JPH0434447B2 - - Google Patents

Info

Publication number
JPH0434447B2
JPH0434447B2 JP15422885A JP15422885A JPH0434447B2 JP H0434447 B2 JPH0434447 B2 JP H0434447B2 JP 15422885 A JP15422885 A JP 15422885A JP 15422885 A JP15422885 A JP 15422885A JP H0434447 B2 JPH0434447 B2 JP H0434447B2
Authority
JP
Japan
Prior art keywords
gas
collective
gas treatment
guide chamber
piping
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP15422885A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6214927A (ja
Inventor
Naokuni Takemoto
Tomoaki Okamura
Hiromi Tsuno
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Doryokuro Kakunenryo Kaihatsu Jigyodan
Mitsubishi Heavy Industries Ltd
Original Assignee
Doryokuro Kakunenryo Kaihatsu Jigyodan
Mitsubishi Heavy Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Doryokuro Kakunenryo Kaihatsu Jigyodan, Mitsubishi Heavy Industries Ltd filed Critical Doryokuro Kakunenryo Kaihatsu Jigyodan
Priority to JP15422885A priority Critical patent/JPS6214927A/ja
Publication of JPS6214927A publication Critical patent/JPS6214927A/ja
Publication of JPH0434447B2 publication Critical patent/JPH0434447B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Pipeline Systems (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
JP15422885A 1985-07-15 1985-07-15 集合ガス処理装置 Granted JPS6214927A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15422885A JPS6214927A (ja) 1985-07-15 1985-07-15 集合ガス処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15422885A JPS6214927A (ja) 1985-07-15 1985-07-15 集合ガス処理装置

Publications (2)

Publication Number Publication Date
JPS6214927A JPS6214927A (ja) 1987-01-23
JPH0434447B2 true JPH0434447B2 (cs) 1992-06-08

Family

ID=15579651

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15422885A Granted JPS6214927A (ja) 1985-07-15 1985-07-15 集合ガス処理装置

Country Status (1)

Country Link
JP (1) JPS6214927A (cs)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3854640B2 (ja) * 1996-03-06 2006-12-06 株式会社 日立製作所 半導体素子製造方法

Also Published As

Publication number Publication date
JPS6214927A (ja) 1987-01-23

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