JPS60175784A - クライオポンプ - Google Patents

クライオポンプ

Info

Publication number
JPS60175784A
JPS60175784A JP3192384A JP3192384A JPS60175784A JP S60175784 A JPS60175784 A JP S60175784A JP 3192384 A JP3192384 A JP 3192384A JP 3192384 A JP3192384 A JP 3192384A JP S60175784 A JPS60175784 A JP S60175784A
Authority
JP
Japan
Prior art keywords
cryopump
chevron
module
type
cryo
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3192384A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0432957B2 (enExample
Inventor
Yasushi Iwasa
岩佐　康史
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP3192384A priority Critical patent/JPS60175784A/ja
Publication of JPS60175784A publication Critical patent/JPS60175784A/ja
Publication of JPH0432957B2 publication Critical patent/JPH0432957B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
JP3192384A 1984-02-22 1984-02-22 クライオポンプ Granted JPS60175784A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3192384A JPS60175784A (ja) 1984-02-22 1984-02-22 クライオポンプ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3192384A JPS60175784A (ja) 1984-02-22 1984-02-22 クライオポンプ

Publications (2)

Publication Number Publication Date
JPS60175784A true JPS60175784A (ja) 1985-09-09
JPH0432957B2 JPH0432957B2 (enExample) 1992-06-01

Family

ID=12344488

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3192384A Granted JPS60175784A (ja) 1984-02-22 1984-02-22 クライオポンプ

Country Status (1)

Country Link
JP (1) JPS60175784A (enExample)

Also Published As

Publication number Publication date
JPH0432957B2 (enExample) 1992-06-01

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