JPS622243U - - Google Patents
Info
- Publication number
- JPS622243U JPS622243U JP9387285U JP9387285U JPS622243U JP S622243 U JPS622243 U JP S622243U JP 9387285 U JP9387285 U JP 9387285U JP 9387285 U JP9387285 U JP 9387285U JP S622243 U JPS622243 U JP S622243U
- Authority
- JP
- Japan
- Prior art keywords
- basket
- quartz
- furnace
- intervals
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010453 quartz Substances 0.000 claims description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 4
- 239000000463 material Substances 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 claims 1
- 230000003014 reinforcing effect Effects 0.000 description 1
Description
第１図ａ，ｂ，ｃは本考案にかかる石英バスケ
ツトの構造を示す正面図、側面図、斜視図、第２
図は従来の石英バスケツトの構造斜視図、を示す
。
図面において、１，２は支持棒、３は溝、４は
端部部品、５は補強部品、６は支持脚、をそれぞ
れ示す。
Figures 1a, b, and c are front, side, and perspective views showing the structure of the quartz basket according to the present invention;
The figure shows a structural perspective view of a conventional quartz basket. In the drawings, 1 and 2 are support bars, 3 is a groove, 4 is an end part, 5 is a reinforcing part, and 6 is a support leg.
Claims (1)
スケツト構造であつて、 主要部材を中空円筒状の石英材料で形成したこ
とを特徴とする石英バスケツト。[Scope of Claim for Utility Model Registration] A quartz basket having a basket structure for holding wafers vertically at intervals in a furnace, the main members being formed of a hollow cylindrical quartz material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9387285U JPS622243U (en) | 1985-06-20 | 1985-06-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9387285U JPS622243U (en) | 1985-06-20 | 1985-06-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS622243U true JPS622243U (en) | 1987-01-08 |
Family
ID=30651938
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9387285U Pending JPS622243U (en) | 1985-06-20 | 1985-06-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS622243U (en) |
-
1985
- 1985-06-20 JP JP9387285U patent/JPS622243U/ja active Pending