JPH0433440Y2 - - Google Patents
Info
- Publication number
- JPH0433440Y2 JPH0433440Y2 JP1984184186U JP18418684U JPH0433440Y2 JP H0433440 Y2 JPH0433440 Y2 JP H0433440Y2 JP 1984184186 U JP1984184186 U JP 1984184186U JP 18418684 U JP18418684 U JP 18418684U JP H0433440 Y2 JPH0433440 Y2 JP H0433440Y2
- Authority
- JP
- Japan
- Prior art keywords
- tank
- liquid
- sub
- tanks
- switching valves
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000007788 liquid Substances 0.000 claims description 62
- 238000001514 detection method Methods 0.000 claims description 6
- 238000011144 upstream manufacturing Methods 0.000 claims description 2
- 239000007789 gas Substances 0.000 description 11
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000007599 discharging Methods 0.000 description 3
- 239000011261 inert gas Substances 0.000 description 2
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
Landscapes
- Jet Pumps And Other Pumps (AREA)
- Pipeline Systems (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984184186U JPH0433440Y2 (US08063081-20111122-C00044.png) | 1984-12-04 | 1984-12-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984184186U JPH0433440Y2 (US08063081-20111122-C00044.png) | 1984-12-04 | 1984-12-04 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6199700U JPS6199700U (US08063081-20111122-C00044.png) | 1986-06-25 |
| JPH0433440Y2 true JPH0433440Y2 (US08063081-20111122-C00044.png) | 1992-08-11 |
Family
ID=30741671
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1984184186U Expired JPH0433440Y2 (US08063081-20111122-C00044.png) | 1984-12-04 | 1984-12-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0433440Y2 (US08063081-20111122-C00044.png) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0350320Y2 (US08063081-20111122-C00044.png) * | 1986-07-07 | 1991-10-28 | ||
| JP5534591B2 (ja) * | 2010-03-15 | 2014-07-02 | 東レエンジニアリング株式会社 | 塗布液供給装置、及び、塗布液供給方法 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58200099A (ja) * | 1982-05-17 | 1983-11-21 | Nec Corp | 液体用ポンプ |
| JPS5920472U (ja) * | 1982-07-29 | 1984-02-07 | 松下電器産業株式会社 | 磁気カ−ド読み取り装置 |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4954103U (US08063081-20111122-C00044.png) * | 1972-08-15 | 1974-05-13 |
-
1984
- 1984-12-04 JP JP1984184186U patent/JPH0433440Y2/ja not_active Expired
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58200099A (ja) * | 1982-05-17 | 1983-11-21 | Nec Corp | 液体用ポンプ |
| JPS5920472U (ja) * | 1982-07-29 | 1984-02-07 | 松下電器産業株式会社 | 磁気カ−ド読み取り装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6199700U (US08063081-20111122-C00044.png) | 1986-06-25 |
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