JPH0436225U - - Google Patents
Info
- Publication number
- JPH0436225U JPH0436225U JP1990078099U JP7809990U JPH0436225U JP H0436225 U JPH0436225 U JP H0436225U JP 1990078099 U JP1990078099 U JP 1990078099U JP 7809990 U JP7809990 U JP 7809990U JP H0436225 U JPH0436225 U JP H0436225U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- substrates
- substrate transfer
- interface device
- transfer means
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims description 21
- 238000000034 method Methods 0.000 claims description 8
- 238000010586 diagram Methods 0.000 description 1
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1990078099U JP2550484Y2 (ja) | 1990-07-23 | 1990-07-23 | 基板処理装置間のインターフェイス装置 |
DE69113553T DE69113553T2 (de) | 1990-07-23 | 1991-07-22 | Schnittstellenvorrichtung zum Transportieren von Substraten zwischen Verarbeitungsgeräten. |
EP91112250A EP0468409B1 (en) | 1990-07-23 | 1991-07-22 | Interface apparatus for transporting substrates between substrate processing apparatus |
KR1019910012615A KR950001754B1 (ko) | 1990-07-23 | 1991-07-23 | 기판처리장치간의 기판수도용 인터페이스 장치 |
US08/080,652 US5308210A (en) | 1990-07-23 | 1993-06-22 | Interface apparatus for transporting substrates between substrate processing apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1990078099U JP2550484Y2 (ja) | 1990-07-23 | 1990-07-23 | 基板処理装置間のインターフェイス装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0436225U true JPH0436225U (US07943777-20110517-C00090.png) | 1992-03-26 |
JP2550484Y2 JP2550484Y2 (ja) | 1997-10-15 |
Family
ID=31621075
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1990078099U Expired - Lifetime JP2550484Y2 (ja) | 1990-07-23 | 1990-07-23 | 基板処理装置間のインターフェイス装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2550484Y2 (US07943777-20110517-C00090.png) |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62195118A (ja) * | 1986-02-21 | 1987-08-27 | Hitachi Ltd | フオトレジスト現像装置 |
JPS62213259A (ja) * | 1986-03-14 | 1987-09-19 | Shinkawa Ltd | バツフア装置 |
JPS63139811A (ja) * | 1986-11-29 | 1988-06-11 | Toshiba Corp | 枚葉製造装置 |
-
1990
- 1990-07-23 JP JP1990078099U patent/JP2550484Y2/ja not_active Expired - Lifetime
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62195118A (ja) * | 1986-02-21 | 1987-08-27 | Hitachi Ltd | フオトレジスト現像装置 |
JPS62213259A (ja) * | 1986-03-14 | 1987-09-19 | Shinkawa Ltd | バツフア装置 |
JPS63139811A (ja) * | 1986-11-29 | 1988-06-11 | Toshiba Corp | 枚葉製造装置 |
Also Published As
Publication number | Publication date |
---|---|
JP2550484Y2 (ja) | 1997-10-15 |
Similar Documents
Legal Events
Date | Code | Title | Description |
---|---|---|---|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
EXPY | Cancellation because of completion of term |