JPH0436235Y2 - - Google Patents

Info

Publication number
JPH0436235Y2
JPH0436235Y2 JP1987096152U JP9615287U JPH0436235Y2 JP H0436235 Y2 JPH0436235 Y2 JP H0436235Y2 JP 1987096152 U JP1987096152 U JP 1987096152U JP 9615287 U JP9615287 U JP 9615287U JP H0436235 Y2 JPH0436235 Y2 JP H0436235Y2
Authority
JP
Japan
Prior art keywords
electrodes
adsorption layer
resistor
power supply
supply circuit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1987096152U
Other languages
English (en)
Japanese (ja)
Other versions
JPS642593U (en:Method
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987096152U priority Critical patent/JPH0436235Y2/ja
Publication of JPS642593U publication Critical patent/JPS642593U/ja
Application granted granted Critical
Publication of JPH0436235Y2 publication Critical patent/JPH0436235Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Jigs For Machine Tools (AREA)
JP1987096152U 1987-06-23 1987-06-23 Expired JPH0436235Y2 (en:Method)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987096152U JPH0436235Y2 (en:Method) 1987-06-23 1987-06-23

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987096152U JPH0436235Y2 (en:Method) 1987-06-23 1987-06-23

Publications (2)

Publication Number Publication Date
JPS642593U JPS642593U (en:Method) 1989-01-09
JPH0436235Y2 true JPH0436235Y2 (en:Method) 1992-08-26

Family

ID=31320982

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987096152U Expired JPH0436235Y2 (en:Method) 1987-06-23 1987-06-23

Country Status (1)

Country Link
JP (1) JPH0436235Y2 (en:Method)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5389339U (en:Method) * 1976-12-23 1978-07-21

Also Published As

Publication number Publication date
JPS642593U (en:Method) 1989-01-09

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