JPH0432957B2 - - Google Patents
Info
- Publication number
- JPH0432957B2 JPH0432957B2 JP3192384A JP3192384A JPH0432957B2 JP H0432957 B2 JPH0432957 B2 JP H0432957B2 JP 3192384 A JP3192384 A JP 3192384A JP 3192384 A JP3192384 A JP 3192384A JP H0432957 B2 JPH0432957 B2 JP H0432957B2
- Authority
- JP
- Japan
- Prior art keywords
- cryopump
- chevron
- cryopanel
- type
- module
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000007789 gas Substances 0.000 claims description 15
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 8
- 239000007788 liquid Substances 0.000 claims description 8
- 239000001307 helium Substances 0.000 claims description 4
- 229910052734 helium Inorganic materials 0.000 claims description 4
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims description 4
- 229910052757 nitrogen Inorganic materials 0.000 claims description 4
- 238000005086 pumping Methods 0.000 description 28
- 238000001816 cooling Methods 0.000 description 13
- 239000002245 particle Substances 0.000 description 7
- 238000010586 diagram Methods 0.000 description 6
- 230000005855 radiation Effects 0.000 description 6
- 230000000694 effects Effects 0.000 description 3
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 1
Landscapes
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3192384A JPS60175784A (ja) | 1984-02-22 | 1984-02-22 | クライオポンプ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3192384A JPS60175784A (ja) | 1984-02-22 | 1984-02-22 | クライオポンプ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60175784A JPS60175784A (ja) | 1985-09-09 |
| JPH0432957B2 true JPH0432957B2 (enExample) | 1992-06-01 |
Family
ID=12344488
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3192384A Granted JPS60175784A (ja) | 1984-02-22 | 1984-02-22 | クライオポンプ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60175784A (enExample) |
-
1984
- 1984-02-22 JP JP3192384A patent/JPS60175784A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60175784A (ja) | 1985-09-09 |
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