2 (ja) * 2005-09-13 2011-07-20 株式会社フジクラ 成膜方法

Also Published As

Publication number Publication date
JPS61154082A (ja) 1986-07-12

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term