JPH0485728U - - Google Patents
Info
- Publication number
- JPH0485728U JPH0485728U JP13036790U JP13036790U JPH0485728U JP H0485728 U JPH0485728 U JP H0485728U JP 13036790 U JP13036790 U JP 13036790U JP 13036790 U JP13036790 U JP 13036790U JP H0485728 U JPH0485728 U JP H0485728U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- transfer jig
- changed
- utility
- scope
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010453 quartz Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
Description
第１図は、本考案のウエハー移し替え治具の斜
視図、第２図は、従来のウエハー移し替え治具の
斜視図である。
１……石英ボード、２……ウエハー受け、３…
…度決め軸。
FIG. 1 is a perspective view of a wafer transfer jig according to the present invention, and FIG. 2 is a perspective view of a conventional wafer transfer jig. 1...Quartz board, 2...Wafer receiver, 3...
...Degree axis.
Claims (1)
れるウエハー受けを設ける事を特徴とするウエハ
ー移し替え治具。 A wafer transfer jig characterized by being provided with a wafer receiver whose angle can be changed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13036790U JPH0485728U (en) | 1990-11-29 | 1990-11-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13036790U JPH0485728U (en) | 1990-11-29 | 1990-11-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0485728U true JPH0485728U (en) | 1992-07-24 |
Family
ID=31877717
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13036790U Pending JPH0485728U (en) | 1990-11-29 | 1990-11-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0485728U (en) |
-
1990
- 1990-11-29 JP JP13036790U patent/JPH0485728U/ja active Pending