JPH0432533U - - Google Patents
Info
- Publication number
- JPH0432533U JPH0432533U JP7352890U JP7352890U JPH0432533U JP H0432533 U JPH0432533 U JP H0432533U JP 7352890 U JP7352890 U JP 7352890U JP 7352890 U JP7352890 U JP 7352890U JP H0432533 U JPH0432533 U JP H0432533U
- Authority
- JP
- Japan
- Prior art keywords
- wafers
- quartz
- wafer loading
- standing
- groove
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010453 quartz Substances 0.000 claims description 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 6
- 235000012431 wafers Nutrition 0.000 claims 6
Description
第１図は本考案の一実施例の外観図、第２図は
従来の石英治具の外観図である。
１……ウエーハ積載治具本体、２……ウエーハ
溝、３……突起物（大丸状）、４……突起物（楕
円状）、５……突起物（小丸状）。
FIG. 1 is an external view of an embodiment of the present invention, and FIG. 2 is an external view of a conventional quartz jig. 1...Wafer loading jig body, 2...Wafer groove, 3...Protrusion (large round shape), 4...Protrusion (elliptical shape), 5...Protrusion (small round shape).
Claims (1)
棒からなるウエーハ積載石英治具において、前記
石英棒上のウエーハを立てる溝近くにウエーハ枚
数確認用突起物が設けてあることを特徴とするウ
エーハ積載石英治具。 ２ 突起物が複数個設けられ、それぞれが指示内
容にによつて異なる形状を有する請求項１記載の
ウエーハ積載石英治具。[Scope of Claim for Utility Model Registration] 1. A wafer loading quartz jig consisting of two parallel quartz rods each having a groove for standing the wafers, in which a protrusion for confirming the number of wafers is provided near the groove for standing the wafers on the quartz rod. A wafer loading quartz jig characterized by the following. 2. The wafer loading quartz jig according to claim 1, wherein a plurality of protrusions are provided, each having a different shape depending on the instruction content.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7352890U JPH0432533U (en) | 1990-07-11 | 1990-07-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7352890U JPH0432533U (en) | 1990-07-11 | 1990-07-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0432533U true JPH0432533U (en) | 1992-03-17 |
Family
ID=31612419
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7352890U Pending JPH0432533U (en) | 1990-07-11 | 1990-07-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0432533U (en) |
-
1990
- 1990-07-11 JP JP7352890U patent/JPH0432533U/ja active Pending
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