JPH0436235Y2 - - Google Patents
Info
- Publication number
- JPH0436235Y2 JPH0436235Y2 JP1987096152U JP9615287U JPH0436235Y2 JP H0436235 Y2 JPH0436235 Y2 JP H0436235Y2 JP 1987096152 U JP1987096152 U JP 1987096152U JP 9615287 U JP9615287 U JP 9615287U JP H0436235 Y2 JPH0436235 Y2 JP H0436235Y2
- Authority
- JP
- Japan
- Prior art keywords
- electrodes
- adsorption layer
- resistor
- power supply
- supply circuit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000001179 sorption measurement Methods 0.000 claims description 45
- 230000006378 damage Effects 0.000 description 9
- 208000027418 Wounds and injury Diseases 0.000 description 5
- 230000005611 electricity Effects 0.000 description 5
- 208000014674 injury Diseases 0.000 description 5
- 230000000694 effects Effects 0.000 description 3
- 238000005299 abrasion Methods 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 2
- 230000006698 induction Effects 0.000 description 1
- 230000014759 maintenance of location Effects 0.000 description 1
- 230000000116 mitigating effect Effects 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Jigs For Machine Tools (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1987096152U JPH0436235Y2 (US06272168-20010807-M00014.png) | 1987-06-23 | 1987-06-23 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1987096152U JPH0436235Y2 (US06272168-20010807-M00014.png) | 1987-06-23 | 1987-06-23 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS642593U JPS642593U (US06272168-20010807-M00014.png) | 1989-01-09 |
JPH0436235Y2 true JPH0436235Y2 (US06272168-20010807-M00014.png) | 1992-08-26 |
Family
ID=31320982
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1987096152U Expired JPH0436235Y2 (US06272168-20010807-M00014.png) | 1987-06-23 | 1987-06-23 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0436235Y2 (US06272168-20010807-M00014.png) |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5389339U (US06272168-20010807-M00014.png) * | 1976-12-23 | 1978-07-21 |
-
1987
- 1987-06-23 JP JP1987096152U patent/JPH0436235Y2/ja not_active Expired
Also Published As
Publication number | Publication date |
---|---|
JPS642593U (US06272168-20010807-M00014.png) | 1989-01-09 |